DE69122785T2 - Musterherstellungsverfahren und Resist zum Benutzen in diesem Verfahren - Google Patents
Musterherstellungsverfahren und Resist zum Benutzen in diesem VerfahrenInfo
- Publication number
- DE69122785T2 DE69122785T2 DE69122785T DE69122785T DE69122785T2 DE 69122785 T2 DE69122785 T2 DE 69122785T2 DE 69122785 T DE69122785 T DE 69122785T DE 69122785 T DE69122785 T DE 69122785T DE 69122785 T2 DE69122785 T2 DE 69122785T2
- Authority
- DE
- Germany
- Prior art keywords
- resist
- pattern making
- making process
- pattern
- making
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
- G03F7/0758—Macromolecular compounds containing Si-O, Si-C or Si-N bonds with silicon- containing groups in the side chains
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/143—Electron beam
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012640A JP2659025B2 (ja) | 1990-01-24 | 1990-01-24 | 放射線用レジスト及びその製造方法及びパターン形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69122785D1 DE69122785D1 (de) | 1996-11-28 |
DE69122785T2 true DE69122785T2 (de) | 1997-02-20 |
Family
ID=11810968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69122785T Expired - Fee Related DE69122785T2 (de) | 1990-01-24 | 1991-01-18 | Musterherstellungsverfahren und Resist zum Benutzen in diesem Verfahren |
Country Status (5)
Country | Link |
---|---|
US (1) | US5192643A (de) |
EP (1) | EP0439289B1 (de) |
JP (1) | JP2659025B2 (de) |
KR (1) | KR950000201B1 (de) |
DE (1) | DE69122785T2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2707785B2 (ja) * | 1990-03-13 | 1998-02-04 | 富士通株式会社 | レジスト組成物およびパターン形成方法 |
JPH0442229A (ja) * | 1990-06-08 | 1992-02-12 | Fujitsu Ltd | レジスト材料およびパターンの形成方法 |
JP2980149B2 (ja) * | 1993-09-24 | 1999-11-22 | 富士通株式会社 | レジスト材料およびパターン形成方法 |
AU6056099A (en) * | 1998-09-23 | 2000-04-10 | E.I. Du Pont De Nemours And Company | Photoresists, polymers and processes for microlithography |
US6849377B2 (en) | 1998-09-23 | 2005-02-01 | E. I. Du Pont De Nemours And Company | Photoresists, polymers and processes for microlithography |
US6358675B1 (en) * | 1998-10-02 | 2002-03-19 | 3M Innovative Properties Company | Silicon-containing alcohols and polymers having silicon-containing tertiary ester groups made therefrom |
JP4449176B2 (ja) * | 2000-06-30 | 2010-04-14 | 住友化学株式会社 | 化学増幅型レジスト組成物 |
JP4199914B2 (ja) * | 2000-11-29 | 2008-12-24 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
KR100732285B1 (ko) * | 2000-12-26 | 2007-06-25 | 주식회사 하이닉스반도체 | 포토레지스트 단량체, 그의 중합체 및 이를 함유하는포토레지스트 조성물 |
US6730452B2 (en) * | 2001-01-26 | 2004-05-04 | International Business Machines Corporation | Lithographic photoresist composition and process for its use |
US6548219B2 (en) * | 2001-01-26 | 2003-04-15 | International Business Machines Corporation | Substituted norbornene fluoroacrylate copolymers and use thereof in lithographic photoresist compositions |
US6509134B2 (en) * | 2001-01-26 | 2003-01-21 | International Business Machines Corporation | Norbornene fluoroacrylate copolymers and process for the use thereof |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3279090D1 (en) * | 1981-12-19 | 1988-11-10 | Daikin Ind Ltd | Resist material and process for forming fine resist pattern |
JPS59197036A (ja) * | 1982-06-28 | 1984-11-08 | Nissan Chem Ind Ltd | パタ−ン形成用材料 |
JPH0682215B2 (ja) * | 1986-03-31 | 1994-10-19 | 株式会社東芝 | 放射線用レジストおよびそれを用いたパタ−ン形成方法 |
US4788127A (en) * | 1986-11-17 | 1988-11-29 | Eastman Kodak Company | Photoresist composition comprising an interpolymer of a silicon-containing monomer and an hydroxystyrene |
JP2653148B2 (ja) * | 1989-01-20 | 1997-09-10 | 富士通株式会社 | レジスト組成物 |
JPH02239251A (ja) * | 1989-03-13 | 1990-09-21 | Fujitsu Ltd | レジスト組成物 |
JPH03278059A (ja) * | 1989-07-10 | 1991-12-09 | Mitsubishi Electric Corp | 放射線感応性重合体およびそれを含有した放射線感応性組成物 |
-
1990
- 1990-01-24 JP JP2012640A patent/JP2659025B2/ja not_active Expired - Fee Related
-
1991
- 1991-01-18 EP EP91300388A patent/EP0439289B1/de not_active Expired - Lifetime
- 1991-01-18 DE DE69122785T patent/DE69122785T2/de not_active Expired - Fee Related
- 1991-01-22 US US07/643,960 patent/US5192643A/en not_active Expired - Lifetime
- 1991-01-23 KR KR91001083A patent/KR950000201B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0439289A2 (de) | 1991-07-31 |
DE69122785D1 (de) | 1996-11-28 |
US5192643A (en) | 1993-03-09 |
KR950000201B1 (en) | 1995-01-11 |
EP0439289B1 (de) | 1996-10-23 |
JP2659025B2 (ja) | 1997-09-30 |
JPH03217845A (ja) | 1991-09-25 |
EP0439289A3 (de) | 1991-08-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |