DE69120219D1 - System für Vakuum-Behandlung - Google Patents
System für Vakuum-BehandlungInfo
- Publication number
- DE69120219D1 DE69120219D1 DE69120219T DE69120219T DE69120219D1 DE 69120219 D1 DE69120219 D1 DE 69120219D1 DE 69120219 T DE69120219 T DE 69120219T DE 69120219 T DE69120219 T DE 69120219T DE 69120219 D1 DE69120219 D1 DE 69120219D1
- Authority
- DE
- Germany
- Prior art keywords
- treatment system
- vacuum treatment
- vacuum
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000009489 vacuum treatment Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2317810A JP2595132B2 (ja) | 1990-11-26 | 1990-11-26 | 真空処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69120219D1 true DE69120219D1 (de) | 1996-07-18 |
DE69120219T2 DE69120219T2 (de) | 1997-01-23 |
Family
ID=18092297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69120219T Expired - Fee Related DE69120219T2 (de) | 1990-11-26 | 1991-11-25 | System für Vakuum-Behandlung |
Country Status (5)
Country | Link |
---|---|
US (1) | US5445484A (de) |
EP (1) | EP0488620B1 (de) |
JP (1) | JP2595132B2 (de) |
KR (1) | KR100235917B1 (de) |
DE (1) | DE69120219T2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2644912B2 (ja) * | 1990-08-29 | 1997-08-25 | 株式会社日立製作所 | 真空処理装置及びその運転方法 |
JPH0936198A (ja) * | 1995-07-19 | 1997-02-07 | Hitachi Ltd | 真空処理装置およびそれを用いた半導体製造ライン |
TW372926B (en) * | 1996-04-04 | 1999-11-01 | Applied Materials Inc | Method and system of processing semiconductor workpieces and robot for use in said system |
US6672820B1 (en) * | 1996-07-15 | 2004-01-06 | Semitool, Inc. | Semiconductor processing apparatus having linear conveyer system |
US6203582B1 (en) | 1996-07-15 | 2001-03-20 | Semitool, Inc. | Modular semiconductor workpiece processing tool |
US5961269A (en) | 1996-11-18 | 1999-10-05 | Applied Materials, Inc. | Three chamber load lock apparatus |
JP3579228B2 (ja) * | 1997-01-24 | 2004-10-20 | 大日本スクリーン製造株式会社 | 基板処理装置 |
US6432203B1 (en) * | 1997-03-17 | 2002-08-13 | Applied Komatsu Technology, Inc. | Heated and cooled vacuum chamber shield |
US6034000A (en) | 1997-07-28 | 2000-03-07 | Applied Materials, Inc. | Multiple loadlock system |
US6530732B1 (en) * | 1997-08-12 | 2003-03-11 | Brooks Automation, Inc. | Single substrate load lock with offset cool module and buffer chamber |
US6440261B1 (en) | 1999-05-25 | 2002-08-27 | Applied Materials, Inc. | Dual buffer chamber cluster tool for semiconductor wafer processing |
US6558509B2 (en) * | 1999-11-30 | 2003-05-06 | Applied Materials, Inc. | Dual wafer load lock |
US6949143B1 (en) | 1999-12-15 | 2005-09-27 | Applied Materials, Inc. | Dual substrate loadlock process equipment |
US7076920B2 (en) * | 2000-03-22 | 2006-07-18 | Mks Instruments, Inc. | Method of using a combination differential and absolute pressure transducer for controlling a load lock |
KR100960773B1 (ko) * | 2000-09-15 | 2010-06-01 | 어플라이드 머티어리얼스, 인코포레이티드 | 처리 장비용 더블 이중 슬롯 로드록 |
US7316966B2 (en) * | 2001-09-21 | 2008-01-08 | Applied Materials, Inc. | Method for transferring substrates in a load lock chamber |
US7114903B2 (en) * | 2002-07-16 | 2006-10-03 | Semitool, Inc. | Apparatuses and method for transferring and/or pre-processing microelectronic workpieces |
US7207766B2 (en) * | 2003-10-20 | 2007-04-24 | Applied Materials, Inc. | Load lock chamber for large area substrate processing system |
US7497414B2 (en) * | 2004-06-14 | 2009-03-03 | Applied Materials, Inc. | Curved slit valve door with flexible coupling |
US20070006936A1 (en) * | 2005-07-07 | 2007-01-11 | Applied Materials, Inc. | Load lock chamber with substrate temperature regulation |
US7845891B2 (en) | 2006-01-13 | 2010-12-07 | Applied Materials, Inc. | Decoupled chamber body |
US7665951B2 (en) | 2006-06-02 | 2010-02-23 | Applied Materials, Inc. | Multiple slot load lock chamber and method of operation |
US7845618B2 (en) | 2006-06-28 | 2010-12-07 | Applied Materials, Inc. | Valve door with ball coupling |
US8124907B2 (en) * | 2006-08-04 | 2012-02-28 | Applied Materials, Inc. | Load lock chamber with decoupled slit valve door seal compartment |
JP5314789B2 (ja) * | 2012-06-13 | 2013-10-16 | 株式会社日立製作所 | 真空処理装置及び真空処理方法 |
US10224224B2 (en) * | 2017-03-10 | 2019-03-05 | Micromaterials, LLC | High pressure wafer processing systems and related methods |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4405435A (en) * | 1980-08-27 | 1983-09-20 | Hitachi, Ltd. | Apparatus for performing continuous treatment in vacuum |
JPH06105742B2 (ja) * | 1983-11-28 | 1994-12-21 | 株式会社日立製作所 | 真空処理方法及び装置 |
US4584045A (en) * | 1984-02-21 | 1986-04-22 | Plasma-Therm, Inc. | Apparatus for conveying a semiconductor wafer |
US4759681A (en) * | 1985-01-22 | 1988-07-26 | Nissin Electric Co. Ltd. | End station for an ion implantation apparatus |
JPS6218032A (ja) * | 1985-07-17 | 1987-01-27 | Fujitsu Ltd | 半導体装置の製造方法 |
US4932828A (en) * | 1985-09-04 | 1990-06-12 | Canon Kabushiki Kaisha | Automatic article feeding system |
US5044871A (en) * | 1985-10-24 | 1991-09-03 | Texas Instruments Incorporated | Integrated circuit processing system |
US4746256A (en) * | 1986-03-13 | 1988-05-24 | Roboptek, Inc. | Apparatus for handling sensitive material such as semiconductor wafers |
US4705951A (en) * | 1986-04-17 | 1987-11-10 | Varian Associates, Inc. | Wafer processing system |
US4808059A (en) * | 1986-07-15 | 1989-02-28 | Peak Systems, Inc. | Apparatus and method for transferring workpieces |
GB2199022B (en) * | 1986-11-20 | 1991-01-02 | Shimizu Construction Co Ltd | Dust tight storage cabinet apparatus for use in clean rooms |
JPS63140523A (ja) * | 1986-12-03 | 1988-06-13 | Hitachi Ltd | 処理装置 |
US4951601A (en) * | 1986-12-19 | 1990-08-28 | Applied Materials, Inc. | Multi-chamber integrated process system |
KR0133681B1 (ko) * | 1987-10-12 | 1998-04-23 | 후쿠다 켄조오 | 웨이퍼 캐리어 반송용 처크 |
US4907931A (en) * | 1988-05-18 | 1990-03-13 | Prometrix Corporation | Apparatus for handling semiconductor wafers |
US4923584A (en) * | 1988-10-31 | 1990-05-08 | Eaton Corporation | Sealing apparatus for a vacuum processing system |
JPH0793348B2 (ja) * | 1989-05-19 | 1995-10-09 | アプライド マテリアルズ インコーポレーテッド | 多重チャンバ真空式処理装置及び多重チャンバ真空式半導体ウェーハ処理装置 |
JP2905857B2 (ja) * | 1989-08-11 | 1999-06-14 | 東京エレクトロン株式会社 | 縦型処理装置 |
-
1990
- 1990-11-26 JP JP2317810A patent/JP2595132B2/ja not_active Expired - Lifetime
-
1991
- 1991-11-25 EP EP91310822A patent/EP0488620B1/de not_active Expired - Lifetime
- 1991-11-25 DE DE69120219T patent/DE69120219T2/de not_active Expired - Fee Related
- 1991-11-26 KR KR1019910021223A patent/KR100235917B1/ko not_active IP Right Cessation
-
1993
- 1993-10-04 US US08/131,911 patent/US5445484A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2595132B2 (ja) | 1997-03-26 |
KR920010775A (ko) | 1992-06-27 |
EP0488620A1 (de) | 1992-06-03 |
KR100235917B1 (ko) | 1999-12-15 |
US5445484A (en) | 1995-08-29 |
DE69120219T2 (de) | 1997-01-23 |
EP0488620B1 (de) | 1996-06-12 |
JPH04190840A (ja) | 1992-07-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69120219T2 (de) | System für Vakuum-Behandlung | |
DE69124230T2 (de) | Standortbestimmungssystem | |
DE69032348T2 (de) | Objektbasiertes System | |
DE69130452T2 (de) | Rauschunterdrückungssystem | |
BR9100416A (pt) | Conjunto de cateter | |
BR9101108A (pt) | Conjunto de cateter | |
BR9101763A (pt) | Conjunto de cateter | |
DE3650057T2 (de) | System für Vakuumbehandlung. | |
NO913998D0 (no) | Undervanns-produksjonssystem | |
DE69129987D1 (de) | Feuchtigkeitsfreies sog-verfahren | |
DE69115991D1 (de) | Förderbandsystem | |
DE59306704D1 (de) | Vakuumbearbeitungsanlage | |
DE69032349D1 (de) | Objektbasiertes System | |
NO971007D0 (no) | Vakuumsystem | |
KR930702093A (ko) | 가공 장치 시스템 | |
DE69123796D1 (de) | Abzweigfilter | |
BR9101106A (pt) | Conjunto de cateter | |
DE69132733T2 (de) | Unterbrechungsverarbeitungssystem | |
FI910027A0 (fi) | Parannettu alipaineviemärijärjestelmä | |
DE69017284T2 (de) | Vakuumsystem. | |
FI930396A (fi) | Bildlika system | |
DK163725C (da) | Evakueringssystem | |
FI93920B (fi) | Liuoksen kaksoisannostelujärjestelmä | |
SE9002164D0 (sv) | Styrdon enligt system pa | |
IT9030643V0 (it) | Impianto per mitilicoltura |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |