DE69207107D1 - Verfahren zum Polieren von Komponenten der Mikroelektronik - Google Patents

Verfahren zum Polieren von Komponenten der Mikroelektronik

Info

Publication number
DE69207107D1
DE69207107D1 DE69207107T DE69207107T DE69207107D1 DE 69207107 D1 DE69207107 D1 DE 69207107D1 DE 69207107 T DE69207107 T DE 69207107T DE 69207107 T DE69207107 T DE 69207107T DE 69207107 D1 DE69207107 D1 DE 69207107D1
Authority
DE
Germany
Prior art keywords
microelectronics
polishing components
polishing
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69207107T
Other languages
English (en)
Other versions
DE69207107T2 (de
Inventor
Andre Baldy
Gerard Barrois
Henri Blanc
Marcel Dominiak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69207107D1 publication Critical patent/DE69207107D1/de
Application granted granted Critical
Publication of DE69207107T2 publication Critical patent/DE69207107T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
DE1992607107 1991-06-06 1992-06-04 Verfahren zum Polieren von Komponenten der Mikroelektronik Expired - Fee Related DE69207107T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9106865A FR2677290B1 (fr) 1991-06-06 1991-06-06 Procede de realisation d'un outil de polissage et outil obtenu par ce procede.

Publications (2)

Publication Number Publication Date
DE69207107D1 true DE69207107D1 (de) 1996-02-08
DE69207107T2 DE69207107T2 (de) 1996-07-18

Family

ID=9413540

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992607107 Expired - Fee Related DE69207107T2 (de) 1991-06-06 1992-06-04 Verfahren zum Polieren von Komponenten der Mikroelektronik

Country Status (3)

Country Link
EP (1) EP0526262B1 (de)
DE (1) DE69207107T2 (de)
FR (1) FR2677290B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6123744A (en) * 1999-06-02 2000-09-26 Milacron Inc. Vitreous bond compositions for abrasive articles
CN107088827A (zh) * 2017-04-27 2017-08-25 东莞市银泰玻璃有限公司 一种磨砂玻璃的加工工艺

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7013165A (de) * 1970-09-05 1972-03-07
SU428930A1 (ru) * 1971-03-16 1974-05-25 А. А. Ковалев Способ изготовления притиров12
JPS5383188A (en) * 1976-12-28 1978-07-22 Nippon Tungsten High speed cutting tool materials
SU755536A1 (ru) * 1978-05-03 1980-08-15 Vladimir D Bondarenko Стеклокерамическая связка для изготовления образивного инструмента
US4522633A (en) * 1982-08-05 1985-06-11 Dyer Henry B Abrasive bodies
JPS61219566A (ja) * 1985-03-25 1986-09-29 Toshiba Corp 研磨定盤用材料
JPS6219377A (ja) * 1985-07-18 1987-01-28 F S K:Kk 超砥粒砥石
US4863490A (en) * 1988-02-22 1989-09-05 Gte Laboratories Incorporated Titanium diboride-based composite articles with alumina dispersoids, having improved fracture toughness

Also Published As

Publication number Publication date
FR2677290B1 (fr) 1995-12-01
FR2677290A1 (fr) 1992-12-11
DE69207107T2 (de) 1996-07-18
EP0526262B1 (de) 1995-12-27
EP0526262A1 (de) 1993-02-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee