DE69110698D1 - Schieberanlage. - Google Patents

Schieberanlage.

Info

Publication number
DE69110698D1
DE69110698D1 DE69110698T DE69110698T DE69110698D1 DE 69110698 D1 DE69110698 D1 DE 69110698D1 DE 69110698 T DE69110698 T DE 69110698T DE 69110698 T DE69110698 T DE 69110698T DE 69110698 D1 DE69110698 D1 DE 69110698D1
Authority
DE
Germany
Prior art keywords
gate valve
valve system
gate
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69110698T
Other languages
English (en)
Other versions
DE69110698T2 (de
Inventor
Yutaka Tanaka
Kunitaka Ozawa
Takao Kariya
Shunichi Uzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69110698D1 publication Critical patent/DE69110698D1/de
Application granted granted Critical
Publication of DE69110698T2 publication Critical patent/DE69110698T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
DE69110698T 1990-02-09 1991-02-08 Schieberanlage. Expired - Fee Related DE69110698T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2028494A JPH03234979A (ja) 1990-02-09 1990-02-09 仕切り弁

Publications (2)

Publication Number Publication Date
DE69110698D1 true DE69110698D1 (de) 1995-08-03
DE69110698T2 DE69110698T2 (de) 1995-12-21

Family

ID=12250227

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69110698T Expired - Fee Related DE69110698T2 (de) 1990-02-09 1991-02-08 Schieberanlage.

Country Status (4)

Country Link
US (1) US5566922A (de)
EP (1) EP0441646B1 (de)
JP (1) JPH03234979A (de)
DE (1) DE69110698T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4418019A1 (de) 1994-05-24 1995-11-30 Vse Vakuumtechn Gmbh Ventilmechanik für ein Vakuumventil
US5934646A (en) * 1997-04-04 1999-08-10 Nok Corporation Gate valve and cylinder apparatus
CH692821A5 (de) * 1998-02-04 2002-11-15 Unaxis Trading Ag Vakuumventilplatte und Vakuumkammeranordnung mit einer solchen.
DE19810212A1 (de) * 1998-03-10 1999-09-16 Bosch Gmbh Robert Ventileinrichtung
US6079693A (en) * 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
US6347918B1 (en) 1999-01-27 2002-02-19 Applied Materials, Inc. Inflatable slit/gate valve
JP2001342319A (ja) * 2000-06-01 2001-12-14 Matsushita Electric Ind Co Ltd フッ素ゴム組成物、定着部材、定着方法、及び定着装置
US7004453B1 (en) * 2001-04-25 2006-02-28 Mykrolis Corporation Pendulum valve with a full range of position control
JP3887221B2 (ja) * 2001-12-06 2007-02-28 石川島プラントエンジニアリング株式会社 高温ガス用スライド弁
JP4028255B2 (ja) * 2002-02-26 2007-12-26 ソニー株式会社 電子ビーム照射装置及び電子ビーム照射方法
ITTO20020318A1 (it) * 2002-04-11 2003-10-13 Elbi Int Spa Dispositivo valvolare di controllo,particolarmente per un apparecchiorefrigeratore.
JP3837391B2 (ja) * 2003-03-24 2006-10-25 Ｓｍｃ株式会社 ゲートバルブ
CN100408902C (zh) 2003-05-13 2008-08-06 应用材料股份有限公司 密封一处理室一开口的方法与装置
US7682454B2 (en) * 2003-08-07 2010-03-23 Sundew Technologies, Llc Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems
DE102006005889A1 (de) * 2006-02-09 2007-08-16 Krauss-Maffei Kunststofftechnik Gmbh Dreh- oder Querschieberverschluß
JP5080169B2 (ja) * 2006-09-20 2012-11-21 バット ホールディング アーゲー 真空バルブ
DE102008049353A1 (de) * 2008-09-29 2010-04-08 Vat Holding Ag Vakuumventil
TWI656293B (zh) * 2014-04-25 2019-04-11 瑞士商Ｖａｔ控股股份有限公司 閥
JP6584829B2 (ja) * 2014-07-04 2019-10-02 バット ホールディング アーゲー バルブ
JP6778206B2 (ja) * 2015-03-27 2020-10-28 バット ホールディング アーゲー 真空バルブ
DE102015106916A1 (de) * 2015-05-04 2016-11-10 M. Braun Inertgas-Systeme Gmbh Transferventil
CN108884951B (zh) * 2016-04-08 2021-04-16 Vat控股公司 封闭设备
EP3421850A1 (de) * 2017-06-30 2019-01-02 VAT Holding AG Vakuumventil mit positionssensor
US10563774B2 (en) * 2017-06-30 2020-02-18 Intelligent Agricultural Solutions Llc Sectional control device
AT16375U1 (de) * 2018-01-17 2019-07-15 Vat Holding Ag Ventil
WO2020225844A1 (ja) * 2019-05-07 2020-11-12 入江工研株式会社 ゲートバルブ
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
DE102019133555A1 (de) * 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
JP7479587B2 (ja) * 2020-02-28 2024-05-09 Smc株式会社 ゲートバルブ
KR102574233B1 (ko) * 2023-03-14 2023-09-04 주식회사 에스알티 U motion 게이트밸브

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2666539A (en) * 1952-09-05 1954-01-19 Robert T Avery Rapid operation air lock for closed vessels
US3170668A (en) * 1962-11-13 1965-02-23 Sun Oil Co Blanking valve having threaded bolt means for increasing sealing pressure
FR1353573A (fr) * 1963-01-15 1964-02-28 Comp Generale Electricite Vanne d'étanchéité à passage direct
US3789875A (en) * 1972-05-15 1974-02-05 Gray Tool Co Fluid pressure actuated valve operator
US4062515A (en) * 1976-05-13 1977-12-13 The United States Of America As Represented By The United States Energy Research And Development Administration Compact gate valve
US4313815A (en) * 1978-04-07 1982-02-02 Varian Associates, Inc. Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor
US4550742A (en) * 1984-01-23 1985-11-05 Stearns Stanley D Variable tensioning system for shear seal valves
EP0225942A1 (de) * 1985-12-03 1987-06-24 Charles David Johnson Ventil
JPH01225118A (ja) * 1988-03-04 1989-09-08 Canon Inc Ｘ線露光装置

Also Published As

Publication number Publication date
JPH03234979A (ja) 1991-10-18
EP0441646A1 (de) 1991-08-14
EP0441646B1 (de) 1995-06-28
US5566922A (en) 1996-10-22
DE69110698T2 (de) 1995-12-21

Similar Documents

Publication Publication Date Title
DE69110698D1 (de) Schieberanlage.
DE69108850D1 (de) Dreiwegeventil.
DE59003358D1 (de) Ventilbaugruppe.
DE59103573D1 (de) Mehrwegeventil.
DE59101297D1 (de) Rückluftsperre.
MX9202046A (es) Valvula de desviacion.
DE59104127D1 (de) Rückluftsperre.
DE59106711D1 (de) Absperrklappe.
FR2669988B1 (fr) Soupape thermostatique.
DE69110118D1 (de) Regelventil.
DE59300859D1 (de) Ventiloberteil.
DE69009608D1 (de) Absperrschieber.
DE59105944D1 (de) Ventil.
FR2672099B1 (fr) Vanne.
DE69010010T2 (de) Eilabsenkventil.
DE69110895D1 (de) Ventilmechanismus.
DE69100395T2 (de) Ventil.
DE59300382D1 (de) Ventilblock.
NO911108L (no) Ventilkonstruksjon.
DE69007066T2 (de) Ventil-Vorrichtung.
NO912895D0 (no) Stengeventil.
DE59103955D1 (de) Ventil.
NO910523D0 (no) Ventilanordning.
DE69103613D1 (de) Ventilstössel.
ES1020431Y (es) Valvula de compuerta mejorada.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee