DE69209066T2 - Einrichtung zur Kalibrierung eines Durchflusssteuereinrichtung - Google Patents

Einrichtung zur Kalibrierung eines Durchflusssteuereinrichtung

Info

Publication number
DE69209066T2
DE69209066T2 DE69209066T DE69209066T DE69209066T2 DE 69209066 T2 DE69209066 T2 DE 69209066T2 DE 69209066 T DE69209066 T DE 69209066T DE 69209066 T DE69209066 T DE 69209066T DE 69209066 T2 DE69209066 T2 DE 69209066T2
Authority
DE
Germany
Prior art keywords
mass flow
command
signal
flow controller
analog
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69209066T
Other languages
English (en)
Other versions
DE69209066D1 (de
Inventor
James Doyle
Michael Upchurch
Richard Donaldson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unit Instruments Inc
Original Assignee
Unit Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unit Instruments Inc filed Critical Unit Instruments Inc
Application granted granted Critical
Publication of DE69209066D1 publication Critical patent/DE69209066D1/de
Publication of DE69209066T2 publication Critical patent/DE69209066T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Measuring Volume Flow (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Details Of Flowmeters (AREA)
DE69209066T 1991-05-17 1992-05-15 Einrichtung zur Kalibrierung eines Durchflusssteuereinrichtung Expired - Fee Related DE69209066T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70201791A 1991-05-17 1991-05-17
PCT/US1992/004110 WO1992021006A2 (en) 1991-05-17 1992-05-15 Method and apparatus for translating a mass flow meter signal

Publications (2)

Publication Number Publication Date
DE69209066D1 DE69209066D1 (de) 1996-04-18
DE69209066T2 true DE69209066T2 (de) 1996-08-08

Family

ID=24819559

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69209066T Expired - Fee Related DE69209066T2 (de) 1991-05-17 1992-05-15 Einrichtung zur Kalibrierung eines Durchflusssteuereinrichtung

Country Status (6)

Country Link
EP (2) EP0689040A3 (de)
JP (1) JPH06508207A (de)
AT (1) ATE135459T1 (de)
DE (1) DE69209066T2 (de)
DK (1) DK0584242T3 (de)
WO (1) WO1992021006A2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993025950A1 (en) * 1992-06-12 1993-12-23 Unit Instruments, Inc. Mass flow controller
JP3463757B2 (ja) * 1993-04-08 2003-11-05 株式会社日立製作所 エンジン制御装置及びこれに用いる空気流量計
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5944048A (en) * 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow
AU2002224569A1 (en) 2000-07-08 2002-02-05 Fugasity Corporation Fluid mass flow control valve and method of operation
AU2001277984A1 (en) 2000-07-25 2002-02-05 Fugasity Corporation Small internal volume fluid mass flow control apparatus
US6539968B1 (en) 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
US6822731B1 (en) 2003-06-18 2004-11-23 Asml Holding N.V. Method and apparatus for a pellicle frame with heightened bonding surfaces
US7277802B1 (en) * 2006-05-18 2007-10-02 Honeywell International Inc. Method and system for providing a linear signal from a mass flow transducer
US7280927B1 (en) * 2006-10-11 2007-10-09 Honeywell International Inc. Method and system for providing a linear signal from a mass airflow and/or liquid flow transducer
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
WO2014040002A2 (en) 2012-09-10 2014-03-13 Mudd Daniel T Pressure based mass flow controller
JP6526374B2 (ja) * 2013-04-25 2019-06-05 株式会社堀場エステック 流体制御装置
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
JP6940441B2 (ja) * 2018-03-27 2021-09-29 アズビル株式会社 熱式フローセンサ装置および流量補正方法
JP6940442B2 (ja) * 2018-03-27 2021-09-29 アズビル株式会社 熱式フローセンサ装置および流量補正方法
KR20230150309A (ko) 2021-03-03 2023-10-30 아이커 시스템즈, 인크. 매니폴드 조립체를 포함하는 유체 유동 제어 시스템
CN113776571B (zh) * 2021-07-30 2023-06-27 华电电力科学研究院有限公司 一种电厂热工监测仪表在线校验方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4884215A (en) * 1987-02-27 1989-11-28 Jabil Circuit Company Airflow sensor and control circuit
US4860583A (en) * 1988-05-27 1989-08-29 Dwyer Instruments, Inc. Air velocity transmitter device
US5065695A (en) * 1989-06-16 1991-11-19 Nordson Corporation Apparatus for compensating for non-linear flow characteristics in dispensing a coating material

Also Published As

Publication number Publication date
EP0689040A3 (de) 1996-06-05
EP0584242B1 (de) 1996-03-13
EP0584242A1 (de) 1994-03-02
EP0689040A2 (de) 1995-12-27
JPH06508207A (ja) 1994-09-14
DK0584242T3 (da) 1996-07-22
WO1992021006A2 (en) 1992-11-26
WO1992021006A3 (en) 1993-01-07
DE69209066D1 (de) 1996-04-18
ATE135459T1 (de) 1996-03-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee