DE69232273T2 - Beschleunigungsmessaufnehmer - Google Patents

Beschleunigungsmessaufnehmer

Info

Publication number
DE69232273T2
DE69232273T2 DE69232273T DE69232273T DE69232273T2 DE 69232273 T2 DE69232273 T2 DE 69232273T2 DE 69232273 T DE69232273 T DE 69232273T DE 69232273 T DE69232273 T DE 69232273T DE 69232273 T2 DE69232273 T2 DE 69232273T2
Authority
DE
Germany
Prior art keywords
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69232273T
Other languages
English (en)
Other versions
DE69232273D1 (de
Inventor
Muneharu Yamashita
Jun Tabota
Toshihiro Mizuno
Jiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24329991A external-priority patent/JP2900658B2/ja
Priority claimed from JP3255284A external-priority patent/JPH0792473B2/ja
Priority claimed from JP3316203A external-priority patent/JP2745908B2/ja
Priority claimed from JP3346735A external-priority patent/JP2745919B2/ja
Priority claimed from JP1762792A external-priority patent/JP2705426B2/ja
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69232273D1 publication Critical patent/DE69232273D1/de
Publication of DE69232273T2 publication Critical patent/DE69232273T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
DE69232273T 1991-09-24 1992-09-22 Beschleunigungsmessaufnehmer Expired - Lifetime DE69232273T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP24329991A JP2900658B2 (ja) 1991-09-24 1991-09-24 加速度センサ
JP3255284A JPH0792473B2 (ja) 1991-10-02 1991-10-02 圧電式加速度センサ
JP3316203A JP2745908B2 (ja) 1991-11-29 1991-11-29 加速度センサ
JP3346735A JP2745919B2 (ja) 1991-12-27 1991-12-27 加速度センサ
JP1762792A JP2705426B2 (ja) 1992-02-03 1992-02-03 加速度センサ

Publications (2)

Publication Number Publication Date
DE69232273D1 DE69232273D1 (de) 2002-01-17
DE69232273T2 true DE69232273T2 (de) 2002-08-08

Family

ID=27519939

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69232273T Expired - Lifetime DE69232273T2 (de) 1991-09-24 1992-09-22 Beschleunigungsmessaufnehmer
DE69211269T Expired - Lifetime DE69211269T2 (de) 1991-09-24 1992-09-22 Beschleunigungsmessaufnehmer
DE69232272T Expired - Lifetime DE69232272T2 (de) 1991-09-24 1992-09-22 Beschleunigungsmessaufnehmer

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE69211269T Expired - Lifetime DE69211269T2 (de) 1991-09-24 1992-09-22 Beschleunigungsmessaufnehmer
DE69232272T Expired - Lifetime DE69232272T2 (de) 1991-09-24 1992-09-22 Beschleunigungsmessaufnehmer

Country Status (3)

Country Link
US (2) US5438859A (de)
EP (3) EP0534366B1 (de)
DE (3) DE69232273T2 (de)

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US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
EP0715722B1 (de) * 1993-08-24 1998-06-03 A/S BRÜEL & KJAER Vorrichtung zur entdeckung fehlerhaften funktionierens eines beschleunigungsmessaufnehmers
JPH085654A (ja) * 1994-06-23 1996-01-12 Murata Mfg Co Ltd 加速度センサ
JP3114006B2 (ja) * 1994-08-29 2000-12-04 セイコーインスツルメンツ株式会社 半導体装置、及び、その製造方法
US6911727B1 (en) 1995-06-06 2005-06-28 Analog Devices, Inc. Package for sealing an integrated circuit die
US6323550B1 (en) * 1995-06-06 2001-11-27 Analog Devices, Inc. Package for sealing an integrated circuit die
EP0852337A1 (de) * 1996-12-24 1998-07-08 STMicroelectronics S.r.l. Hermetisch abgedichteter Halbleiter-Trägheitssensor
JP3233059B2 (ja) * 1997-03-07 2001-11-26 株式会社村田製作所 超音波センサ
EP0886144B1 (de) * 1997-06-19 2006-09-06 STMicroelectronics S.r.l. Hermetisch abgeschlossener Sensor mit beweglicher Mikrostruktur
JP2000214179A (ja) * 1999-01-26 2000-08-04 Asuko Kk 加速度センサおよび加速度検出システム
JP2000346865A (ja) * 1999-03-26 2000-12-15 Ngk Insulators Ltd 加速度センサ素子の感度調整方法
JP2001349900A (ja) * 1999-12-28 2001-12-21 Fujitsu Ltd 加速度センサ及び加速度センサ装置
DE10031793C1 (de) * 2000-07-04 2002-02-07 Peter Apel Piezoelektrischer Sensor
DE10113802B4 (de) * 2001-03-21 2007-10-18 Siemens Ag Vorrichtung zum Ansteuern eines piezoelektrischen Stellgliedes
US6531884B1 (en) 2001-08-27 2003-03-11 Rosemount Inc. Diagnostics for piezoelectric sensor
DE10223553B4 (de) * 2002-05-27 2004-08-05 Siemens Ag Verfahren zur Ansteuerung eines Aktors und zugehörige Steuereinrichtung
US7646095B2 (en) * 2003-09-30 2010-01-12 Panasonic Corporation Semiconductor device
US7290993B2 (en) * 2004-04-02 2007-11-06 Adaptivenergy Llc Piezoelectric devices and methods and circuits for driving same
US7287965B2 (en) * 2004-04-02 2007-10-30 Adaptiv Energy Llc Piezoelectric devices and methods and circuits for driving same
US7312554B2 (en) * 2004-04-02 2007-12-25 Adaptivenergy, Llc Piezoelectric devices and methods and circuits for driving same
US20050225201A1 (en) * 2004-04-02 2005-10-13 Par Technologies, Llc Piezoelectric devices and methods and circuits for driving same
DE102004050674B4 (de) * 2004-10-18 2018-02-08 Volkswagen Ag Befestigungsanordnung für elektrische Komponenten in einem Fahrzeug
JP4779423B2 (ja) * 2005-04-26 2011-09-28 パナソニック株式会社 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ
JP2007155700A (ja) * 2005-11-09 2007-06-21 Denso Corp 車両用衝突検知装置
JP4821900B2 (ja) * 2009-09-11 2011-11-24 セイコーエプソン株式会社 検出装置、物理量測定装置及び電子機器
JP5083287B2 (ja) * 2009-09-11 2012-11-28 セイコーエプソン株式会社 検出装置、物理量測定装置及び電子機器
US20150059430A1 (en) * 2012-04-20 2015-03-05 Panasonic Intellectual Property Management Co., Ltd. Inertial force sensor
ITTO20120542A1 (it) 2012-06-20 2013-12-21 St Microelectronics Srl Dispositivo microelettromeccanico con instradamento dei segnali attraverso un cappuccio protettivo e metodo per controllare un dispositivo microelettromeccanico
DE102014213217A1 (de) * 2014-07-08 2016-01-14 Continental Teves Ag & Co. Ohg Körperschallentkopplung an mit Geberfeldern arbeitenden Sensoren
CN107533082A (zh) * 2015-03-12 2018-01-02 株式会社村田制作所 加速度检测装置及其制造方法
US10054607B2 (en) * 2016-05-12 2018-08-21 Google Llc Using accelerometer to self-test piezoelectric component in a portable device
CN106153981B (zh) * 2016-05-24 2022-09-27 中国人民解放军海军工程大学 Iepe型智能加速度传感器及其工作方法

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JPS5822912A (ja) * 1981-08-03 1983-02-10 Nippon Denso Co Ltd 入力信号の変化率検出装置
US4450914A (en) * 1982-01-25 1984-05-29 Dresser Industries, Inc. Well treatment valve
JPS58137329A (ja) * 1982-02-10 1983-08-15 Nec Corp 入力信号線断線検出回路
US4459505A (en) * 1982-05-28 1984-07-10 Rca Corporation Piezoelectric ultor voltage generator for a television receiver
JPS59181585A (ja) * 1983-03-31 1984-10-16 Toshiba Corp 変位発生装置
JPS59204477A (ja) * 1983-05-04 1984-11-19 Nippon Kogaku Kk <Nikon> 超音波モーターの駆動制御回路
FR2546303B1 (fr) * 1983-05-20 1985-07-05 Thomson Csf Capteur de forces a ondes elastiques de surface
DE3328114A1 (de) * 1983-08-04 1985-02-14 Robert Bosch Gmbh, 7000 Stuttgart Ausloesevorrichtung fuer rueckhaltesysteme in kraftfahrzeugen
FR2558263B1 (fr) * 1984-01-12 1986-04-25 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie
JPS6196340A (ja) * 1984-10-18 1986-05-15 Mitsubishi Electric Corp 空気調和機
JPH0660906B2 (ja) * 1984-12-18 1994-08-10 日産自動車株式会社 半導体加速度センサ
GB2174500B (en) * 1985-05-04 1988-02-10 Stc Plc Accelerometer
US4676104A (en) * 1985-08-06 1987-06-30 United Technologies Corporation Surface skimming bulk acoustic wave accelerometer
JPS6320663A (ja) * 1986-07-15 1988-01-28 Brother Ind Ltd ワ−ドプロセツサ
JPH07122643B2 (ja) * 1986-11-27 1995-12-25 日本電装株式会社 加速度検出装置
JPS63206663A (ja) * 1987-02-23 1988-08-25 Mitsubishi Electric Corp 歪ゲ−ジ式加速度センサ
US4950914A (en) * 1987-03-30 1990-08-21 Honda Giken Kogyo Kabushiki Kaisha Collision detection system for a vehicle
DE68907121T2 (de) * 1988-04-11 1994-01-27 Nippon Denso Co Beschleunigungsaufnehmer.
JPH027879A (ja) * 1988-06-27 1990-01-11 Matsushita Electric Ind Co Ltd 超音波モータ駆動装置
JPH0215707A (ja) * 1988-07-01 1990-01-19 Seiko Electronic Components Ltd 水晶振動子の支持構造
JPH0248865A (ja) * 1988-08-10 1990-02-19 Hitachi Ltd 水平・垂直輪郭強調回路
IT1223933B (it) * 1988-11-23 1990-09-29 Marelli Autronica Trasduttore di accelerazione ad effetto capacitivo
EP0374870B1 (de) * 1988-12-23 1993-04-07 Mitsubishi Denki Kabushiki Kaisha Beschleunigungsmessaufnehmer
JPH032569A (ja) * 1989-05-30 1991-01-08 Ricoh Co Ltd 加速度センサ
US5130600A (en) * 1989-06-02 1992-07-14 Mitsubishi Petrochemical Co., Ltd. Acceleration sensor
GB8927927D0 (en) * 1989-12-11 1990-02-14 Kellett Michael A Transducers and associated control circuits
DE3942011C3 (de) * 1989-12-20 1996-10-17 Telefunken Microelectron Einrichtung zur Auslösung einer passiven Sicherheitseinrichtung für Fahrzeuginsassen
US5239871A (en) * 1990-12-17 1993-08-31 Texas Instruments Incorporated Capacitive accelerometer

Also Published As

Publication number Publication date
EP0534366A1 (de) 1993-03-31
US5438859A (en) 1995-08-08
DE69232272D1 (de) 2002-01-17
EP0646799B1 (de) 2001-12-05
DE69232272T2 (de) 2002-08-08
EP0646798B1 (de) 2001-12-05
EP0646798A3 (de) 1998-12-16
EP0646799A3 (de) 1998-12-16
DE69232273D1 (de) 2002-01-17
EP0646799A2 (de) 1995-04-05
EP0534366B1 (de) 1996-06-05
DE69211269D1 (de) 1996-07-11
US5517845A (en) 1996-05-21
EP0646798A2 (de) 1995-04-05
DE69211269T2 (de) 1997-01-23

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