NL7306378A - - Google Patents

Info

Publication number
NL7306378A
NL7306378A NL7306378A NL7306378A NL7306378A NL 7306378 A NL7306378 A NL 7306378A NL 7306378 A NL7306378 A NL 7306378A NL 7306378 A NL7306378 A NL 7306378A NL 7306378 A NL7306378 A NL 7306378A
Authority
NL
Netherlands
Application number
NL7306378A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7306378A priority Critical patent/NL7306378A/xx
Priority to DE2420275A priority patent/DE2420275C3/de
Priority to US466220A priority patent/US3920990A/en
Priority to GB1958774A priority patent/GB1470847A/en
Priority to JP4930274A priority patent/JPS5514504B2/ja
Priority to FR7415712A priority patent/FR2229064B1/fr
Publication of NL7306378A publication Critical patent/NL7306378A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
NL7306378A 1973-05-08 1973-05-08 NL7306378A (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL7306378A NL7306378A (de) 1973-05-08 1973-05-08
DE2420275A DE2420275C3 (de) 1973-05-08 1974-04-26 Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung
US466220A US3920990A (en) 1973-05-08 1974-05-02 Device for analysing a surface layer by means of ion scattering
GB1958774A GB1470847A (en) 1973-05-08 1974-05-03 Surface-layer analysis by ion scattering
JP4930274A JPS5514504B2 (de) 1973-05-08 1974-05-04
FR7415712A FR2229064B1 (de) 1973-05-08 1974-05-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7306378A NL7306378A (de) 1973-05-08 1973-05-08

Publications (1)

Publication Number Publication Date
NL7306378A true NL7306378A (de) 1974-11-12

Family

ID=19818814

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7306378A NL7306378A (de) 1973-05-08 1973-05-08

Country Status (6)

Country Link
US (1) US3920990A (de)
JP (1) JPS5514504B2 (de)
DE (1) DE2420275C3 (de)
FR (1) FR2229064B1 (de)
GB (1) GB1470847A (de)
NL (1) NL7306378A (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
DE3041914A1 (de) * 1980-11-06 1982-06-16 Vdo Adolf Schindling Ag, 6000 Frankfurt Einrichtung zur kapazitiven fuellstandsmessung
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer
US4588890A (en) * 1984-12-31 1986-05-13 International Business Machines Corporation Apparatus and method for composite image formation by scanning electron beam
US4633084A (en) * 1985-01-16 1986-12-30 The United States Of America As Represented By The United States Department Of Energy High efficiency direct detection of ions from resonance ionization of sputtered atoms
DE3803424C2 (de) * 1988-02-05 1995-05-18 Gsf Forschungszentrum Umwelt Verfahren zur quantitativen, tiefendifferentiellen Analyse fester Proben
US5095208A (en) * 1988-06-24 1992-03-10 Hitachi, Ltd. Charged particle generating device and focusing lens therefor
JPH0299828A (ja) * 1988-10-06 1990-04-11 Iseki & Co Ltd 流量測定器
US4941980A (en) * 1989-02-17 1990-07-17 Opal, Inc. System for measuring a topographical feature on a specimen
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
ATE218002T1 (de) * 1994-12-08 2002-06-15 Univ California Verfahren und vorrichtung zur verbesserung des sprachverständnisses bei sprachbehinderten personen
DE102004014582B4 (de) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ionenoptische Phasenvolumenkomprimierung
GB201011716D0 (en) 2010-07-13 2010-08-25 Shimadzu Corp Charged particle energy analysers and methods of operating charged particle energy analysers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy
US3735128A (en) * 1971-08-27 1973-05-22 Physical Electronics Ind Inc Field termination plate

Also Published As

Publication number Publication date
DE2420275B2 (de) 1980-09-25
DE2420275A1 (de) 1974-11-28
JPS5514504B2 (de) 1980-04-16
FR2229064A1 (de) 1974-12-06
GB1470847A (en) 1977-04-21
FR2229064B1 (de) 1977-06-24
DE2420275C3 (de) 1981-07-09
JPS5028393A (de) 1975-03-22
US3920990A (en) 1975-11-18

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Legal Events

Date Code Title Description
BV The patent application has lapsed