DE69209982D1 - Verfahren zur Herstellung von Vollpolymer-basierten Stegwellenleitern - Google Patents
Verfahren zur Herstellung von Vollpolymer-basierten StegwellenleiternInfo
- Publication number
- DE69209982D1 DE69209982D1 DE69209982T DE69209982T DE69209982D1 DE 69209982 D1 DE69209982 D1 DE 69209982D1 DE 69209982 T DE69209982 T DE 69209982T DE 69209982 T DE69209982 T DE 69209982T DE 69209982 D1 DE69209982 D1 DE 69209982D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- ridge waveguides
- full polymer
- based ridge
- polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR919114662A FR2684239B1 (fr) | 1991-11-27 | 1991-11-27 | Procede de fabrication d'un guide d'onde optique planaire entierement a base de polymeres, et son utilisation dans un isolateur optique integre. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69209982D1 true DE69209982D1 (de) | 1996-05-23 |
DE69209982T2 DE69209982T2 (de) | 1996-10-02 |
Family
ID=9419407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69209982T Expired - Fee Related DE69209982T2 (de) | 1991-11-27 | 1992-11-26 | Verfahren zur Herstellung von Vollpolymer-basierten Stegwellenleitern |
Country Status (4)
Country | Link |
---|---|
US (1) | US5291574A (de) |
EP (1) | EP0544596B1 (de) |
DE (1) | DE69209982T2 (de) |
FR (1) | FR2684239B1 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0792337A (ja) * | 1993-09-27 | 1995-04-07 | Hitachi Cable Ltd | ポリマコア光導波路およびその製造方法 |
US5465860A (en) * | 1994-07-01 | 1995-11-14 | Intel Corporation | Method of forming an integrated circuit waveguide |
US5533151A (en) * | 1995-04-28 | 1996-07-02 | Texas Instruments Incorporated | Active cladding optical modulator using an electro-optic polymer on an inorganic waveguide |
KR100199023B1 (ko) * | 1995-12-21 | 1999-06-15 | 정선종 | 고분자 박막의 형성방법 |
SE513046C2 (sv) * | 1996-09-17 | 2000-06-26 | Ericsson Telefon Ab L M | Förfarande för att framställa en optokomponent samt komponenten som sådan |
US6775453B1 (en) | 1998-12-21 | 2004-08-10 | Lsi Logic Corporation | On-chip graded index of refraction optical waveguide and damascene method of fabricating the same |
US6282358B1 (en) | 1998-12-21 | 2001-08-28 | Lsi Logic Corporation | On-chip single layer horizontal deflecting waveguide and damascene method of fabricating the same |
US6324313B1 (en) * | 1998-12-21 | 2001-11-27 | Lsi Logic Corporation | On-chip multiple layer vertically transitioning optical waveguide and damascene method of fabricating the same |
US7167615B1 (en) * | 1999-11-05 | 2007-01-23 | Board Of Regents, The University Of Texas System | Resonant waveguide-grating filters and sensors and methods for making and using same |
US8111401B2 (en) * | 1999-11-05 | 2012-02-07 | Robert Magnusson | Guided-mode resonance sensors employing angular, spectral, modal, and polarization diversity for high-precision sensing in compact formats |
US6836608B2 (en) * | 2000-12-28 | 2004-12-28 | Matsushita Electric Industrial Co., Ltd. | Planar optical waveguide, method for manufacturing the same and polymer optical waveguide |
US6542684B2 (en) * | 2001-05-01 | 2003-04-01 | Corning Incorporated | Optimized multi-layer optical waveguiding system |
US6937806B2 (en) * | 2002-03-21 | 2005-08-30 | Dalsa Semiconductor Inc. | Method of making photonic devices with SOG interlayer |
US20060110842A1 (en) * | 2004-11-23 | 2006-05-25 | Yuh-Hwa Chang | Method and apparatus for preventing metal/silicon spiking in MEMS devices |
US8173045B2 (en) | 2008-05-28 | 2012-05-08 | University Of Washington | Diels-Alder crosslinkable dendritic nonlinear optic chromophores and polymer composites |
DE102008050538B4 (de) | 2008-06-06 | 2022-10-06 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronisches Bauelement und Verfahren zu dessen Herstellung |
WO2017031303A1 (en) * | 2015-08-18 | 2017-02-23 | University Of Cincinnati | Analyte sensor and method of use |
CN109154697B (zh) * | 2016-05-20 | 2020-11-10 | 镁可微波技术有限公司 | 半导体激光器和用于使半导体激光器平坦化的方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3923709A1 (de) * | 1989-07-18 | 1991-01-31 | Standard Elektrik Lorenz Ag | Optoelektronische anordnung |
US5054872A (en) * | 1990-03-16 | 1991-10-08 | Ibm Corporation | Polymeric optical waveguides and methods of forming the same |
US5136682A (en) * | 1991-04-15 | 1992-08-04 | Raychem Corporation | Curable compositions and methods for use in forming optical waveguide structures |
-
1991
- 1991-11-27 FR FR919114662A patent/FR2684239B1/fr not_active Expired - Fee Related
-
1992
- 1992-11-25 US US07/981,755 patent/US5291574A/en not_active Expired - Lifetime
- 1992-11-26 EP EP92403191A patent/EP0544596B1/de not_active Expired - Lifetime
- 1992-11-26 DE DE69209982T patent/DE69209982T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69209982T2 (de) | 1996-10-02 |
FR2684239A1 (fr) | 1993-05-28 |
EP0544596B1 (de) | 1996-04-17 |
FR2684239B1 (fr) | 1994-03-04 |
US5291574A (en) | 1994-03-01 |
EP0544596A1 (de) | 1993-06-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |