DE69205094T2 - Ionisierungs-Vakuum-Messgerät. - Google Patents

Ionisierungs-Vakuum-Messgerät.

Info

Publication number
DE69205094T2
DE69205094T2 DE69205094T DE69205094T DE69205094T2 DE 69205094 T2 DE69205094 T2 DE 69205094T2 DE 69205094 T DE69205094 T DE 69205094T DE 69205094 T DE69205094 T DE 69205094T DE 69205094 T2 DE69205094 T2 DE 69205094T2
Authority
DE
Germany
Prior art keywords
measuring device
ionization vacuum
vacuum measuring
ionization
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69205094T
Other languages
English (en)
Other versions
DE69205094D1 (de
Inventor
Robert Baptist
Christophe Py
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9415426&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69205094(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69205094D1 publication Critical patent/DE69205094D1/de
Publication of DE69205094T2 publication Critical patent/DE69205094T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
DE69205094T 1991-07-23 1992-07-21 Ionisierungs-Vakuum-Messgerät. Expired - Fee Related DE69205094T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9109283A FR2679653B1 (fr) 1991-07-23 1991-07-23 Vacumetre a ionisation.

Publications (2)

Publication Number Publication Date
DE69205094D1 DE69205094D1 (de) 1995-11-02
DE69205094T2 true DE69205094T2 (de) 1996-05-09

Family

ID=9415426

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69205094T Expired - Fee Related DE69205094T2 (de) 1991-07-23 1992-07-21 Ionisierungs-Vakuum-Messgerät.

Country Status (5)

Country Link
US (1) US5278510A (de)
EP (1) EP0524870B1 (de)
JP (1) JPH07181095A (de)
DE (1) DE69205094T2 (de)
FR (1) FR2679653B1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4137527A1 (de) * 1991-11-14 1993-05-19 Siemens Ag Ionisationsdruckmesser
FR2711794B1 (fr) * 1993-10-28 1997-08-29 Cit Alcatel Détecteur de fuite à gaz traceur et procédé de fonctionnement.
FR2714966B1 (fr) * 1994-01-11 1996-02-16 Commissariat Energie Atomique Jauge à ionisation munie d'une cathode à micropointes.
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
FR2736465B1 (fr) * 1995-07-03 1997-08-08 Commissariat Energie Atomique Dispositif d'amorcage et/ou de maintien d'une decharge et jauge a vide a cathode froide comportant un tel dispositif
DE19855522C2 (de) * 1998-12-02 2001-11-08 Univ Magdeburg Tech Vakuum-Meßverfahren und Vakuum-Meßeinrichtung
DE10134912A1 (de) * 2001-07-18 2003-02-06 Mu Sen Mikrosystemtechnik Gmbh Ionisationsmanometer
US6566884B2 (en) 2001-09-13 2003-05-20 Duniway Stockroom Corporation Ionization vacuum pressure gauge
ITTO20030627A1 (it) * 2003-08-08 2005-02-09 Varian Spa Vacuometro a ionizzazione.
ITTO20030626A1 (it) * 2003-08-08 2005-02-09 Varian Spa Vacuometro a ionizzazione.
US7098667B2 (en) * 2003-12-31 2006-08-29 Fei Company Cold cathode ion gauge
US7295015B2 (en) * 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
SI21714A (en) 2004-02-23 2005-08-31 Inst Jozef Stefan Procedure and device for measuring ultrahigh vacuum
CN100426440C (zh) * 2004-04-21 2008-10-15 清华大学 冷阴极电子枪和采用该冷阴极电子枪的真空规管
EP1698878A1 (de) * 2005-03-04 2006-09-06 Inficon GmbH Elektrodenanordnung und Druckmessvorrichtung
CN101266180A (zh) 2007-03-16 2008-09-17 清华大学 电离规
CN101303264B (zh) * 2007-05-09 2010-05-26 清华大学 电离规
CN101303955B (zh) * 2007-05-09 2010-05-26 清华大学 离子源组件
US7768267B2 (en) * 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source
JP5762749B2 (ja) * 2007-12-19 2015-08-12 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 冷電子増倍放出源を備える電離真空計
EP2252869B1 (de) * 2008-02-21 2018-12-12 MKS Instruments, Inc. Ionisierungsmessgerät mit für hochdruckbetrieb ausgelegten betriebsparametern und geometrie
US8928329B2 (en) * 2011-07-26 2015-01-06 Mks Instruments, Inc. Cold cathode gauge fast response signal circuit
US9484176B2 (en) * 2012-09-10 2016-11-01 Thomas Schenkel Advanced penning ion source
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
CN107796559B (zh) * 2016-08-31 2020-06-09 中国石油化工股份有限公司 真空室的真空度检测方法
CN107993908B (zh) * 2017-11-27 2019-11-15 温州大学 一种基于场发射阴极电子源的电离真空计及其应用方法
JP7036675B2 (ja) * 2018-06-11 2022-03-15 株式会社アルバック Ｂａ型電離真空計及びその感度異常検知方法、並びにｂａ型電離真空計を用いた圧力測定方法
EP3998467B1 (de) * 2019-09-13 2024-01-03 Canon Anelva Corporation Ionisationsvakuummeter und kartusche
WO2023114166A1 (en) * 2021-12-16 2023-06-22 Inficon, Inc. Ion source assembly with multiple elliptical filaments
CN115468699A (zh) * 2022-08-19 2022-12-13 核工业西南物理研究院 一种原位测量中性气体压强的快规系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2593953B1 (fr) * 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2607623B1 (fr) * 1986-11-27 1995-02-17 Commissariat Energie Atomique Source d'electrons polarises de spin, utilisant une cathode emissive a micropointes, application en physique des interactions electrons-matiere ou electrons-particules, physique des plasmas, microscopie electronique
FR2623013A1 (fr) * 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
US5103145A (en) * 1990-09-05 1992-04-07 Raytheon Company Luminance control for cathode-ray tube having field emission cathode

Also Published As

Publication number Publication date
EP0524870B1 (de) 1995-09-27
FR2679653B1 (fr) 1993-09-24
EP0524870A1 (de) 1993-01-27
US5278510A (en) 1994-01-11
JPH07181095A (ja) 1995-07-18
FR2679653A1 (fr) 1993-01-29
DE69205094D1 (de) 1995-11-02

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8339 Ceased/non-payment of the annual fee