DE69110394T2 - Verfahren zum Verringen von Teilchenkontamination beim Zerstäuben. - Google Patents

Verfahren zum Verringen von Teilchenkontamination beim Zerstäuben.

Info

Publication number
DE69110394T2
DE69110394T2 DE69110394T DE69110394T DE69110394T2 DE 69110394 T2 DE69110394 T2 DE 69110394T2 DE 69110394 T DE69110394 T DE 69110394T DE 69110394 T DE69110394 T DE 69110394T DE 69110394 T2 DE69110394 T2 DE 69110394T2
Authority
DE
Germany
Prior art keywords
contamination during
particle contamination
reducing particle
during atomization
atomization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69110394T
Other languages
English (en)
Other versions
DE69110394D1 (de
Inventor
Jan Visser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Application granted granted Critical
Publication of DE69110394D1 publication Critical patent/DE69110394D1/de
Publication of DE69110394T2 publication Critical patent/DE69110394T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3492—Variation of parameters during sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
DE69110394T 1990-10-08 1991-09-30 Verfahren zum Verringen von Teilchenkontamination beim Zerstäuben. Expired - Lifetime DE69110394T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL9002176A NL9002176A (nl) 1990-10-08 1990-10-08 Werkwijze voor het verminderen van deeltjescontaminatie tijdens sputteren en een sputterinrichting voor gebruik van een dergelijke werkwijze.

Publications (2)

Publication Number Publication Date
DE69110394D1 DE69110394D1 (de) 1995-07-20
DE69110394T2 true DE69110394T2 (de) 1996-02-08

Family

ID=19857779

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69110394T Expired - Lifetime DE69110394T2 (de) 1990-10-08 1991-09-30 Verfahren zum Verringen von Teilchenkontamination beim Zerstäuben.

Country Status (5)

Country Link
US (1) US6059938A (de)
EP (1) EP0480504B1 (de)
JP (1) JP3659653B2 (de)
DE (1) DE69110394T2 (de)
NL (1) NL9002176A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0954620A4 (de) * 1997-01-16 2002-01-02 Bottomfield Layne F Dampfphasenabscheidungskomponente und entsprechende verfahren
US6645357B2 (en) 2001-11-05 2003-11-11 Applied Materials, Inc. Mesh shield in a sputter reactor
US6863930B2 (en) 2002-09-06 2005-03-08 Delphi Technologies, Inc. Refractory metal mask and methods for coating an article and forming a sensor
US20090194414A1 (en) * 2008-01-31 2009-08-06 Nolander Ira G Modified sputtering target and deposition components, methods of production and uses thereof
CN103132032A (zh) * 2013-03-15 2013-06-05 上海和辉光电有限公司 一种用于减少ito溅射损伤衬底的溅射设备及其方法
CN112813389A (zh) * 2019-11-18 2021-05-18 河北召飞科技服务有限公司 一种多弧离子镀膜过程中减少大液滴的方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3528906A (en) * 1967-06-05 1970-09-15 Texas Instruments Inc Rf sputtering method and system
US3699034A (en) * 1971-03-15 1972-10-17 Sperry Rand Corp Method for sputter depositing dielectric materials
US3864239A (en) * 1974-04-22 1975-02-04 Nasa Multitarget sequential sputtering apparatus
DD142568A1 (de) * 1979-03-22 1980-07-02 Harald Bilz EINRICHTUNG ZUM REAKTIVEN BESCHICHTEN MIT DEM PLASM&TRON
US4410407A (en) * 1981-12-22 1983-10-18 Raytheon Company Sputtering apparatus and methods
JPH0624345B2 (ja) * 1986-04-28 1994-03-30 日本電気株式会社 予備回線監視回路
JPH029115A (ja) * 1988-06-28 1990-01-12 Mitsubishi Electric Corp 半導体製造装置

Also Published As

Publication number Publication date
EP0480504B1 (de) 1995-06-14
US6059938A (en) 2000-05-09
JPH04288826A (ja) 1992-10-13
NL9002176A (nl) 1992-05-06
DE69110394D1 (de) 1995-07-20
JP3659653B2 (ja) 2005-06-15
EP0480504A1 (de) 1992-04-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8320 Willingness to grant licences declared (paragraph 23)