DE69224454D1 - Verfahren zur Herstellung von planaren optischen Wellenleitern - Google Patents

Verfahren zur Herstellung von planaren optischen Wellenleitern

Info

Publication number
DE69224454D1
DE69224454D1 DE69224454T DE69224454T DE69224454D1 DE 69224454 D1 DE69224454 D1 DE 69224454D1 DE 69224454 T DE69224454 T DE 69224454T DE 69224454 T DE69224454 T DE 69224454T DE 69224454 D1 DE69224454 D1 DE 69224454D1
Authority
DE
Germany
Prior art keywords
production
optical waveguides
planar optical
planar
waveguides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69224454T
Other languages
English (en)
Other versions
DE69224454T2 (de
Inventor
Suhas Dattatreya Bhandarkar
John Burnette Macchesney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Application granted granted Critical
Publication of DE69224454D1 publication Critical patent/DE69224454D1/de
Publication of DE69224454T2 publication Critical patent/DE69224454T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • C03C17/04—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass by fritting glass powder
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
  • Glass Melting And Manufacturing (AREA)
DE1992624454 1991-09-30 1992-09-24 Verfahren zur Herstellung von planaren optischen Wellenleitern Expired - Fee Related DE69224454T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US76850691A 1991-09-30 1991-09-30

Publications (2)

Publication Number Publication Date
DE69224454D1 true DE69224454D1 (de) 1998-03-26
DE69224454T2 DE69224454T2 (de) 1998-07-30

Family

ID=25082697

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992624454 Expired - Fee Related DE69224454T2 (de) 1991-09-30 1992-09-24 Verfahren zur Herstellung von planaren optischen Wellenleitern

Country Status (3)

Country Link
EP (1) EP0535861B1 (de)
JP (1) JP3283922B2 (de)
DE (1) DE69224454T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2759465B1 (fr) * 1996-04-30 1999-04-30 Corning Inc Procede de formation d'un circuit optique
JP3928331B2 (ja) * 2000-05-09 2007-06-13 住友電気工業株式会社 光導波路デバイスおよびその製造方法
JP2002162526A (ja) * 2000-11-24 2002-06-07 Shin Etsu Chem Co Ltd 光導波路およびその製造方法
GB2383127B (en) * 2001-12-12 2004-10-20 Proimmune Ltd Device and method for investigating analytes in liquid suspension or solution
US9434642B2 (en) * 2007-05-21 2016-09-06 Corning Incorporated Mechanically flexible and durable substrates
CZ201892A3 (cs) * 2018-02-23 2019-06-12 ÄŚeskĂ© vysokĂ© uÄŤenĂ­ technickĂ© v Praze Zařízení pro výrobu samonosných flexibilních polymerních optických mnohavidových planárních vlnovodů
CN109669237B (zh) * 2018-12-13 2020-12-15 吉林华微电子股份有限公司 半导体硅基光波导器件及其制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3663194A (en) * 1970-05-25 1972-05-16 Ibm Method for making monolithic opto-electronic structure
US3934061A (en) * 1972-03-30 1976-01-20 Corning Glass Works Method of forming planar optical waveguides
US5059475A (en) * 1990-06-29 1991-10-22 Photonic Integration Research, Inc. Apparatus and method of forming optical waveguides on metalized substrates

Also Published As

Publication number Publication date
DE69224454T2 (de) 1998-07-30
JPH05297236A (ja) 1993-11-12
EP0535861A2 (de) 1993-04-07
EP0535861A3 (en) 1994-06-08
EP0535861B1 (de) 1998-02-18
JP3283922B2 (ja) 2002-05-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee