DE69308638D1 - Verfahren zur Ultraschallreinigung eines Werkstücks - Google Patents

Verfahren zur Ultraschallreinigung eines Werkstücks

Info

Publication number
DE69308638D1
DE69308638D1 DE69308638T DE69308638T DE69308638D1 DE 69308638 D1 DE69308638 D1 DE 69308638D1 DE 69308638 T DE69308638 T DE 69308638T DE 69308638 T DE69308638 T DE 69308638T DE 69308638 D1 DE69308638 D1 DE 69308638D1
Authority
DE
Germany
Prior art keywords
workpiece
ultrasonic cleaning
ultrasonic
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69308638T
Other languages
English (en)
Other versions
DE69308638T2 (de
Inventor
Yoshihide Shibano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
S & C CO., LTD., AIKOH, JP
Original Assignee
Yoshihide Shibano
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4151092U external-priority patent/JPH0634783U/ja
Priority claimed from JP4239384A external-priority patent/JPH0688265A/ja
Application filed by Yoshihide Shibano filed Critical Yoshihide Shibano
Publication of DE69308638D1 publication Critical patent/DE69308638D1/de
Application granted granted Critical
Publication of DE69308638T2 publication Critical patent/DE69308638T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B08B7/026—Using sound waves
    • B08B7/028—Using ultrasounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/007—Heating the liquid
DE69308638T 1992-05-25 1993-05-25 Verfahren zur Ultraschallreinigung eines Werkstücks Expired - Fee Related DE69308638T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4151092U JPH0634783U (ja) 1992-05-25 1992-05-25 ワークの洗浄、バリ取り装置における脱気装置
JP4239384A JPH0688265A (ja) 1992-09-08 1992-09-08 超音波洗浄装置

Publications (2)

Publication Number Publication Date
DE69308638D1 true DE69308638D1 (de) 1997-04-17
DE69308638T2 DE69308638T2 (de) 1997-10-02

Family

ID=26381151

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69308638T Expired - Fee Related DE69308638T2 (de) 1992-05-25 1993-05-25 Verfahren zur Ultraschallreinigung eines Werkstücks

Country Status (9)

Country Link
US (1) US6059886A (de)
EP (1) EP0572211B1 (de)
KR (1) KR930023072A (de)
CN (1) CN1054082C (de)
CA (1) CA2096589C (de)
DE (1) DE69308638T2 (de)
MY (1) MY109820A (de)
SG (1) SG47956A1 (de)
TW (1) TW212146B (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2996334B2 (ja) * 1994-03-30 1999-12-27 東北日本電気株式会社 超音波脱脂装置
US6058945A (en) * 1996-05-28 2000-05-09 Canon Kabushiki Kaisha Cleaning methods of porous surface and semiconductor surface
TW355815B (en) * 1996-05-28 1999-04-11 Canon Kasei Kk Cleaning methods of porous surface and semiconductor surface
JPH11333215A (ja) * 1998-05-29 1999-12-07 Lsi Logic Corp ろ過フィルターのエアーロック防止装置
US6699400B1 (en) * 1999-06-04 2004-03-02 Arne W. Ballantine Etch process and apparatus therefor
JP3901979B2 (ja) * 2001-10-12 2007-04-04 ミネベア株式会社 硫黄快削合金鋼の処理方法
EP1699571A1 (de) * 2003-12-23 2006-09-13 The Australian National University Auf wasser basierende reinigung
CN1958872B (zh) * 2006-10-12 2010-05-26 武汉科利尔化工有限公司 回收工件、夹具所带电镀液的方法
US7823272B2 (en) * 2006-11-14 2010-11-02 The Gillette Company Systems for producing assemblies
US7682457B2 (en) * 2007-10-04 2010-03-23 Applied Materials, Inc. Frontside structure damage protected megasonics clean
JP5329352B2 (ja) * 2009-09-08 2013-10-30 東京エレクトロン株式会社 超音波洗浄装置、超音波洗浄方法、およびこの超音波洗浄方法を実行するためのコンピュータプログラムが記録された記録媒体
CN102108517A (zh) * 2009-12-29 2011-06-29 中原工学院 一种金属烧结网的清洗工艺及其装置
CN102553852A (zh) * 2010-12-28 2012-07-11 北京京东方光电科技有限公司 清洗装置
CN102708875A (zh) * 2011-03-28 2012-10-03 东莞新科技术研究开发有限公司 真空清洗方法
CN102698977A (zh) * 2011-03-28 2012-10-03 东莞新科技术研究开发有限公司 真空清洗装置
CN102357489A (zh) * 2011-11-15 2012-02-22 天龙科技炉业(无锡)有限公司 超声波真空节能清洗机
CN102489469B (zh) * 2011-11-23 2014-07-09 由田信息技术(上海)有限公司 使用超声波震荡液体以清洁基板的方法
CN103894367A (zh) * 2012-12-28 2014-07-02 赫菲斯热处理系统江苏有限公司 一种热处理生产线用真空清洗机
CN103894366A (zh) * 2012-12-28 2014-07-02 赫菲斯热处理系统江苏有限公司 一种真空清洗室
CN104084396A (zh) * 2014-07-14 2014-10-08 苏州金牛精密机械有限公司 一种工件清洗槽
WO2016038679A1 (ja) * 2014-09-09 2016-03-17 株式会社ブルー・スターＲ＆Ｄ 超音波バリ取り装置
US9808840B2 (en) * 2014-10-15 2017-11-07 Saudi Arabian Oil Company Air filter ultrasonic cleaning systems and the methods of using the same
CN105643375B (zh) * 2016-01-12 2018-08-17 中国石油大学(华东) 一种高声能密度单槽真空混频浸没式超声波表面处理装置
CN109107981A (zh) * 2017-06-23 2019-01-01 黄鹤洋 一种医用超声波清洗装置
CN107803364A (zh) * 2017-11-20 2018-03-16 嘉善信息技术工程学校 一种剃须刀清理设备
EP3858501B1 (de) * 2018-09-26 2024-04-03 Nippon Steel Corporation Metallrohrreinigungsverfahren und -reinigungsvorrichtung
CN110238540A (zh) * 2019-05-31 2019-09-17 苏州五方光电材料有限公司 一种光学镜片的加工方法
CN114669549A (zh) * 2022-03-08 2022-06-28 阳江合金材料实验室 一种避免刀具空化腐蚀的清洗方法及系统
CN115572964A (zh) * 2022-11-21 2023-01-06 河北宇天材料科技有限公司 一种铝合金腔体导电氧化处理方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2977962A (en) * 1957-12-11 1961-04-04 Zucker Jacques Process for the cleaning of metal parts
US2997962A (en) * 1958-05-08 1961-08-29 Gen Motors Corp Pump
US4193818A (en) * 1978-05-05 1980-03-18 American Sterilizer Company Combined ultrasonic cleaning and biocidal treatment in a single pressure vessel
US4907611A (en) * 1986-12-22 1990-03-13 S & C Co., Ltd. Ultrasonic washing apparatus
JP2794438B2 (ja) * 1989-02-16 1998-09-03 本多電子株式会社 キャビテーションを利用した洗浄方法
JP2744913B2 (ja) * 1989-03-06 1998-04-28 エスアンドシー株式会社 超音波洗浄、バリ取り装置
JPH03288581A (ja) * 1990-04-03 1991-12-18 Yoshihide Shibano スプレー式超音波洗浄装置
JPH0424552A (ja) * 1990-05-21 1992-01-28 Tosoh Corp ヒドロキノン誘導体の分析方法
US5202523A (en) * 1991-07-29 1993-04-13 Grossman Dennis L Firearm cleaning system
US5201958A (en) * 1991-11-12 1993-04-13 Electronic Controls Design, Inc. Closed-loop dual-cycle printed circuit board cleaning apparatus and method

Also Published As

Publication number Publication date
US6059886A (en) 2000-05-09
MY109820A (en) 1997-08-30
DE69308638T2 (de) 1997-10-02
CA2096589A1 (en) 1993-11-26
EP0572211B1 (de) 1997-03-12
CN1054082C (zh) 2000-07-05
KR930023072A (ko) 1993-12-18
EP0572211A1 (de) 1993-12-01
TW212146B (en) 1993-09-01
SG47956A1 (en) 1998-04-17
CA2096589C (en) 2000-12-26
CN1079679A (zh) 1993-12-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: S & C CO., LTD., AIKOH, JP

8381 Inventor (new situation)

Free format text: SHIBANO, YOSHIHIDE, MACHIDA, TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee