DE69308859D1 - Verfahren und Vorrichtung zur gleichzeitigen Beschichtung von Kunststoffsubstraten mit Metalloxyden - Google Patents

Verfahren und Vorrichtung zur gleichzeitigen Beschichtung von Kunststoffsubstraten mit Metalloxyden

Info

Publication number
DE69308859D1
DE69308859D1 DE69308859T DE69308859T DE69308859D1 DE 69308859 D1 DE69308859 D1 DE 69308859D1 DE 69308859 T DE69308859 T DE 69308859T DE 69308859 T DE69308859 T DE 69308859T DE 69308859 D1 DE69308859 D1 DE 69308859D1
Authority
DE
Germany
Prior art keywords
metal oxides
plastic substrates
simultaneous coating
simultaneous
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69308859T
Other languages
English (en)
Other versions
DE69308859T3 (de
DE69308859T2 (de
Inventor
Andrea Fusi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Galileo Vacuum Systems Srl
Original Assignee
Galileo Vacuum Tec SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8215247&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69308859(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Galileo Vacuum Tec SpA filed Critical Galileo Vacuum Tec SpA
Publication of DE69308859D1 publication Critical patent/DE69308859D1/de
Application granted granted Critical
Publication of DE69308859T2 publication Critical patent/DE69308859T2/de
Publication of DE69308859T3 publication Critical patent/DE69308859T3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE1993608859 1993-11-09 1993-11-09 Verfahren und Vorrichtung zur Herstellung einer Kunststoffolie mit einer dielektrischen Schicht Expired - Fee Related DE69308859T3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19930830451 EP0656430B2 (de) 1993-11-09 1993-11-09 Verfahren und Vorrichtung zur gleichzeitigen Beschichtung von Kunststoffsubstraten mit Metalloxyden

Publications (3)

Publication Number Publication Date
DE69308859D1 true DE69308859D1 (de) 1997-04-17
DE69308859T2 DE69308859T2 (de) 1997-07-24
DE69308859T3 DE69308859T3 (de) 2000-11-02

Family

ID=8215247

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1993608859 Expired - Fee Related DE69308859T3 (de) 1993-11-09 1993-11-09 Verfahren und Vorrichtung zur Herstellung einer Kunststoffolie mit einer dielektrischen Schicht

Country Status (2)

Country Link
EP (1) EP0656430B2 (de)
DE (1) DE69308859T3 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1277813B1 (it) * 1995-02-01 1997-11-12 Galileo Vacuum Tec Spa Procedimento perfezionato per la co-deposizione di ossidi metallici su un film plastico, relativo impianto e prodotto ottenuto
US8057856B2 (en) * 2004-03-15 2011-11-15 Ifire Ip Corporation Method for gettering oxygen and water during vacuum deposition of sulfide films
US20060269656A1 (en) * 2005-05-26 2006-11-30 Eastman Kodak Company Reducing contamination in OLED processing systems

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB990288A (en) * 1961-09-05 1965-04-28 Ibm Improved method of depositing silicon monoxide films
JPS58167767A (ja) * 1982-03-26 1983-10-04 Clarion Co Ltd 薄膜形成方法
JP2612602B2 (ja) * 1987-12-17 1997-05-21 東洋インキ製造 株式会社 連続蒸着フィルムの製造方法および装置
CA2040638A1 (en) * 1990-04-20 1991-10-21 Gedeon I. Deak Barrier materials useful for packaging
DE4113221A1 (de) * 1991-04-23 1992-10-29 Leybold Ag Flexible, transparente polymerfolien
EP0549528A1 (de) * 1991-12-20 1993-06-30 Alusuisse-Lonza Services Ag Verfahren zur Herstellung von Substraten enthaltend eine Überzugsschicht

Also Published As

Publication number Publication date
EP0656430B1 (de) 1997-03-12
DE69308859T3 (de) 2000-11-02
EP0656430A1 (de) 1995-06-07
DE69308859T2 (de) 1997-07-24
EP0656430B2 (de) 2000-01-12

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8332 No legal effect for de
8327 Change in the person/name/address of the patent owner

Owner name: GALILEO VACUUM SYSTEMS S.R.L., PRATO, IT

8339 Ceased/non-payment of the annual fee