DE69231585T2 - Schrittweise abtasttechnik für interferometer - Google Patents
Schrittweise abtasttechnik für interferometerInfo
- Publication number
- DE69231585T2 DE69231585T2 DE69231585T DE69231585T DE69231585T2 DE 69231585 T2 DE69231585 T2 DE 69231585T2 DE 69231585 T DE69231585 T DE 69231585T DE 69231585 T DE69231585 T DE 69231585T DE 69231585 T2 DE69231585 T2 DE 69231585T2
- Authority
- DE
- Germany
- Prior art keywords
- interferometers
- sample technology
- sample
- technology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J3/453—Interferometric spectrometry by correlation of the amplitudes
- G01J3/4535—Devices with moving mirror
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Spectrometry And Color Measurement (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/704,304 US5166749A (en) | 1991-05-22 | 1991-05-22 | Step scanning technique for interferometer |
PCT/US1992/003838 WO1992021072A1 (en) | 1991-05-22 | 1992-05-08 | Step scanning technique for interferometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69231585D1 DE69231585D1 (de) | 2001-01-04 |
DE69231585T2 true DE69231585T2 (de) | 2001-05-31 |
Family
ID=24828921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69231585T Expired - Fee Related DE69231585T2 (de) | 1991-05-22 | 1992-05-08 | Schrittweise abtasttechnik für interferometer |
Country Status (6)
Country | Link |
---|---|
US (1) | US5166749A (de) |
EP (2) | EP0595835B1 (de) |
JP (1) | JP3694020B2 (de) |
CA (1) | CA2109510C (de) |
DE (1) | DE69231585T2 (de) |
WO (1) | WO1992021072A1 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5412474A (en) * | 1992-05-08 | 1995-05-02 | Smithsonian Institution | System for measuring distance between two points using a variable frequency coherent source |
US5260633A (en) * | 1992-09-21 | 1993-11-09 | Selwyn Lissack | Shaft rotational status indicator |
US5539518A (en) * | 1993-09-13 | 1996-07-23 | The United States Of America As Represented By The United States Department Of Energy | Method for determining and displaying the spacial distribution of a spectral pattern of received light |
JPH07209085A (ja) * | 1994-01-19 | 1995-08-11 | Yokogawa Electric Corp | フーリエ分光器 |
US6025913A (en) * | 1997-08-08 | 2000-02-15 | Bio-Rad Laboratories | Digital signal processing (DSP) techniques for FT-IR multiple modulation measurements using a photoelastic modulator |
US6043884A (en) * | 1997-08-08 | 2000-03-28 | Bio-Rad Laboratories, Inc. | DSP technique for photoacoustic spectroscopy (PAS) sample pulse response for depth profiling |
WO2000009970A1 (en) * | 1998-08-10 | 2000-02-24 | Midac Corporation | Spectrometer with dual digitizer for high-dynamic range spectroscopic data collection |
US6320920B1 (en) | 1998-10-08 | 2001-11-20 | Gregory Lee Beyke | Phase coherence filter |
JP2000193524A (ja) * | 1998-12-28 | 2000-07-14 | Nippon Sanso Corp | 光吸収スペクトル測定方法及びその装置 |
US6195168B1 (en) * | 1999-07-22 | 2001-02-27 | Zygo Corporation | Infrared scanning interferometry apparatus and method |
JP3945142B2 (ja) * | 2000-10-12 | 2007-07-18 | 株式会社日立製作所 | リニアモータ及びその制御方法 |
US6597458B2 (en) | 2001-02-02 | 2003-07-22 | Texas Christian University | Method and system for stabilizing and demodulating an interferometer at quadrature |
US6462823B1 (en) * | 2001-04-13 | 2002-10-08 | Agilent Technologies, Inc. | Wavelength meter adapted for averaging multiple measurements |
JP4032841B2 (ja) * | 2002-06-21 | 2008-01-16 | 株式会社島津製作所 | 二光束干渉計の固定鏡調整方法 |
WO2004088241A2 (en) * | 2003-03-26 | 2004-10-14 | Southwest Sciences Incorporated | Method and apparatus for imaging internal structures of transparent and translucent materials |
AT413241B (de) * | 2004-03-04 | 2005-12-15 | Upper Austrian Res Gmbh | Verfahren und vorrichtung zur aufnahme eines interferogramms von infrarotlicht |
CA2566799C (en) * | 2004-05-14 | 2019-02-12 | Chemometec A/S | A method and a system for the assessment of samples |
JP4585839B2 (ja) * | 2004-12-06 | 2010-11-24 | 日本分光株式会社 | 顕微鏡 |
US7394546B2 (en) * | 2005-05-23 | 2008-07-01 | Southwest Sciences Incorporated | Method and apparatus for full phase interferometry |
US8457754B2 (en) * | 2006-06-16 | 2013-06-04 | Second Sight Medical Products, Inc. | Apparatus and method for electrical stimulation of human neurons |
US8311634B2 (en) * | 2006-06-16 | 2012-11-13 | Second Sight Medical Products Inc. | Apparatus and method for electrical stimulation of human retina |
JP4909244B2 (ja) * | 2007-11-16 | 2012-04-04 | 浜松ホトニクス株式会社 | 干渉測定装置 |
JP2009303358A (ja) * | 2008-06-12 | 2009-12-24 | Canon Inc | 変位検出方法、補正テーブル作成方法、モータ制御装置及び工作機械装置 |
US8792105B2 (en) | 2010-01-19 | 2014-07-29 | Si-Ware Systems | Interferometer with variable optical path length reference mirror using overlapping depth scan signals |
US8169616B2 (en) * | 2010-02-16 | 2012-05-01 | Agilent Technologies Australia (M) Pty Ltd | Interferometer step scanning systems and methods |
US9291500B2 (en) * | 2014-01-29 | 2016-03-22 | Raytheon Company | Configurable combination spectrometer and polarizer |
JP2018097227A (ja) * | 2016-12-15 | 2018-06-21 | 株式会社島津製作所 | 固定鏡、干渉計及びフーリエ変換分光光度計 |
CN116990236B (zh) * | 2023-09-25 | 2023-12-01 | 中国科学院空天信息创新研究院 | 采样控制方法、装置及系统 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4444501A (en) * | 1982-02-12 | 1984-04-24 | The United States Of America As Represented By The Secretary Of Commerce | Stabilization mechanism for optical interferometer |
US4413908A (en) * | 1982-03-05 | 1983-11-08 | Bio-Rad Laboratories, Inc. | Scanning interferometer control systems |
FR2566133B1 (fr) * | 1984-06-14 | 1986-08-29 | Thomson Csf | Dispositif de mesure d'un dephasage non reciproque engendre dans un interferometre en anneau |
US4799001A (en) * | 1987-07-23 | 1989-01-17 | Nicolet Corporation | Start of scan circuit for FTIR spectrometer |
US4892406A (en) * | 1988-01-11 | 1990-01-09 | United Technologies Corporation | Method of and arrangement for measuring vibrations |
US5276545A (en) * | 1989-03-24 | 1994-01-04 | Nicolet Instrument Corporation | Mirror alignment and damping device |
-
1991
- 1991-05-22 US US07/704,304 patent/US5166749A/en not_active Expired - Lifetime
-
1992
- 1992-05-08 CA CA002109510A patent/CA2109510C/en not_active Expired - Fee Related
- 1992-05-08 DE DE69231585T patent/DE69231585T2/de not_active Expired - Fee Related
- 1992-05-08 JP JP50009893A patent/JP3694020B2/ja not_active Expired - Lifetime
- 1992-05-08 EP EP92913202A patent/EP0595835B1/de not_active Expired - Lifetime
- 1992-05-08 WO PCT/US1992/003838 patent/WO1992021072A1/en active IP Right Grant
- 1992-05-08 EP EP00109892A patent/EP1055982A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP3694020B2 (ja) | 2005-09-14 |
EP1055982A1 (de) | 2000-11-29 |
CA2109510C (en) | 2000-01-25 |
EP0595835A4 (de) | 1995-02-01 |
WO1992021072A1 (en) | 1992-11-26 |
US5166749A (en) | 1992-11-24 |
DE69231585D1 (de) | 2001-01-04 |
JPH06508205A (ja) | 1994-09-14 |
EP0595835B1 (de) | 2000-11-29 |
CA2109510A1 (en) | 1992-11-23 |
EP0595835A1 (de) | 1994-05-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: DIGILAB,LLC (N.D.GES.D.STAATES DELAWARE), RANDOLPH |
|
8339 | Ceased/non-payment of the annual fee |