DE69200451D1 - Vorrichtung zum Verdampfen und Einspeisen einer Flüssigkeit. - Google Patents

Vorrichtung zum Verdampfen und Einspeisen einer Flüssigkeit.

Info

Publication number
DE69200451D1
DE69200451D1 DE69200451T DE69200451T DE69200451D1 DE 69200451 D1 DE69200451 D1 DE 69200451D1 DE 69200451 T DE69200451 T DE 69200451T DE 69200451 T DE69200451 T DE 69200451T DE 69200451 D1 DE69200451 D1 DE 69200451D1
Authority
DE
Germany
Prior art keywords
evaporating
feeding
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69200451T
Other languages
English (en)
Other versions
DE69200451T2 (de
Inventor
Hiroshi Nishizato
Hirofumi Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lintec Corp
Applied Materials Inc
Original Assignee
Lintec Corp
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp, Applied Materials Inc filed Critical Lintec Corp
Publication of DE69200451D1 publication Critical patent/DE69200451D1/de
Application granted granted Critical
Publication of DE69200451T2 publication Critical patent/DE69200451T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/02—Feed or outlet devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/12—Mixing gases with gases with vaporisation of a liquid
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
DE69200451T 1991-02-05 1992-02-04 Vorrichtung zum Verdampfen und Einspeisen einer Flüssigkeit. Expired - Fee Related DE69200451T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3036707A JPH0795527B2 (ja) 1991-02-05 1991-02-05 液体原料用気化供給器

Publications (2)

Publication Number Publication Date
DE69200451D1 true DE69200451D1 (de) 1994-11-03
DE69200451T2 DE69200451T2 (de) 1995-02-02

Family

ID=12477244

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69200451T Expired - Fee Related DE69200451T2 (de) 1991-02-05 1992-02-04 Vorrichtung zum Verdampfen und Einspeisen einer Flüssigkeit.

Country Status (4)

Country Link
US (1) US5272880A (de)
EP (1) EP0498622B1 (de)
JP (1) JPH0795527B2 (de)
DE (1) DE69200451T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69312436T2 (de) * 1992-12-15 1998-02-05 Applied Materials Inc Verdampfung von flüssigen Reaktionspartnern für CVD
US5455014A (en) * 1993-07-20 1995-10-03 Hughes Aircraft Company Liquid deposition source gas delivery system
US5520001A (en) * 1994-02-20 1996-05-28 Stec, Inc. Vapor controller
US5925189A (en) 1995-12-06 1999-07-20 Applied Materials, Inc. Liquid phosphorous precursor delivery apparatus
US5862605A (en) * 1996-05-24 1999-01-26 Ebara Corporation Vaporizer apparatus
KR100228768B1 (ko) * 1996-10-02 1999-11-01 김영환 화학 기상증착 장치 및 증착방법
US6179277B1 (en) 1998-02-27 2001-01-30 Applied Materials, Inc. Liquid vaporizer systems and methods for their use
US6153540A (en) * 1998-03-04 2000-11-28 Applied Materials, Inc. Method of forming phosphosilicate glass having a high wet-etch rate
JP4393677B2 (ja) * 1999-09-14 2010-01-06 株式会社堀場エステック 液体材料気化方法および装置並びに制御バルブ
US7601225B2 (en) 2002-06-17 2009-10-13 Asm International N.V. System for controlling the sublimation of reactants
US7031600B2 (en) * 2003-04-07 2006-04-18 Applied Materials, Inc. Method and apparatus for silicon oxide deposition on large area substrates
US7253084B2 (en) * 2004-09-03 2007-08-07 Asm America, Inc. Deposition from liquid sources
JP4696561B2 (ja) * 2005-01-14 2011-06-08 東京エレクトロン株式会社 気化装置及び処理装置
US8343583B2 (en) 2008-07-10 2013-01-01 Asm International N.V. Method for vaporizing non-gaseous precursor in a fluidized bed
US8328938B2 (en) 2008-08-21 2012-12-11 United Microelectronics Corp. Buffer apparatus and thin film deposition system
SG160262A1 (en) * 2008-10-02 2010-04-29 United Microelectronics Corp Buffer apparatus and thin film deposition system
US8012876B2 (en) 2008-12-02 2011-09-06 Asm International N.V. Delivery of vapor precursor from solid source
DE102011051931A1 (de) * 2011-07-19 2013-01-24 Aixtron Se Vorrichtung und Verfahren zum Bestimmen des Dampfdrucks eines in einem Trägergasstrom verdampften Ausgangsstoffes
JP6877188B2 (ja) * 2017-03-02 2021-05-26 東京エレクトロン株式会社 ガス供給装置、ガス供給方法及び成膜方法
JP6948803B2 (ja) 2017-03-02 2021-10-13 東京エレクトロン株式会社 ガス供給装置、ガス供給方法及び成膜方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1190436B (de) * 1958-07-21 1965-04-08 Renault Vorrichtung zur Herstellung einer Gasatmosphaere
FR2173378A5 (de) * 1972-02-22 1973-10-05 Coureau Jean Claude
GB2092908A (en) * 1981-02-18 1982-08-25 Nat Res Dev Method and apparatus for delivering a controlled flow rate of reactant to a vapour deposition process
US4450718A (en) * 1982-04-19 1984-05-29 Advanced Semiconductor Materials N.V. Flow meter including improved laminar flow restrictor device therefor
US4800754A (en) * 1987-10-07 1989-01-31 Sierra Instruments, Inc. Wide-range, adjustable flowmeter
DE3932151A1 (de) * 1989-09-22 1991-04-04 Peter Rohleder Vorrichtung zur scannenden erfassung eines innenraums
US5098741A (en) * 1990-06-08 1992-03-24 Lam Research Corporation Method and system for delivering liquid reagents to processing vessels

Also Published As

Publication number Publication date
EP0498622A2 (de) 1992-08-12
JPH0795527B2 (ja) 1995-10-11
EP0498622A3 (en) 1993-03-17
JPH06132226A (ja) 1994-05-13
EP0498622B1 (de) 1994-09-28
DE69200451T2 (de) 1995-02-02
US5272880A (en) 1993-12-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee