DE69304380D1 - Vorrichtung zur feinoptischen Bearbeitung - Google Patents

Vorrichtung zur feinoptischen Bearbeitung

Info

Publication number
DE69304380D1
DE69304380D1 DE69304380T DE69304380T DE69304380D1 DE 69304380 D1 DE69304380 D1 DE 69304380D1 DE 69304380 T DE69304380 T DE 69304380T DE 69304380 T DE69304380 T DE 69304380T DE 69304380 D1 DE69304380 D1 DE 69304380D1
Authority
DE
Germany
Prior art keywords
optical processing
fine optical
fine
processing
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69304380T
Other languages
English (en)
Other versions
DE69304380T2 (de
Inventor
Masataka Shinogi
Toshihiko Sakuhara
Masayuki Suda
Fumiharu Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Publication of DE69304380D1 publication Critical patent/DE69304380D1/de
Application granted granted Critical
Publication of DE69304380T2 publication Critical patent/DE69304380T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/14—Etching locally

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Micromachines (AREA)
  • Laser Beam Processing (AREA)
DE69304380T 1992-03-30 1993-03-24 Vorrichtung zur feinoptischen Bearbeitung Expired - Fee Related DE69304380T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4074732A JP2896726B2 (ja) 1992-03-30 1992-03-30 微細加工装置

Publications (2)

Publication Number Publication Date
DE69304380D1 true DE69304380D1 (de) 1996-10-10
DE69304380T2 DE69304380T2 (de) 1997-01-23

Family

ID=13555702

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69304380T Expired - Fee Related DE69304380T2 (de) 1992-03-30 1993-03-24 Vorrichtung zur feinoptischen Bearbeitung

Country Status (4)

Country Link
US (1) US5288382A (de)
EP (1) EP0563782B1 (de)
JP (1) JP2896726B2 (de)
DE (1) DE69304380T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103342334B (zh) * 2013-05-10 2016-01-20 厦门大学 一种电化学刻蚀加工聚合物材料表面的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2106542B (en) * 1981-07-24 1985-10-09 Inoue Japax Res A method and apparatus for electrodeposition
US4537670A (en) * 1982-05-28 1985-08-27 Energy Conversion Devices, Inc. Apparatus for making a stamping master for video disk replication
EP0131367B1 (de) * 1983-05-30 1989-04-05 Inoue-Japax Research Incorporated Verfahren und Einrichtung zum Bearbeiten von keramischen Werkstoffen
US4497692A (en) * 1983-06-13 1985-02-05 International Business Machines Corporation Laser-enhanced jet-plating and jet-etching: high-speed maskless patterning method
EP0261296B1 (de) * 1986-09-25 1992-07-22 Laude, Lucien Diégo Vorrichtung zur laserunterstützten, elektrolytischen Metallabscheidung
JP2952539B2 (ja) * 1992-03-30 1999-09-27 セイコーインスツルメンツ株式会社 微細加工装置

Also Published As

Publication number Publication date
JPH05272000A (ja) 1993-10-19
EP0563782B1 (de) 1996-09-04
JP2896726B2 (ja) 1999-05-31
EP0563782A2 (de) 1993-10-06
US5288382A (en) 1994-02-22
EP0563782A3 (en) 1995-02-01
DE69304380T2 (de) 1997-01-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF

8328 Change in the person/name/address of the agent

Representative=s name: SCHROETER LEHMANN FISCHER & NEUGEBAUER, 81479 MUEN

8339 Ceased/non-payment of the annual fee