DE69115589D1 - Mehrkanal-Ladungsteilchen-Analysator - Google Patents

Mehrkanal-Ladungsteilchen-Analysator

Info

Publication number
DE69115589D1
DE69115589D1 DE69115589T DE69115589T DE69115589D1 DE 69115589 D1 DE69115589 D1 DE 69115589D1 DE 69115589 T DE69115589 T DE 69115589T DE 69115589 T DE69115589 T DE 69115589T DE 69115589 D1 DE69115589 D1 DE 69115589D1
Authority
DE
Germany
Prior art keywords
charged particle
particle analyzer
channel charged
channel
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69115589T
Other languages
English (en)
Other versions
DE69115589T2 (de
Inventor
Robert L Gerlach
Ronald E Negri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Revera Inc
Original Assignee
Physical Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physical Electronics Inc filed Critical Physical Electronics Inc
Publication of DE69115589D1 publication Critical patent/DE69115589D1/de
Application granted granted Critical
Publication of DE69115589T2 publication Critical patent/DE69115589T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69115589T 1990-08-09 1991-07-29 Mehrkanal-Ladungsteilchen-Analysator Expired - Fee Related DE69115589T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/565,289 US5032724A (en) 1990-08-09 1990-08-09 Multichannel charged-particle analyzer

Publications (2)

Publication Number Publication Date
DE69115589D1 true DE69115589D1 (de) 1996-02-01
DE69115589T2 DE69115589T2 (de) 1996-05-02

Family

ID=24257954

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69115589T Expired - Fee Related DE69115589T2 (de) 1990-08-09 1991-07-29 Mehrkanal-Ladungsteilchen-Analysator

Country Status (4)

Country Link
US (1) US5032724A (de)
EP (1) EP0470478B1 (de)
JP (1) JP3140094B2 (de)
DE (1) DE69115589T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9220097D0 (en) * 1992-09-23 1992-11-04 Univ York Electron spectrometers
US5900667A (en) * 1996-10-04 1999-05-04 Etec Systems, Inc. Operating a solid state particle detector within a magnetic deflection field so as to minimize eddy currents
US6184523B1 (en) * 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
JP4763191B2 (ja) 1999-06-16 2011-08-31 シマヅ リサーチ ラボラトリー（ヨーロッパ）リミティド 荷電粒子エネルギ分析装置
EP1063677B1 (de) * 1999-06-23 2005-03-16 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Ladungsträgerteilchenstrahlvorrichtung
GB0225791D0 (en) * 2002-11-05 2002-12-11 Kratos Analytical Ltd Charged particle spectrometer and detector therefor
US7561438B1 (en) 2004-12-22 2009-07-14 Revera Incorporated Electronic device incorporating a multilayered capacitor formed on a printed circuit board
JP4576272B2 (ja) * 2005-03-31 2010-11-04 株式会社日立ハイテクノロジーズ 電子顕微鏡
WO2007053843A2 (en) * 2005-11-01 2007-05-10 The Regents Of The University Of Colorado Multichannel energy analyzer for charged particles
US8101909B2 (en) * 2008-01-25 2012-01-24 Ionwerks, Inc. Time-of-flight mass spectrometry of surfaces
US8071942B2 (en) 2009-03-20 2011-12-06 Physical Electronics USA, Inc. Sample holder apparatus to reduce energy of electrons in an analyzer system and method
KR101711145B1 (ko) * 2010-09-03 2017-03-13 삼성전자주식회사 휴대용 4중극자 이온트랩 질량분석기
WO2012148358A1 (en) * 2011-04-28 2012-11-01 National University Of Singapore A parallel radial mirror analyser for scanning microscopes
DE102013006535A1 (de) * 2013-04-15 2014-10-30 Carl Zeiss Microscopy Gmbh Raster-Partikelstrahlmikroskop mit energiefilterndem Detektorsystem

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3609352A (en) * 1970-05-18 1971-09-28 Gen Electric Secondary electron energy analyzing apparatus
GB1387173A (en) * 1971-03-22 1975-03-12 Hitachi Ltd Energy analyzer of the coaxial cylindrical type
US3699331A (en) * 1971-08-27 1972-10-17 Paul W Palmberg Double pass coaxial cylinder analyzer with retarding spherical grids
US3742214A (en) * 1971-10-18 1973-06-26 Varian Associates Apparatus for performing chemical analysis by electron spectroscopy
US4100409A (en) * 1973-02-02 1978-07-11 U.S. Phillips Corporation Device for analyzing a surface layer by means of ion scattering
NL7306378A (de) * 1973-05-08 1974-11-12
US4107526A (en) * 1976-03-22 1978-08-15 Minnesota Mining And Manufacturing Company Ion scattering spectrometer with modified bias
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy

Also Published As

Publication number Publication date
JP3140094B2 (ja) 2001-03-05
EP0470478A3 (en) 1993-05-12
EP0470478A2 (de) 1992-02-12
US5032724A (en) 1991-07-16
DE69115589T2 (de) 1996-05-02
EP0470478B1 (de) 1995-12-20
JPH04233152A (ja) 1992-08-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HIGH VOLTAGE ENGINEERING CORP., WAKEFIELD, MASS.,

8327 Change in the person/name/address of the patent owner

Owner name: REVERA INC. (N.D,GES.D.STAATES DELAWARE), CHANHASS

8339 Ceased/non-payment of the annual fee