DE69124881D1 - Diamantartige Kohlenstoffbeschichtungen - Google Patents

Diamantartige Kohlenstoffbeschichtungen

Info

Publication number
DE69124881D1
DE69124881D1 DE69124881T DE69124881T DE69124881D1 DE 69124881 D1 DE69124881 D1 DE 69124881D1 DE 69124881 T DE69124881 T DE 69124881T DE 69124881 T DE69124881 T DE 69124881T DE 69124881 D1 DE69124881 D1 DE 69124881D1
Authority
DE
Germany
Prior art keywords
diamond
carbon coatings
depositing
carbon
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69124881T
Other languages
English (en)
Other versions
DE69124881T2 (de
Inventor
Geoffrey Dearnaley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Accentus Medical PLC
Original Assignee
AEA Technology PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AEA Technology PLC filed Critical AEA Technology PLC
Application granted granted Critical
Publication of DE69124881D1 publication Critical patent/DE69124881D1/de
Publication of DE69124881T2 publication Critical patent/DE69124881T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Chemical Vapour Deposition (AREA)
DE69124881T 1990-09-01 1991-08-08 Diamantartige Kohlenstoffbeschichtungen Expired - Fee Related DE69124881T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB909019219A GB9019219D0 (en) 1990-09-01 1990-09-01 Diamond-like carbon coatings

Publications (2)

Publication Number Publication Date
DE69124881D1 true DE69124881D1 (de) 1997-04-10
DE69124881T2 DE69124881T2 (de) 1997-06-12

Family

ID=10681603

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69124881T Expired - Fee Related DE69124881T2 (de) 1990-09-01 1991-08-08 Diamantartige Kohlenstoffbeschichtungen

Country Status (6)

Country Link
EP (1) EP0474369B1 (de)
JP (1) JPH04232249A (de)
AT (1) ATE149582T1 (de)
DE (1) DE69124881T2 (de)
DK (1) DK0474369T3 (de)
GB (2) GB9019219D0 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100195605B1 (ko) * 1993-10-28 1999-06-15 모리시따 요오이 찌 다이아몬드형상의 박막형성방법 및 테이프구동장치
BE1008229A3 (nl) * 1993-10-29 1996-02-20 Vito Werkwijze voor het aanbrengen van een tegen slijtage beschermende laag op een substraat.
US5391407A (en) * 1994-03-18 1995-02-21 Southwest Research Institute Process for forming protective diamond-like carbon coatings on metallic surfaces
US5593719A (en) * 1994-03-29 1997-01-14 Southwest Research Institute Treatments to reduce frictional wear between components made of ultra-high molecular weight polyethylene and metal alloys
US5393572A (en) * 1994-07-11 1995-02-28 Southwest Research Institute Ion beam assisted method of producing a diamond like carbon coating
CA2184206C (en) * 1995-08-29 2002-10-08 Yasuaki Sakamoto Molded glass plate produced by mold with modified surface
JPH10130865A (ja) * 1996-09-06 1998-05-19 Sanyo Electric Co Ltd 硬質炭素被膜基板及びその形成方法
EP1067210A3 (de) * 1996-09-06 2002-11-13 Sanyo Electric Co., Ltd. Verfahren zur Abscheidung eines harten Kohlenstoff-Filmes auf einem Substrat und Klinge für einen elektrischen Rasierer
JP3555844B2 (ja) 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
DE19928498A1 (de) * 1999-06-22 2000-12-28 Nmi Univ Tuebingen Drehmomentübertragende Arbeitsflächen für Werkzeuge und Verfahren zu deren Herstellung
JP4560964B2 (ja) * 2000-02-25 2010-10-13 住友電気工業株式会社 非晶質炭素被覆部材
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
JP4863152B2 (ja) 2003-07-31 2012-01-25 日産自動車株式会社 歯車
KR101003865B1 (ko) 2003-08-06 2010-12-30 닛산 지도우샤 가부시키가이샤 저마찰 접동 기구, 저마찰제 조성물 및 마찰 감소 방법
JP4973971B2 (ja) 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (de) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Getriebe enthaltend eine getriebeölzusammensetzung
DE202013012031U1 (de) * 2013-07-09 2015-02-23 Friedrich-Alexander-Universität Erlangen-Nürnberg Werkzeug zum Einsatz beim Aluminiumguss
CN105908143B (zh) * 2016-05-05 2018-07-27 广州今泰科技股份有限公司 易锈蚀金属件表面类金刚石薄膜及其制备方法
CN114369794A (zh) * 2021-12-09 2022-04-19 深圳市恒鼎新材料有限公司 一种高分子材料表面镀耐磨膜层工艺及其制得的耐磨镀膜
CN115819118B (zh) * 2022-11-25 2023-09-22 湖南柯盛新材料有限公司 抗氧化涂层和含有抗氧化涂层的石墨模具及其制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0030792B1 (de) * 1979-11-20 1983-09-21 National Research Development Corporation Infrarotreflektoren
DE3167761D1 (en) * 1980-01-16 1985-01-31 Nat Res Dev Method and apparatus for depositing coatings in a glow discharge
GB2122224B (en) * 1982-06-23 1986-06-11 Atomic Energy Authority Uk Ion beam carbon layers
US4656052A (en) * 1984-02-13 1987-04-07 Kyocera Corporation Process for production of high-hardness boron nitride film
US4698256A (en) * 1984-04-02 1987-10-06 American Cyanamid Company Articles coated with adherent diamondlike carbon films
DD258341A3 (de) * 1986-03-14 1988-07-20 Hochvakuum Dresden Veb Verfahren zur herstellung haftfester ic-schichten
US4849290A (en) * 1986-08-11 1989-07-18 Sumitomo Electric Industries, Ltd. Alumina coated with diamond
DE3630418C1 (de) * 1986-09-06 1987-12-17 Kernforschungsanlage Juelich Verfahren zur Beschichtung von Werkstuecken mit amorphem,wasserstoffhaltigem Kohlenstoff
JPS63286576A (ja) * 1987-05-19 1988-11-24 Idemitsu Petrochem Co Ltd 硬質炭素膜の製造方法
JPS63286575A (ja) * 1987-05-19 1988-11-24 Idemitsu Petrochem Co Ltd 硬質炭素膜の製造方法
US5185179A (en) * 1988-10-11 1993-02-09 Semiconductor Energy Laboratory Co., Ltd. Plasma processing method and products thereof
ATE98303T1 (de) * 1989-03-03 1993-12-15 Balzers Hochvakuum Verfahren zur beschichtung von hartmetallgrundkoerpern und hartmetallwerkzeug hergestellt nach dem verfahren.
CA2014913A1 (en) * 1989-07-31 1991-01-31 Thomas R. Anthony Method for improving adhesion of synthetic diamond coatings to substrates
GB2240114B (en) * 1990-01-18 1993-03-24 Stc Plc Film nucleation process
JPH1091354A (ja) * 1996-09-12 1998-04-10 Kyushu Nippon Denki Software Kk 軌跡描画方法

Also Published As

Publication number Publication date
JPH04232249A (ja) 1992-08-20
GB9019219D0 (en) 1990-10-17
DE69124881T2 (de) 1997-06-12
DK0474369T3 (da) 1997-03-24
ATE149582T1 (de) 1997-03-15
EP0474369A1 (de) 1992-03-11
GB9117091D0 (en) 1991-09-25
GB2247692B (en) 1995-01-18
EP0474369B1 (de) 1997-03-05
GB2247692A (en) 1992-03-11

Similar Documents

Publication Publication Date Title
DE69124881D1 (de) Diamantartige Kohlenstoffbeschichtungen
ATE32529T1 (de) Ungeordnete beschichtung und verfahren.
ATE47893T1 (de) Dekorative kohlenstoff-beschichtung und verfahren.
IE45250L (en) Coating glass or ceramic surfaces
ATE78195T1 (de) Aufbringen von ueberzuegen auf oberflaechen.
DE3885261D1 (de) Verfahren zur Herstellung eines mit Apatit beschichteten Substrats.
DE69635519D1 (de) Verfahren zum herstellen einer solarselektiven oberflächenbeschichtung
JPS53115754A (en) Double-side coating method
NO20031200D0 (no) Fremgangsmåte for å forsyne begge sider av et glassubstrat med belegg
TW351770B (en) Shield layer, method for forming shield layer and producing substrate
ATE114511T1 (de) Werkzeugeinsatz.
JPS53139665A (en) Production of decorative material
DE68921253D1 (de) Verfahren zur Abscheidung einer dünnen Supraleiterschicht.
JPS53108842A (en) Manufacture of steel materials having coated stainless steel layer
ES2054242T3 (es) Peliculas de dos fases metal/oxido.
JPS5242703A (en) Method of producing magnetic recording media
ES2097634T3 (es) Procedimiento de aplicacion de un recubrimiento decorativo a un substrato.
JPS6425318A (en) Production of magnetic card and magnetic card
JPS52114633A (en) Method of forming formative stereo pattern
SE8701197D0 (sv) Selective decarborization of iron based material
DE69015010T2 (de) Verfahren zum Herstellen von Substraten zum Beschichten mit dünnen Diamantschichten.
DE3465438D1 (en) Matrix and method of manufacturing articles of a synthetic resin by using the matrix
JPS5367407A (en) Production of magnetic disc
JPS5754289A (de)
JPS5247838A (en) Coating method

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ACCENTUS PLC, DIDCOT, OXFORDSHIRE, GB

8339 Ceased/non-payment of the annual fee