DE69127989D1 - Massenspektrometer für neutrale gesputterte Atome, die mit Laser ionisiert sind - Google Patents

Massenspektrometer für neutrale gesputterte Atome, die mit Laser ionisiert sind

Info

Publication number
DE69127989D1
DE69127989D1 DE69127989T DE69127989T DE69127989D1 DE 69127989 D1 DE69127989 D1 DE 69127989D1 DE 69127989 T DE69127989 T DE 69127989T DE 69127989 T DE69127989 T DE 69127989T DE 69127989 D1 DE69127989 D1 DE 69127989D1
Authority
DE
Germany
Prior art keywords
ionized
laser
mass spectrometer
sputtered atoms
neutral sputtered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69127989T
Other languages
English (en)
Other versions
DE69127989T2 (de
Inventor
Tetsuya Maruo
Yoshikazu Honma
Satoru Kurosawa
Tohru Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2092125A external-priority patent/JPH03291559A/ja
Priority claimed from JP2162654A external-priority patent/JPH0456057A/ja
Priority claimed from JP2164066A external-priority patent/JPH0458447A/ja
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Application granted granted Critical
Publication of DE69127989D1 publication Critical patent/DE69127989D1/de
Publication of DE69127989T2 publication Critical patent/DE69127989T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/164—Laser desorption/ionisation, e.g. matrix-assisted laser desorption/ionisation [MALDI]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
DE69127989T 1990-04-09 1991-04-08 Massenspektrometer für neutrale gesputterte Atome, die mit Laser ionisiert sind Expired - Fee Related DE69127989T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2092125A JPH03291559A (ja) 1990-04-09 1990-04-09 レーザイオン化中性粒子質量分析装置
JP2162654A JPH0456057A (ja) 1990-06-22 1990-06-22 レーザイオン化中性粒子質量分析装置
JP2164066A JPH0458447A (ja) 1990-06-25 1990-06-25 レーザイオン化中性粒子質量分析装置

Publications (2)

Publication Number Publication Date
DE69127989D1 true DE69127989D1 (de) 1997-11-27
DE69127989T2 DE69127989T2 (de) 1998-06-18

Family

ID=27306946

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69127989T Expired - Fee Related DE69127989T2 (de) 1990-04-09 1991-04-08 Massenspektrometer für neutrale gesputterte Atome, die mit Laser ionisiert sind

Country Status (3)

Country Link
US (1) US5105082A (de)
EP (1) EP0452767B1 (de)
DE (1) DE69127989T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272338A (en) * 1992-05-21 1993-12-21 The Pennsylvania Research Corporation Molecular imaging system
US5397895A (en) * 1992-09-24 1995-03-14 The United States Of America As Represented By The Secretary Of Commerce Photoionization mass spectroscopy flux monitor
CA2629201A1 (en) * 2006-01-05 2007-07-12 Mds Analytical Technologies, A Business Unit Of Mds Inc., Doing Business Through Its Sciex Division Systems and methods for calculating ion flux in mass spectrometry
EP2126957A4 (de) * 2007-01-19 2012-05-30 Mds Analytical Tech Bu Mds Inc Vorrichtung und verfahren zum kühlen von ionen
US8530829B2 (en) * 2010-09-23 2013-09-10 Agilent Technologies, Inc. Inductively coupled plasma mass spectroscopy apparatus and measured data processing method in the inductively coupled plasma mass spectroscopy apparatus
JP6316041B2 (ja) 2014-03-18 2018-04-25 株式会社東芝 スパッタ中性粒子質量分析装置
JP6180974B2 (ja) * 2014-03-18 2017-08-16 株式会社東芝 スパッタ中性粒子質量分析装置
US20150279645A1 (en) * 2014-03-27 2015-10-01 Kabushiki Kaisha Toshiba Mass spectroscope and mass spectrometry
JP6523890B2 (ja) * 2015-09-11 2019-06-05 東芝メモリ株式会社 質量分析装置
CN105572216A (zh) * 2015-12-30 2016-05-11 大连民族大学 一种新型飞行时间二次离子质谱
CN106981412B (zh) * 2016-01-19 2019-02-12 中国科学院化学研究所 检测颗粒质量的质谱装置、用途及测量方法
KR102258963B1 (ko) * 2019-09-23 2021-06-01 한국기초과학지원연구원 질량 분석 시스템 및 질량 분석 방법
KR20230135421A (ko) * 2022-03-16 2023-09-25 에이치비솔루션㈜ Tof-meis 신호 개선 시스템

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4733073A (en) * 1983-12-23 1988-03-22 Sri International Method and apparatus for surface diagnostics
FR2620532B1 (fr) * 1987-09-11 1989-12-01 Cameca Procede d'analyse d'un echantillon par erosion au moyen d'un faisceau de particules, et dispositif pour la mise en oeuvre de ce procede

Also Published As

Publication number Publication date
EP0452767A1 (de) 1991-10-23
DE69127989T2 (de) 1998-06-18
US5105082A (en) 1992-04-14
EP0452767B1 (de) 1997-10-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee