DE69202951D1 - Spürgaslecksuchdetektor. - Google Patents

Spürgaslecksuchdetektor.

Info

Publication number
DE69202951D1
DE69202951D1 DE69202951T DE69202951T DE69202951D1 DE 69202951 D1 DE69202951 D1 DE 69202951D1 DE 69202951 T DE69202951 T DE 69202951T DE 69202951 T DE69202951 T DE 69202951T DE 69202951 D1 DE69202951 D1 DE 69202951D1
Authority
DE
Germany
Prior art keywords
pump
pipe
valve
intake
primary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69202951T
Other languages
English (en)
Other versions
DE69202951T2 (de
Inventor
Gilles Baret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE69202951D1 publication Critical patent/DE69202951D1/de
Publication of DE69202951T2 publication Critical patent/DE69202951T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE69202951T 1991-09-25 1992-09-17 Spürgaslecksuchdetektor. Expired - Fee Related DE69202951T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9111815A FR2681689B1 (fr) 1991-09-25 1991-09-25 Detecteur de fuite a gaz traceur.

Publications (2)

Publication Number Publication Date
DE69202951D1 true DE69202951D1 (de) 1995-07-20
DE69202951T2 DE69202951T2 (de) 1995-11-02

Family

ID=9417290

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69202951T Expired - Fee Related DE69202951T2 (de) 1991-09-25 1992-09-17 Spürgaslecksuchdetektor.

Country Status (8)

Country Link
US (1) US5297422A (de)
EP (1) EP0534824B1 (de)
JP (1) JP2915717B2 (de)
AT (1) ATE123872T1 (de)
DE (1) DE69202951T2 (de)
DK (1) DK0534824T3 (de)
ES (1) ES2073261T3 (de)
FR (1) FR2681689B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111033207A (zh) * 2017-08-29 2020-04-17 普发真空公司 用于对物体进行泄漏检测的泄露检测器和泄漏检测方法

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4140366A1 (de) * 1991-12-07 1993-06-09 Leybold Ag, 6450 Hanau, De Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4408877A1 (de) * 1994-03-16 1995-09-21 Leybold Ag Testgaslecksucher
JP2655315B2 (ja) * 1994-06-29 1997-09-17 日本真空技術株式会社 複合分子ポンプを使用した漏洩探知装置
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
FR2728072B1 (fr) * 1994-12-07 1997-01-10 Cit Alcatel Detecteur de fuite
EP0718613B1 (de) * 1994-12-23 2003-03-05 Unaxis Balzers Aktiengesellschaft Verfahren zur Gasanalyse und Gasanalysator
DE19504278A1 (de) * 1995-02-09 1996-08-14 Leybold Ag Testgas-Lecksuchgerät
FR2734633B1 (fr) * 1995-05-24 1997-06-20 Cit Alcatel Installation pour detecter la presence d'helium dans un circuit de fluide
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
FR2784184B1 (fr) 1998-10-01 2000-12-15 Cit Alcatel Detecteur de fuite compact
DE19957998C2 (de) * 1999-12-02 2001-10-18 Josef Messmann Gmbh Verfahren und Vorrichtung zum Prüfen von porösen Rohren o. dgl. auf Dichtheit
US6808741B1 (en) * 2001-10-26 2004-10-26 Seagate Technology Llc In-line, pass-by method for vapor lubrication
DE10156205A1 (de) * 2001-11-15 2003-06-05 Inficon Gmbh Testgaslecksuchgerät
DE10324596A1 (de) * 2003-05-30 2004-12-16 Inficon Gmbh Lecksuchgerät
US7168297B2 (en) 2003-10-28 2007-01-30 Environmental Systems Products Holdings Inc. System and method for testing fuel tank integrity
AU2003300743A1 (en) * 2003-12-19 2005-07-05 Tpa Brianza Picc.Soc.Coop.A.R.L. System and device for leak detection
KR100799456B1 (ko) * 2006-12-05 2008-01-30 이종미 자동차용 에어브레이크의 에어 누출감지장치
EP2274588B1 (de) * 2008-05-05 2020-09-02 Inficon AB Gassonde zum entnehmen von gasmolekülen aus einem fluid und system mit der gassonde
US9997325B2 (en) * 2008-07-17 2018-06-12 Verity Instruments, Inc. Electron beam exciter for use in chemical analysis in processing systems
DE102013206526A1 (de) * 2013-04-12 2014-10-16 Oerlikon Leybold Vacuum Gmbh Verfahren zur Reinigung einer Vakuumpumpe

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2924258A1 (de) * 1979-06-15 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zum betrieb eines lecksuchgeraetes sowie dafuer geeignetes lecksuchgeraet
JPS57169647A (en) * 1981-04-13 1982-10-19 Ulvac Corp He reverse diffusion type leakage detector using turbo molecular pump
FR2604522B1 (fr) * 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
EP0344345B1 (de) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
DE3828588C1 (de) * 1988-08-23 1989-12-07 Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De
FR2653558B1 (fr) * 1989-10-23 1994-06-10 Cit Alcatel Systeme de detection de fuites a gaz traceur.
FR2657164B1 (fr) * 1990-01-16 1992-04-03 Cit Alcatel Installation de detection de fuite a pompe holweck a prise intermediaire.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111033207A (zh) * 2017-08-29 2020-04-17 普发真空公司 用于对物体进行泄漏检测的泄露检测器和泄漏检测方法

Also Published As

Publication number Publication date
EP0534824A1 (de) 1993-03-31
FR2681689A1 (fr) 1993-03-26
DK0534824T3 (da) 1995-10-02
ATE123872T1 (de) 1995-06-15
JPH05223682A (ja) 1993-08-31
US5297422A (en) 1994-03-29
ES2073261T3 (es) 1995-08-01
FR2681689B1 (fr) 1993-11-12
JP2915717B2 (ja) 1999-07-05
EP0534824B1 (de) 1995-06-14
DE69202951T2 (de) 1995-11-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee