DE69114256D1 - Verfahren und Apparat zur optischen Messung. - Google Patents

Verfahren und Apparat zur optischen Messung.

Info

Publication number
DE69114256D1
DE69114256D1 DE69114256T DE69114256T DE69114256D1 DE 69114256 D1 DE69114256 D1 DE 69114256D1 DE 69114256 T DE69114256 T DE 69114256T DE 69114256 T DE69114256 T DE 69114256T DE 69114256 D1 DE69114256 D1 DE 69114256D1
Authority
DE
Germany
Prior art keywords
optical measurement
measurement
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69114256T
Other languages
English (en)
Other versions
DE69114256T2 (de
Inventor
George T Harvey
Michael S Heutmaker
Mark G Kuzyk
Kenneth David Singer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Publication of DE69114256D1 publication Critical patent/DE69114256D1/de
Application granted granted Critical
Publication of DE69114256T2 publication Critical patent/DE69114256T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Lasers (AREA)
DE69114256T 1991-01-02 1991-12-10 Verfahren und Apparat zur optischen Messung. Expired - Fee Related DE69114256T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/636,782 US5126660A (en) 1991-01-02 1991-01-02 Optical probing method and apparatus

Publications (2)

Publication Number Publication Date
DE69114256D1 true DE69114256D1 (de) 1995-12-07
DE69114256T2 DE69114256T2 (de) 1996-05-30

Family

ID=24553300

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69114256T Expired - Fee Related DE69114256T2 (de) 1991-01-02 1991-12-10 Verfahren und Apparat zur optischen Messung.

Country Status (4)

Country Link
US (1) US5126660A (de)
EP (1) EP0493906B1 (de)
JP (1) JPH07104397B2 (de)
DE (1) DE69114256T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102295A (ja) * 1992-07-28 1994-04-15 Hewlett Packard Co <Hp> 非接触型プローブおよび非接触電圧測定装置
US5844249A (en) * 1993-12-24 1998-12-01 Hoechst Aktiengesellschaft Apparatus for detecting defects of wires on a wiring board wherein optical sensor includes a film of polymer non-linear optical material
US5508627A (en) * 1994-05-11 1996-04-16 Patterson; Joseph M. Photon assisted sub-tunneling electrical probe, probe tip, and probing method
US5666062A (en) * 1994-09-19 1997-09-09 Hamamatsu Photonics K.K. Voltage measuring using electro-optic material's change in refractive index
JP3352543B2 (ja) * 1994-09-29 2002-12-03 浜松ホトニクス株式会社 電圧測定装置
US5663657A (en) * 1994-09-26 1997-09-02 University Of South Florida Determining long minority carrier diffusion lengths
US6169408B1 (en) * 1996-09-30 2001-01-02 Motorola, Inc. Method and apparatus for testing an integrated circuit with a pulsed radiation beam
US6037797A (en) * 1997-07-11 2000-03-14 Semiconductor Diagnostics, Inc. Measurement of the interface trap charge in an oxide semiconductor layer interface
JPH11108962A (ja) * 1997-10-06 1999-04-23 Ando Electric Co Ltd 電気光学サンプリング装置
US6343369B1 (en) * 1998-09-15 2002-01-29 Microconnect, Inc. Methods for making contact device for making connection to an electronic circuit device and methods of using the same
US6512384B1 (en) 2000-06-29 2003-01-28 Semiconductor Diagnostics, Inc. Method for fast and accurate determination of the minority carrier diffusion length from simultaneously measured surface photovoltages
AU2003272829A1 (en) 2002-10-03 2004-04-23 Applied Materials Israel, Ltd. System and method for defect localization on electrical test structures
JP5894745B2 (ja) 2011-05-31 2016-03-30 浜松ホトニクス株式会社 集積回路検査装置
JP6194380B2 (ja) * 2016-02-29 2017-09-06 浜松ホトニクス株式会社 集積回路検査装置
KR102433416B1 (ko) * 2017-11-16 2022-08-19 한국전자통신연구원 광 가변 감쇠기

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4105915A (en) * 1976-08-19 1978-08-08 Rca Corporation Deflection-type modulator of laser beam for communications
JPS5438036A (en) * 1977-08-27 1979-03-22 Jiyunichirou Aono Nonnskid mat for automobile
JPS5483854A (en) * 1977-12-16 1979-07-04 Canon Inc Measuring device
IT1161826B (it) * 1983-05-03 1987-03-18 Anic Spa Metodo per la terminazione di polimeri viventi e composti adatti allo scopo
US4681449A (en) * 1984-09-07 1987-07-21 Stanford University High speed testing of electronic circuits by electro-optic sampling
US4938571A (en) * 1987-06-18 1990-07-03 Cogan Stuart F Solid state electrochromic light modulator
JPS6446659A (en) * 1987-08-17 1989-02-21 Hamamatsu Photonics Kk Voltage detector
JPS6473634A (en) * 1987-09-14 1989-03-17 Nec Corp Analyzing method for operation of integrated circuit
US4896206A (en) * 1987-12-14 1990-01-23 Electro Science Industries, Inc. Video detection system
US4875006A (en) * 1988-09-01 1989-10-17 Photon Dynamics, Inc. Ultra-high-speed digital test system using electro-optic signal sampling

Also Published As

Publication number Publication date
JPH0545424A (ja) 1993-02-23
EP0493906B1 (de) 1995-11-02
EP0493906A1 (de) 1992-07-08
US5126660A (en) 1992-06-30
DE69114256T2 (de) 1996-05-30
JPH07104397B2 (ja) 1995-11-13

Similar Documents

Publication Publication Date Title
DE69637937D1 (de) Verfahren und Apparat zur Messung von Musterdimensionen
DE69133108D1 (de) Apparat zur dreidimensionalen Messung
DE69208005D1 (de) Verfahren und Vorrichtung für Abstandsmessung
DE69528647D1 (de) Apparat zur topometrischen erfassung eines optischen elementes
DE69032834D1 (de) Verfahren und Apparat für Farbbildsignalbewertung
DE69117942D1 (de) Verfahren und vorrichtung zur optischen messung der konzentration eines analyten
DE69724711D1 (de) Verfahren und Vorrichtung zur optischen Inspektion
DE69112320D1 (de) Verfahren und Vorrichtung zur optischen Abtastung.
DE69228354D1 (de) Verfahren und Apparat zur Entfärbung, und Bildherstellungsapparat
DE69131006D1 (de) Gerät und Verfahren zur optischen Zeichenerkennung
DE59007526D1 (de) Verfahren und system zur messdatenerfassung und -auswertung.
DE68908879D1 (de) Verfahren und vorrichtung für optische messungen.
DE3852108D1 (de) Vorrichtung und verfahren zur optischen messung der konzentration an material.
DE69722876D1 (de) Vorrichtung und Verfahren zur optischen Profilmessung
DE69009109D1 (de) Vorrichtung und Verfahren zur Lichtmessung.
DE69020411D1 (de) Verfahren und Gerät für augenoptische Messungen.
DE68903572D1 (de) Verfahren und vorrichtung zum kalibrieren eines messsystems von optischen merkmalen.
DE69124843D1 (de) Verfahren und Vorrichtung zur Messung von Radwinkeln
DE69114256D1 (de) Verfahren und Apparat zur optischen Messung.
DE3675979D1 (de) Verfahren und vorrichtung zur optischen spannungsmessung.
DE69112090D1 (de) Verfahren und Vorrichtung zur Messung von Musterdimensionen.
DE68925663D1 (de) Vorrichtung und Verfahren zur optischen Korrelation
DE69222382D1 (de) Verfahren und Vorrichtung zur Messung von Lageabweichungen
DE69020410D1 (de) Verfahren und Gerät für augenoptische Messungen.
DE69820523D1 (de) Apparat zur Messung eines optischen Transmissionsmerkmals und zugehörgies Kalibrierverfahren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee