DE69305774D1 - Verfahren zur Bildung eines Bariumtitanatfilms - Google Patents
Verfahren zur Bildung eines BariumtitanatfilmsInfo
- Publication number
- DE69305774D1 DE69305774D1 DE69305774T DE69305774T DE69305774D1 DE 69305774 D1 DE69305774 D1 DE 69305774D1 DE 69305774 T DE69305774 T DE 69305774T DE 69305774 T DE69305774 T DE 69305774T DE 69305774 D1 DE69305774 D1 DE 69305774D1
- Authority
- DE
- Germany
- Prior art keywords
- forming
- barium titanate
- titanate film
- film
- barium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 title 1
- 229910002113 barium titanate Inorganic materials 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G23/00—Compounds of titanium
- C01G23/003—Titanates
- C01G23/006—Alkaline earth titanates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
- C04B41/455—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application the coating or impregnating process including a chemical conversion or reaction
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
- C04B41/5041—Titanium oxide or titanates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
- C23C26/02—Coating not provided for in groups C23C2/00 - C23C24/00 applying molten material to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
- H01G4/1227—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/30—Three-dimensional structures
- C01P2002/34—Three-dimensional structures perovskite-type (ABO3)
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Ceramic Capacitors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09074292A JP3225583B2 (ja) | 1992-04-10 | 1992-04-10 | チタン酸バリウム薄膜形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69305774D1 true DE69305774D1 (de) | 1996-12-12 |
DE69305774T2 DE69305774T2 (de) | 1997-04-30 |
Family
ID=14007042
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69305774T Expired - Lifetime DE69305774T2 (de) | 1992-04-10 | 1993-04-06 | Verfahren zur Bildung eines Bariumtitanatfilms |
Country Status (4)
Country | Link |
---|---|
US (1) | US5451426A (de) |
EP (1) | EP0565064B1 (de) |
JP (1) | JP3225583B2 (de) |
DE (1) | DE69305774T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998027010A1 (en) * | 1996-12-16 | 1998-06-25 | Industrial Research Limited | Synthesis of aluminium and titanium compounds |
US6608760B2 (en) | 1998-05-04 | 2003-08-19 | Tpl, Inc. | Dielectric material including particulate filler |
US6616794B2 (en) | 1998-05-04 | 2003-09-09 | Tpl, Inc. | Integral capacitance for printed circuit board using dielectric nanopowders |
US20040109298A1 (en) * | 1998-05-04 | 2004-06-10 | Hartman William F. | Dielectric material including particulate filler |
TW490439B (en) * | 1999-12-10 | 2002-06-11 | Nat Science Council | Method for preparing a barium fluorotitante (BaTiF6) powder and depositing a barium titanate (BaTiO3) thin film on a silicon wafer |
TW200302296A (en) * | 2001-11-12 | 2003-08-01 | Toho Titanium Co Ltd | Composite titanium oxide film and method for formation thereof and titanium electrolytic capacitor |
US20060074166A1 (en) * | 2003-12-19 | 2006-04-06 | Tpl, Inc. Title And Interest In An Application | Moldable high dielectric constant nano-composites |
US20060074164A1 (en) * | 2003-12-19 | 2006-04-06 | Tpl, Inc. | Structured composite dielectrics |
US20080128961A1 (en) * | 2003-12-19 | 2008-06-05 | Tpl, Inc. | Moldable high dielectric constant nano-composites |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2922730A (en) * | 1956-06-07 | 1960-01-26 | Feldman Charles | Method of forming thin films of barium titanate |
US3002861A (en) * | 1957-06-07 | 1961-10-03 | Lydia A Suchoff | Method of producing a coating of barium titanate |
EP0146284B1 (de) * | 1983-11-29 | 1988-06-29 | Sony Corporation | Verfahren zur Herstellung von dielektrischen Metalltitanaten |
JPH0649950B2 (ja) * | 1984-07-19 | 1994-06-29 | ソニー株式会社 | Ti金属層とBa1−xSrxTiO3被膜よりなる複合体及びその製造方法 |
FR2617151B1 (fr) * | 1987-06-29 | 1990-10-12 | Solvay | Procede pour la fabrication d'une poudre d'oxydes metalliques mixtes, et poudres d'oxydes metalliques mixtes |
US4959089A (en) * | 1988-05-03 | 1990-09-25 | Alfred University | Process for preparing a barium titanate film |
JPH0294209A (ja) * | 1988-09-29 | 1990-04-05 | Matsushita Electric Ind Co Ltd | 強誘電体薄膜の製造方法 |
JPH02258700A (ja) * | 1989-03-30 | 1990-10-19 | Res Inst For Prod Dev | 強誘電体薄膜及びその製造法 |
DE4017518A1 (de) * | 1990-05-31 | 1991-12-05 | Philips Patentverwaltung | Verfahren zur herstellung von monolayer-kondensatoren |
JP3235145B2 (ja) * | 1991-11-01 | 2001-12-04 | 株式会社村田製作所 | チタン酸バリウム薄膜の形成方法 |
-
1992
- 1992-04-10 JP JP09074292A patent/JP3225583B2/ja not_active Expired - Fee Related
-
1993
- 1993-04-06 DE DE69305774T patent/DE69305774T2/de not_active Expired - Lifetime
- 1993-04-06 EP EP93105711A patent/EP0565064B1/de not_active Expired - Lifetime
- 1993-04-08 US US08/044,974 patent/US5451426A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5451426A (en) | 1995-09-19 |
JPH05286720A (ja) | 1993-11-02 |
DE69305774T2 (de) | 1997-04-30 |
EP0565064A1 (de) | 1993-10-13 |
EP0565064B1 (de) | 1996-11-06 |
JP3225583B2 (ja) | 2001-11-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |