DE69125112D1 - Schneidsystem - Google Patents

Schneidsystem

Info

Publication number
DE69125112D1
DE69125112D1 DE69125112T DE69125112T DE69125112D1 DE 69125112 D1 DE69125112 D1 DE 69125112D1 DE 69125112 T DE69125112 T DE 69125112T DE 69125112 T DE69125112 T DE 69125112T DE 69125112 D1 DE69125112 D1 DE 69125112D1
Authority
DE
Germany
Prior art keywords
cutting system
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69125112T
Other languages
English (en)
Other versions
DE69125112T2 (de
Inventor
Isao Yukawa
Masahiro Yoshii
Kazuma Sekiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of DE69125112D1 publication Critical patent/DE69125112D1/de
Application granted granted Critical
Publication of DE69125112T2 publication Critical patent/DE69125112T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B27—WORKING OR PRESERVING WOOD OR SIMILAR MATERIAL; NAILING OR STAPLING MACHINES IN GENERAL
    • B27B—SAWS FOR WOOD OR SIMILAR MATERIAL; COMPONENTS OR ACCESSORIES THEREFOR
    • B27B31/00—Arrangements for conveying, loading, turning, adjusting, or discharging the log or timber, specially designed for saw mills or sawing machines
    • B27B31/06—Adjusting equipment, e.g. using optical projection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Wood Science & Technology (AREA)
  • Forests & Forestry (AREA)
  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
DE69125112T 1990-12-12 1991-12-09 Schneidsystem Expired - Lifetime DE69125112T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP40989490 1990-12-12
JP22239091A JP3173052B2 (ja) 1990-12-12 1991-08-08 半導体ウェーハのダイシング方法

Publications (2)

Publication Number Publication Date
DE69125112D1 true DE69125112D1 (de) 1997-04-17
DE69125112T2 DE69125112T2 (de) 1997-06-19

Family

ID=26524856

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69125112T Expired - Lifetime DE69125112T2 (de) 1990-12-12 1991-12-09 Schneidsystem

Country Status (5)

Country Link
EP (1) EP0490324B1 (de)
JP (1) JP3173052B2 (de)
KR (1) KR0142223B1 (de)
DE (1) DE69125112T2 (de)
TW (1) TW201862B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2991593B2 (ja) * 1993-08-19 1999-12-20 株式会社東京精密 ダイシング装置の半導体ウェハ形状認識装置
JP3203364B2 (ja) 1997-12-01 2001-08-27 株式会社東京精密 アライメント方法及びその装置
JP2001196328A (ja) * 2000-01-12 2001-07-19 Disco Abrasive Syst Ltd Ｃｓｐ基板の分割方法
JP4657585B2 (ja) * 2003-06-05 2011-03-23 株式会社ディスコ 半導体ウェーハの分割方法
JP4648056B2 (ja) * 2005-03-31 2011-03-09 株式会社ディスコ ウエーハのレーザー加工方法およびレーザー加工装置
JP4671760B2 (ja) * 2005-05-19 2011-04-20 三星ダイヤモンド工業株式会社 レーザ加工装置における加工範囲設定方法、および加工範囲設定プログラム
JP5049000B2 (ja) * 2006-12-15 2012-10-17 株式会社ディスコ ウエーハの分割方法
DE102008007603B4 (de) * 2007-02-02 2014-02-13 Suss Microtec Test Systems Gmbh Verfahren und Vorrichtung zur besseren Ausnutzung von Halbleitermaterial
JP6294324B2 (ja) * 2012-08-31 2018-03-14 セミコンダクター テクノロジーズ アンド インストゥルメンツ ピーティーイー リミテッド ウェハー及びフィルムフレームの両方のための単一超平坦ウェハーテーブル構造
JP6218658B2 (ja) * 2014-03-27 2017-10-25 株式会社ディスコ レーザー加工方法
DE102014118833A1 (de) * 2014-12-17 2016-06-23 Mechatronic Systemtechnik Gmbh Verfahren und Vorrichtung zum Vorausrichten eines flachen Substrats

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0031807A3 (de) * 1978-03-09 1981-12-16 GULF & WESTERN CORPORATION Apparat zur Feststellung des allgemeinen Umrisses und der plötzlichen Veränderungen der Oberfläche eines weichen blattartigen Werkstückes, das aus mindestens einem Teil eines natürlichen Tabakblattes gebildet ist
JPS60100450A (ja) * 1983-11-07 1985-06-04 Disco Abrasive Sys Ltd 半導体ウエーハ装着及び切断装置
US4856904A (en) * 1985-01-21 1989-08-15 Nikon Corporation Wafer inspecting apparatus

Also Published As

Publication number Publication date
KR920013637A (ko) 1992-07-29
JPH04363047A (ja) 1992-12-15
JP3173052B2 (ja) 2001-06-04
TW201862B (de) 1993-03-11
KR0142223B1 (ko) 1998-07-15
DE69125112T2 (de) 1997-06-19
EP0490324A1 (de) 1992-06-17
EP0490324B1 (de) 1997-03-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: JUNG, SCHIRDEWAHN, GRUENBERG, SCHNEIDER PATENTANWAELTE

8328 Change in the person/name/address of the agent

Representative=s name: ADVOTEC. PATENT- UND RECHTSANWAELTE, 80538 MUENCHE