DE69212913T2 - Verfahren zum Beschichten von Substrate am zementierten Wolframkarbid mit festhaftendem Diamantüberzug - Google Patents

Verfahren zum Beschichten von Substrate am zementierten Wolframkarbid mit festhaftendem Diamantüberzug

Info

Publication number
DE69212913T2
DE69212913T2 DE1992612913 DE69212913T DE69212913T2 DE 69212913 T2 DE69212913 T2 DE 69212913T2 DE 1992612913 DE1992612913 DE 1992612913 DE 69212913 T DE69212913 T DE 69212913T DE 69212913 T2 DE69212913 T2 DE 69212913T2
Authority
DE
Germany
Prior art keywords
tungsten carbide
substrate
coating
removes
cemented tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1992612913
Other languages
English (en)
Other versions
DE69212913D1 (de
Inventor
Michael G Peters
Robert H Cummings
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAT CENTER FOR MANUFACTURING S
Original Assignee
NAT CENTER FOR MANUFACTURING S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24783865&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69212913(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by NAT CENTER FOR MANUFACTURING S filed Critical NAT CENTER FOR MANUFACTURING S
Publication of DE69212913D1 publication Critical patent/DE69212913D1/de
Application granted granted Critical
Publication of DE69212913T2 publication Critical patent/DE69212913T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/28—Acidic compositions for etching iron group metals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemically Coating (AREA)
  • Carbon And Carbon Compounds (AREA)
DE1992612913 1991-04-26 1992-04-02 Verfahren zum Beschichten von Substrate am zementierten Wolframkarbid mit festhaftendem Diamantüberzug Expired - Lifetime DE69212913T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/693,234 US5236740A (en) 1991-04-26 1991-04-26 Methods for coating adherent diamond films on cemented tungsten carbide substrates

Publications (2)

Publication Number Publication Date
DE69212913D1 DE69212913D1 (de) 1996-09-26
DE69212913T2 true DE69212913T2 (de) 1997-04-03

Family

ID=24783865

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992612913 Expired - Lifetime DE69212913T2 (de) 1991-04-26 1992-04-02 Verfahren zum Beschichten von Substrate am zementierten Wolframkarbid mit festhaftendem Diamantüberzug

Country Status (5)

Country Link
US (2) US5236740A (de)
EP (1) EP0519587B1 (de)
JP (1) JP3504675B2 (de)
AT (1) ATE141654T1 (de)
DE (1) DE69212913T2 (de)

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3452615B2 (ja) * 1992-10-26 2003-09-29 三菱マテリアル神戸ツールズ株式会社 超硬合金、硬質炭素膜被覆超硬合金および超硬合金の製造方法並びにこれらの合金を応用した工具
AT400041B (de) * 1993-03-26 1995-09-25 Plansee Tizit Gmbh Hartmetall-substrat mit diamantschicht hoher haftfestigkeit
ATE180288T1 (de) * 1993-10-29 1999-06-15 Balzers Hochvakuum Beschichteter körper, verfahren zu dessen herstellung sowie dessen verwendung
US5585176A (en) * 1993-11-30 1996-12-17 Kennametal Inc. Diamond coated tools and wear parts
US5620754A (en) 1994-01-21 1997-04-15 Qqc, Inc. Method of treating and coating substrates
US5554415A (en) 1994-01-18 1996-09-10 Qqc, Inc. Substrate coating techniques, including fabricating materials on a surface of a substrate
US5731046A (en) 1994-01-18 1998-03-24 Qqc, Inc. Fabrication of diamond and diamond-like carbon coatings
US5560839A (en) * 1994-06-27 1996-10-01 Valenite Inc. Methods of preparing cemented metal carbide substrates for deposition of adherent diamond coatings and products made therefrom
US5635256A (en) * 1994-08-11 1997-06-03 St. Gobain/Norton Industrial Ceramics Corporation Method of making a diamond-coated composite body
US5674620A (en) * 1994-08-11 1997-10-07 Saint-Gobain/Norton Industrial Ceramics Corporation Diamond-coated composite cutting tool and method of making
US5487560A (en) * 1994-08-19 1996-01-30 Trw Vehicle Safety Systems Inc. Apparatus for controlling flow of inflation fluid into an air bag
US6063149A (en) 1995-02-24 2000-05-16 Zimmer; Jerry W. Graded grain size diamond layer
US5672031A (en) * 1995-05-12 1997-09-30 Kennametal Inc. Milling cutter
US5891522A (en) * 1995-05-24 1999-04-06 Saint-Gobain Industrial Ceramics, Inc. Composite article with adherent CVD diamond coating and method of making
US5650059A (en) * 1995-08-11 1997-07-22 Credo Tool Company Method of making cemented carbide substrate
US5653152A (en) * 1995-09-01 1997-08-05 Kennametal Inc. Toolholder for roughing and finishing a workpiece
US5759623A (en) * 1995-09-14 1998-06-02 Universite De Montreal Method for producing a high adhesion thin film of diamond on a Fe-based substrate
JPH09109126A (ja) * 1995-10-17 1997-04-28 Ngk Insulators Ltd ハニカム成形用口金の再生方法
AT411070B (de) * 1996-03-25 2003-09-25 Electrovac Verfahren zur herstellung eines substrates mit einer polykristallinen diamantschicht
US5700518A (en) * 1996-04-26 1997-12-23 Korea Institute Of Science And Technology Fabrication method for diamond-coated cemented carbide cutting tool
KR0176330B1 (ko) * 1996-04-26 1999-02-18 박원훈 초경 공구의 다이아몬드막 피복방법
US5952102A (en) * 1996-05-13 1999-09-14 Ceramatec, Inc. Diamond coated WC and WC-based composites with high apparent toughness
US5716170A (en) * 1996-05-15 1998-02-10 Kennametal Inc. Diamond coated cutting member and method of making the same
JPH10310494A (ja) * 1996-05-31 1998-11-24 Ngk Spark Plug Co Ltd ダイヤモンド被覆膜付き超硬部材の製造方法
EP1408138B9 (de) 1997-02-05 2008-02-13 CemeCon AG Beschichtungsvorrichtung
US6096377A (en) * 1997-11-07 2000-08-01 Balzers Hochvakuum Ag Process for coating sintered metal carbide substrates with a diamond film
US6214247B1 (en) 1998-06-10 2001-04-10 Tdy Industries, Inc. Substrate treatment method
US6344149B1 (en) 1998-11-10 2002-02-05 Kennametal Pc Inc. Polycrystalline diamond member and method of making the same
US6436204B1 (en) 1998-11-20 2002-08-20 Kennametal Pc Inc. Diamond coated cutting tools and method of manufacture
KR100305315B1 (ko) 1999-04-09 2001-09-13 박호군 다이아몬드 막이 코팅된 절삭공구 및 그 제조방법
US6815052B2 (en) 2000-12-01 2004-11-09 P1 Diamond, Inc. Filled diamond foam material and method for forming same
BR0103109B1 (pt) * 2001-06-08 2011-09-06 ferramenta de corte e processo de formação desta.
AU2003277912A1 (en) * 2002-09-27 2004-04-23 Cemecon Ag Coating method and coated element
US7581906B2 (en) * 2004-05-19 2009-09-01 Tdy Industries, Inc. Al2O3 ceramic tools with diffusion bonding enhanced layer
US9079260B2 (en) * 2007-11-01 2015-07-14 GM Global Technology Operations LLC Polycrystalline diamond cutting tool with coated body
JP5282911B2 (ja) * 2010-03-26 2013-09-04 三菱マテリアル株式会社 ダイヤモンド被覆切削工具
JP6195068B2 (ja) * 2013-02-25 2017-09-13 三菱マテリアル株式会社 刃先強度を向上させたダイヤモンド被覆超硬合金製切削工具
CN103215603A (zh) * 2013-05-13 2013-07-24 西南大学 电解腐蚀在提高硬质涂层与金属或合金基体结合强度中的应用
JP5716861B1 (ja) 2013-11-29 2015-05-13 三菱マテリアル株式会社 ダイヤモンド被覆超硬合金製切削工具及びその製造方法
JP6489505B2 (ja) * 2015-06-29 2019-03-27 三菱マテリアル株式会社 刃先強度を向上させたダイヤモンド被覆超硬合金製切削工具
WO2018112909A1 (zh) * 2016-12-23 2018-06-28 深圳市金洲精工科技股份有限公司 硬质合金钻头金刚石涂层预处理方法
DE102017200543A1 (de) 2017-01-13 2018-07-19 Baden-Württemberg Stiftung Ggmbh Verfahren zur Behandlung einer Oberfläche eines Hartmetallkörpers und zur Beschichtung des behandelten Hartmetallkörpers mit einer Diamantschicht
WO2018198136A1 (en) * 2017-04-27 2018-11-01 INDIAN INSTITUTE OF TECHNOLOGY MADRAS (IIT Madras) Highly adhesive boron doped graded diamond layer on wc-co cutting tool
WO2020008722A1 (ja) 2018-07-02 2020-01-09 住友電工ハードメタル株式会社 ダイヤモンド被覆工具
GB201912659D0 (en) * 2019-09-03 2019-10-16 Univ Bristol Chemical vapor deposition process for producing diamond
CN113106413B (zh) * 2021-04-19 2022-05-24 湖南新锋科技有限公司 一种cvd金刚石涂层前基体预处理工艺
CN113106414B (zh) * 2021-04-20 2022-05-24 湖南新锋科技有限公司 一种CVD金刚石涂层前WC-Co基体预处理工艺

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3647401A (en) * 1969-06-04 1972-03-07 Du Pont Anisodimensional tungsten carbide platelets bonded with cobalt
US4592433A (en) * 1984-10-04 1986-06-03 Strata Bit Corporation Cutting blank with diamond strips in grooves
US4784023A (en) * 1985-12-05 1988-11-15 Diamant Boart-Stratabit (Usa) Inc. Cutting element having composite formed of cemented carbide substrate and diamond layer and method of making same
JPS63100182A (ja) * 1986-04-24 1988-05-02 Mitsubishi Metal Corp ダイヤモンド被覆炭化タングステン基超硬合金製切削工具チツプ
JPH0791651B2 (ja) * 1986-04-24 1995-10-04 三菱マテリアル株式会社 ダイヤモンド被覆炭化タングステン基超硬合金製切削工具チツプ
US4731296A (en) * 1986-07-03 1988-03-15 Mitsubishi Kinzoku Kabushiki Kaisha Diamond-coated tungsten carbide-base sintered hard alloy material for insert of a cutting tool
US5225275A (en) * 1986-07-11 1993-07-06 Kyocera Corporation Method of producing diamond films
US4871377A (en) * 1986-07-30 1989-10-03 Frushour Robert H Composite abrasive compact having high thermal stability and transverse rupture strength
DE3706340A1 (de) * 1987-02-27 1988-09-08 Winter & Sohn Ernst Verfahren zum auftragen einer verschleissschutzschicht und danach hergestelltes erzeugnis
US4764434A (en) * 1987-06-26 1988-08-16 Sandvik Aktiebolag Diamond tools for rock drilling and machining
JPH01153228A (ja) * 1987-12-10 1989-06-15 Asahi Daiyamondo Kogyo Kk 気相合成ダイヤモンド工具の製造法
JPH01201475A (ja) * 1988-02-08 1989-08-14 Hitachi Ltd ダイヤモンド薄膜コーテイング工具の製造方法
US4961780A (en) * 1988-06-29 1990-10-09 Vermont American Corporation Boron-treated hard metal
US4811801A (en) * 1988-03-16 1989-03-14 Smith International, Inc. Rock bits and inserts therefor
DE68916207T3 (de) * 1988-12-21 1999-11-25 Mitsubishi Materials Corp Diamantbeschichtetes Werkzeug, Substrate dafür und Verfahren zu dessen Herstellung.
US4992082A (en) * 1989-01-12 1991-02-12 Ford Motor Company Method of toughening diamond coated tools
US5100703A (en) * 1989-02-23 1992-03-31 Toshiba Tungaloy Co., Ltd. Diamond-coated sintered body excellent in adhesion and process for preparing the same
US4923512A (en) * 1989-04-07 1990-05-08 The Dow Chemical Company Cobalt-bound tungsten carbide metal matrix composites and cutting tools formed therefrom

Also Published As

Publication number Publication date
DE69212913D1 (de) 1996-09-26
JP3504675B2 (ja) 2004-03-08
EP0519587A1 (de) 1992-12-23
EP0519587B1 (de) 1996-08-21
US5236740A (en) 1993-08-17
JPH05179450A (ja) 1993-07-20
ATE141654T1 (de) 1996-09-15
US5567526A (en) 1996-10-22

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