JP4576272B2 - 電子顕微鏡 - Google Patents
電子顕微鏡 Download PDFInfo
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- JP4576272B2 JP4576272B2 JP2005100479A JP2005100479A JP4576272B2 JP 4576272 B2 JP4576272 B2 JP 4576272B2 JP 2005100479 A JP2005100479 A JP 2005100479A JP 2005100479 A JP2005100479 A JP 2005100479A JP 4576272 B2 JP4576272 B2 JP 4576272B2
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17内を通過した二次電子2乃至3は走査偏向器21,22を通過し、エネルギーフィルタ40に入射する。
41と42にはリターディング電圧25とフィルタ電源45の重畳したフィルタ電圧を印加している。
Claims (2)
- 電子ビームを試料に照射することによって、当該試料から放出される電子をエネルギー弁別するエネルギーフィルタを備えた電子顕微鏡において、
前記エネルギーフィルタは、径の異なる少なくとも2つの円筒状電極を含み、当該2つの円筒状電極は前記電子ビームの光軸方向に延びる電極であり、当該2つの円筒状電極は、当該電子ビーム光軸に対して軸対称に配置されると共に、当該電子ビーム光軸方向を高さ方向としたときに、当該2つの円筒状電極の一方の少なくとも一部が、他方の円筒状電極の少なくとも一部と同じ高さに位置付けられ、前記2つの円筒状電極には、負電圧が印加されることを特徴とする電子顕微鏡。 - 請求項1において、
前記2つの円筒状電極は、前記高さ方向において、接地電位が印加された2つの電極間に配置されることを特徴とする電子顕微鏡。
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JP2005100479A JP4576272B2 (ja) | 2005-03-31 | 2005-03-31 | 電子顕微鏡 |
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JP2005100479A JP4576272B2 (ja) | 2005-03-31 | 2005-03-31 | 電子顕微鏡 |
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JP2006286207A JP2006286207A (ja) | 2006-10-19 |
JP4576272B2 true JP4576272B2 (ja) | 2010-11-04 |
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JP2005100479A Active JP4576272B2 (ja) | 2005-03-31 | 2005-03-31 | 電子顕微鏡 |
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Families Citing this family (1)
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JP4977509B2 (ja) | 2007-03-26 | 2012-07-18 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04233152A (ja) * | 1990-08-09 | 1992-08-21 | Perkin Elmer Corp:The | 荷電粒子エネルギ分析器 |
WO1999046798A1 (fr) * | 1998-03-09 | 1999-09-16 | Hitachi, Ltd. | Microscope electronique a balayage |
WO2000004569A1 (en) * | 1998-07-14 | 2000-01-27 | Board Of Regents Of The University Of Nebraska | High resolution charged particle-energy detecting mirror analyzer system and method of use |
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2005
- 2005-03-31 JP JP2005100479A patent/JP4576272B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04233152A (ja) * | 1990-08-09 | 1992-08-21 | Perkin Elmer Corp:The | 荷電粒子エネルギ分析器 |
WO1999046798A1 (fr) * | 1998-03-09 | 1999-09-16 | Hitachi, Ltd. | Microscope electronique a balayage |
WO2000004569A1 (en) * | 1998-07-14 | 2000-01-27 | Board Of Regents Of The University Of Nebraska | High resolution charged particle-energy detecting mirror analyzer system and method of use |
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JP2006286207A (ja) | 2006-10-19 |
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