DE69007082D1 - Pneumatische Messeinrichtung. - Google Patents

Pneumatische Messeinrichtung.

Info

Publication number
DE69007082D1
DE69007082D1 DE90403767T DE69007082T DE69007082D1 DE 69007082 D1 DE69007082 D1 DE 69007082D1 DE 90403767 T DE90403767 T DE 90403767T DE 69007082 T DE69007082 T DE 69007082T DE 69007082 D1 DE69007082 D1 DE 69007082D1
Authority
DE
Germany
Prior art keywords
measuring device
pneumatic measuring
pneumatic
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE90403767T
Other languages
English (en)
Other versions
DE69007082T2 (de
Inventor
Francois Decool
Jacques Legrand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LIAISONS ELECTR SILEC PARIS SO
Original Assignee
LIAISONS ELECTR SILEC PARIS SO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LIAISONS ELECTR SILEC PARIS SO filed Critical LIAISONS ELECTR SILEC PARIS SO
Publication of DE69007082D1 publication Critical patent/DE69007082D1/de
Application granted granted Critical
Publication of DE69007082T2 publication Critical patent/DE69007082T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/42—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using fluid means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Measuring Volume Flow (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Measuring Fluid Pressure (AREA)
DE69007082T 1990-01-22 1990-12-26 Pneumatische Messeinrichtung. Expired - Lifetime DE69007082T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9000687A FR2657429B1 (fr) 1990-01-22 1990-01-22 Dispositif de mesure pneumatique.

Publications (2)

Publication Number Publication Date
DE69007082D1 true DE69007082D1 (de) 1994-04-07
DE69007082T2 DE69007082T2 (de) 1994-09-29

Family

ID=9392988

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69007082T Expired - Lifetime DE69007082T2 (de) 1990-01-22 1990-12-26 Pneumatische Messeinrichtung.

Country Status (6)

Country Link
US (1) US5140846A (de)
EP (1) EP0446547B1 (de)
JP (1) JPH0739949B2 (de)
DE (1) DE69007082T2 (de)
ES (1) ES2050985T3 (de)
FR (1) FR2657429B1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5789661A (en) * 1997-02-14 1998-08-04 Sigmatech, Inc. Extended range and ultra-precision non-contact dimensional gauge
US6357132B1 (en) * 2000-04-14 2002-03-19 William W. Banks Boom position detection system
US6220080B1 (en) * 2000-05-12 2001-04-24 Sigma Tech, Inc. Extended range and ultra precision non contact dimensional gauge for ultra thin wafers and work pieces
US6807845B2 (en) * 2001-10-12 2004-10-26 I F M Electronic Gmbh Measurement apparatus and process for determining the position of an object relative to a reference surface

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2692498A (en) * 1951-02-07 1954-10-26 Knobel Max Air gauge
US4059130A (en) * 1973-09-14 1977-11-22 Bailey Meter Company Proximity sensor with zero adjustment
JPS57119133A (en) * 1981-01-13 1982-07-24 Hitachi Ltd Device for measuring quantity of air sucked into internal combustion engine
JPS58132618A (ja) * 1982-02-03 1983-08-08 Hitachi Ltd 内燃機関用吸入空気流量検出装置
CH666128A5 (de) * 1984-03-26 1988-06-30 Alusuisse Vorrichtung zum beruehrungslosen messen der temperatur an einer oberflaeche eines werkstuecks.
US4550592A (en) * 1984-05-07 1985-11-05 Dechape Michel L Pneumatic gauging circuit
US4854156A (en) * 1989-01-03 1989-08-08 Systems Research Laboratories, Inc. Pneumatic surface-following control system

Also Published As

Publication number Publication date
ES2050985T3 (es) 1994-06-01
JPH04331306A (ja) 1992-11-19
FR2657429B1 (fr) 1995-08-11
EP0446547A1 (de) 1991-09-18
FR2657429A1 (fr) 1991-07-26
JPH0739949B2 (ja) 1995-05-01
DE69007082T2 (de) 1994-09-29
EP0446547B1 (de) 1994-03-02
US5140846A (en) 1992-08-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition