DE69131673D1 - Säuregehärtete Photoresiste - Google Patents
Säuregehärtete PhotoresisteInfo
- Publication number
- DE69131673D1 DE69131673D1 DE69131673T DE69131673T DE69131673D1 DE 69131673 D1 DE69131673 D1 DE 69131673D1 DE 69131673 T DE69131673 T DE 69131673T DE 69131673 T DE69131673 T DE 69131673T DE 69131673 D1 DE69131673 D1 DE 69131673D1
- Authority
- DE
- Germany
- Prior art keywords
- acid
- cured photoresists
- photoresists
- cured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
- G03F7/0295—Photolytic halogen compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/04—Chromates
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US54011690A | 1990-06-19 | 1990-06-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69131673D1 true DE69131673D1 (de) | 1999-11-11 |
DE69131673T2 DE69131673T2 (de) | 2000-04-20 |
Family
ID=24154071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69131673T Expired - Fee Related DE69131673T2 (de) | 1990-06-19 | 1991-05-08 | Säuregehärtete Photoresiste |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0462391B1 (de) |
JP (1) | JP3453392B2 (de) |
KR (1) | KR920001244A (de) |
DE (1) | DE69131673T2 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2538117B2 (ja) * | 1990-09-28 | 1996-09-25 | 東京応化工業株式会社 | ネガ型放射線感応レジスト組成物 |
JP2538118B2 (ja) * | 1990-09-28 | 1996-09-25 | 東京応化工業株式会社 | ネガ型放射線感応性レジスト組成物 |
JP2583651B2 (ja) * | 1990-09-28 | 1997-02-19 | 東京応化工業株式会社 | ネガ型感放射線レジスト組成物 |
US5206116A (en) * | 1991-03-04 | 1993-04-27 | Shipley Company Inc. | Light-sensitive composition for use as a soldermask and process |
US5312715A (en) * | 1991-03-04 | 1994-05-17 | Shipley Company Inc. | Light-sensitive composition and process |
US5286599A (en) * | 1991-09-26 | 1994-02-15 | International Business Machines Corporation | Base developable negative photoresist composition and use thereof |
US5879856A (en) * | 1995-12-05 | 1999-03-09 | Shipley Company, L.L.C. | Chemically amplified positive photoresists |
JPH1165118A (ja) * | 1997-08-15 | 1999-03-05 | Nippon Telegr & Teleph Corp <Ntt> | レジスト材料 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1447913C3 (de) * | 1964-10-15 | 1979-08-09 | Hoechst Ag, 6000 Frankfurt | Verfahren zur Herstellung von Druckformen |
CA1307695C (en) * | 1986-01-13 | 1992-09-22 | Wayne Edmund Feely | Photosensitive compounds and thermally stable and aqueous developablenegative images |
US5391465A (en) * | 1989-06-20 | 1995-02-21 | Rohm And Haas Company | Method of using selected photoactive compounds in high resolution, acid hardening photoresists with near ultraviolet radiation wherein the photoresist comprise conventional deep UV photoacid generators |
-
1991
- 1991-05-08 EP EP91107484A patent/EP0462391B1/de not_active Expired - Lifetime
- 1991-05-08 DE DE69131673T patent/DE69131673T2/de not_active Expired - Fee Related
- 1991-06-04 JP JP13281191A patent/JP3453392B2/ja not_active Expired - Lifetime
- 1991-06-19 KR KR1019910010129A patent/KR920001244A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0462391A3 (en) | 1992-01-22 |
EP0462391A2 (de) | 1991-12-27 |
JPH04358155A (ja) | 1992-12-11 |
EP0462391B1 (de) | 1999-10-06 |
DE69131673T2 (de) | 2000-04-20 |
KR920001244A (ko) | 1992-01-30 |
JP3453392B2 (ja) | 2003-10-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |