DE69300339D1 - Vorrichtung und Verfahren zum Steuern der Leistung eines Lasers. - Google Patents

Vorrichtung und Verfahren zum Steuern der Leistung eines Lasers.

Info

Publication number
DE69300339D1
DE69300339D1 DE69300339T DE69300339T DE69300339D1 DE 69300339 D1 DE69300339 D1 DE 69300339D1 DE 69300339 T DE69300339 T DE 69300339T DE 69300339 T DE69300339 T DE 69300339T DE 69300339 D1 DE69300339 D1 DE 69300339D1
Authority
DE
Germany
Prior art keywords
laser
controlling
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69300339T
Other languages
English (en)
Other versions
DE69300339T2 (de
Inventor
Osamu Nagano
Masanori Mizuno
Tsukasa Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE69300339D1 publication Critical patent/DE69300339D1/de
Publication of DE69300339T2 publication Critical patent/DE69300339T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/1312—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)
DE69300339T 1992-01-24 1993-01-21 Vorrichtung und Verfahren zum Steuern der Leistung eines Lasers. Expired - Fee Related DE69300339T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4010975A JP2917642B2 (ja) 1992-01-24 1992-01-24 レーザ出力制御装置

Publications (2)

Publication Number Publication Date
DE69300339D1 true DE69300339D1 (de) 1995-09-14
DE69300339T2 DE69300339T2 (de) 1996-02-15

Family

ID=11765163

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69300339T Expired - Fee Related DE69300339T2 (de) 1992-01-24 1993-01-21 Vorrichtung und Verfahren zum Steuern der Leistung eines Lasers.

Country Status (5)

Country Link
US (1) US5408482A (de)
EP (1) EP0557719B1 (de)
JP (1) JP2917642B2 (de)
DE (1) DE69300339T2 (de)
TW (1) TW203668B (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5464960A (en) * 1993-01-12 1995-11-07 Iatrotech, Inc. Laser calibration device
JP3372302B2 (ja) * 1993-07-05 2003-02-04 ファナック株式会社 レーザ出力制御方式
JP3315556B2 (ja) * 1994-04-27 2002-08-19 三菱電機株式会社 レーザ加工装置
JP3864287B2 (ja) * 1996-03-14 2006-12-27 株式会社小松製作所 レーザ装置
JP2910763B1 (ja) * 1998-06-03 1999-06-23 スズキ株式会社 溶接レーザの焦点位置検出装置
WO2000025684A1 (en) * 1998-10-30 2000-05-11 Redfield Corporation Infrared coagulator with disposable tip light guide
DE19983950T1 (de) * 1999-04-27 2002-08-01 Mitsubishi Electric Corp Verfahren zum Steuern der Arbeitsbedingungen einer Laserarbeitsmaschine und ein computerlesbares Speichermedium
EP1437806B1 (de) * 2001-10-16 2014-11-19 Kataoka Corporation Pulsierender festkörperlaser und laserbearbeitungsvorrichtung
US20060096956A1 (en) * 2001-10-19 2006-05-11 Mitsubishi Denki Kabushiki Kaisha Method of controlling working conditions of a laser working machine and a computer-readable storage medium
US6794424B2 (en) 2001-12-04 2004-09-21 Agilent Technologies, Inc. Devices for calibrating optical scanners and methods of using the same
KR100916656B1 (ko) * 2002-10-22 2009-09-08 삼성전자주식회사 레이저 조사 장치 및 이를 이용한 다결정 규소 박막트랜지스터의 제조 방법
US7534561B2 (en) 2003-04-02 2009-05-19 Agilent Technologies, Inc. Nucleic acid array in situ fabrication methods and arrays produced using the same
JP2005158984A (ja) * 2003-11-26 2005-06-16 Fanuc Ltd レーザ発振器
JP4715099B2 (ja) * 2004-02-24 2011-07-06 日本電気株式会社 光強度可変器及びその制御方法
JP2005268558A (ja) * 2004-03-19 2005-09-29 Fanuc Ltd レーザ装置
JP2008028317A (ja) * 2006-07-25 2008-02-07 Fanuc Ltd レーザ装置
JP4917382B2 (ja) * 2006-08-09 2012-04-18 株式会社ディスコ レーザー光線照射装置およびレーザー加工機
US8374818B2 (en) 2008-12-19 2013-02-12 Affymetrix, Inc. System, method and apparatus for calibrating inspection tools
JP5303305B2 (ja) * 2009-02-16 2013-10-02 東芝Ｉｔコントロールシステム株式会社 レーザ制御装置
JP5068863B2 (ja) 2011-02-17 2012-11-07 ファナック株式会社 精確にレーザ出力を補正できる高出力レーザ装置
JP5995414B2 (ja) * 2011-06-20 2016-09-21 キヤノン株式会社 レーザー装置
JP6270356B2 (ja) * 2013-07-04 2018-01-31 株式会社アマダミヤチ レーザ装置及びレーザ出力補正方法
JP6513306B1 (ja) * 2018-05-07 2019-05-15 三菱電機株式会社 レーザ装置、レーザ加工機およびレーザ装置の出力制御方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3806829A (en) * 1971-04-13 1974-04-23 Sys Inc Pulsed laser system having improved energy control with improved power supply laser emission energy sensor and adjustable repetition rate control features
JPS57107151A (en) * 1980-12-25 1982-07-03 Olympus Optical Co Laser irradiating apparatus
JPS57202794A (en) * 1981-06-09 1982-12-11 Mitsubishi Electric Corp Controlling device for laser output
JPS5844784A (ja) * 1981-09-11 1983-03-15 Nippon Sekigaisen Kogyo Kk レ−ザ装置
JPS61209790A (ja) * 1985-03-14 1986-09-18 Matsushita Electric Ind Co Ltd レ−ザ加工機のパワ−制御装置
JPH0714097B2 (ja) * 1985-10-30 1995-02-15 株式会社日平トヤマ レ−ザ出力制御装置
EP0273361B1 (de) * 1986-12-29 1994-06-08 Fuji Photo Film Co., Ltd. Laserstrahlaufzeichnungsverfahren und -vorrichtung
DE3854094T2 (de) * 1987-04-13 1996-01-25 Sharp Kk Apparat zum Betreiben einer Halbleiterlaservorrichtung.
JPH0362515A (ja) * 1989-07-28 1991-03-18 Matsushita Electric Ind Co Ltd 真空加熱処理装置
JPH0399484A (ja) * 1989-09-12 1991-04-24 Brother Ind Ltd 半導体レーザ駆動回路
DE3930495C2 (de) * 1989-09-12 1996-11-07 Rofin Sinar Laser Gmbh Einrichtung zum Einstellen von Fokusdurchmesser und Fokuslage eines Laserstrahls
JPH03207586A (ja) * 1990-01-11 1991-09-10 Toshiba Corp レーザ加工装置
US5163063A (en) * 1990-02-07 1992-11-10 Copal Co., Ltd. Semiconductor laser driving circuit
JPH03230879A (ja) * 1990-02-07 1991-10-14 Yamazaki Mazak Corp レーザ加工機の出力制御方法及び出力制御装置
JP2546080B2 (ja) * 1991-05-10 1996-10-23 富士通株式会社 半導体レーザー制御装置

Also Published As

Publication number Publication date
DE69300339T2 (de) 1996-02-15
US5408482A (en) 1995-04-18
EP0557719A1 (de) 1993-09-01
JPH05206554A (ja) 1993-08-13
TW203668B (en) 1993-04-11
JP2917642B2 (ja) 1999-07-12
EP0557719B1 (de) 1995-08-09

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Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee