DE69121258T2 - Verfahren zur Detektion von Lageabweichungen - Google Patents

Verfahren zur Detektion von Lageabweichungen

Info

Publication number
DE69121258T2
DE69121258T2 DE1991621258 DE69121258T DE69121258T2 DE 69121258 T2 DE69121258 T2 DE 69121258T2 DE 1991621258 DE1991621258 DE 1991621258 DE 69121258 T DE69121258 T DE 69121258T DE 69121258 T2 DE69121258 T2 DE 69121258T2
Authority
DE
Germany
Prior art keywords
detection
position deviations
deviations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1991621258
Other languages
English (en)
Other versions
DE69121258D1 (de
Inventor
Masakazu Matsugu
Kenji Saito
Jun Hattori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69121258D1 publication Critical patent/DE69121258D1/de
Application granted granted Critical
Publication of DE69121258T2 publication Critical patent/DE69121258T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
DE1991621258 1990-02-05 1991-02-04 Verfahren zur Detektion von Lageabweichungen Expired - Fee Related DE69121258T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2548990A JP2862307B2 (ja) 1990-02-05 1990-02-05 位置ずれ検出方法

Publications (2)

Publication Number Publication Date
DE69121258D1 DE69121258D1 (de) 1996-09-19
DE69121258T2 true DE69121258T2 (de) 1997-01-09

Family

ID=12167473

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991621258 Expired - Fee Related DE69121258T2 (de) 1990-02-05 1991-02-04 Verfahren zur Detektion von Lageabweichungen

Country Status (3)

Country Link
EP (1) EP0441578B1 (de)
JP (1) JP2862307B2 (de)
DE (1) DE69121258T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109654994A (zh) * 2019-01-07 2019-04-19 佛山市瑞创智能科技有限公司 一种移动感应器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8600638A (nl) * 1986-03-12 1987-10-01 Philips Nv Inrichting voor het ten opzichte van elkaar uitrichten van een masker en een substraat.
JP2546364B2 (ja) * 1988-02-16 1996-10-23 キヤノン株式会社 位置合わせ装置

Also Published As

Publication number Publication date
DE69121258D1 (de) 1996-09-19
JPH03229104A (ja) 1991-10-11
JP2862307B2 (ja) 1999-03-03
EP0441578A2 (de) 1991-08-14
EP0441578A3 (en) 1992-04-22
EP0441578B1 (de) 1996-08-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee