DE69109048D1 - Optisches Gerät für Weisslichtinterferometrie. - Google Patents

Optisches Gerät für Weisslichtinterferometrie.

Info

Publication number
DE69109048D1
DE69109048D1 DE69109048T DE69109048T DE69109048D1 DE 69109048 D1 DE69109048 D1 DE 69109048D1 DE 69109048 T DE69109048 T DE 69109048T DE 69109048 T DE69109048 T DE 69109048T DE 69109048 D1 DE69109048 D1 DE 69109048D1
Authority
DE
Germany
Prior art keywords
optical device
white light
light interferometry
interferometry
white
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69109048T
Other languages
English (en)
Other versions
DE69109048T2 (de
Inventor
Lucien Falco
Guy Voirin
Olivier Parriaux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Suisse dElectronique et Microtechnique SA CSEM
Original Assignee
Centre Suisse dElectronique et Microtechnique SA CSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse dElectronique et Microtechnique SA CSEM
Publication of DE69109048D1 publication Critical patent/DE69109048D1/de
Application granted granted Critical
Publication of DE69109048T2 publication Critical patent/DE69109048T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Microscoopes, Condenser (AREA)
DE69109048T 1990-10-16 1991-09-30 Optisches Gerät für Weisslichtinterferometrie. Expired - Fee Related DE69109048T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH3308/90A CH684212A5 (fr) 1990-10-16 1990-10-16 Dispositif optique à interférométrie en lumière blanche.

Publications (2)

Publication Number Publication Date
DE69109048D1 true DE69109048D1 (de) 1995-05-24
DE69109048T2 DE69109048T2 (de) 1995-12-14

Family

ID=4253182

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69109048T Expired - Fee Related DE69109048T2 (de) 1990-10-16 1991-09-30 Optisches Gerät für Weisslichtinterferometrie.

Country Status (6)

Country Link
US (1) US5270789A (de)
EP (1) EP0481918B1 (de)
JP (1) JPH04264206A (de)
AT (1) ATE121534T1 (de)
CH (1) CH684212A5 (de)
DE (1) DE69109048T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5561521A (en) * 1995-05-25 1996-10-01 Santa Barbara Research Center Two-band Fourier transform spectrometer (FTS) with dichroic Michelson mirrors
DE19544253B4 (de) * 1995-11-28 2006-06-29 Jochen Neumann Verfahren zur Dispersionskompensation bei Interferometern mit nicht symmetrisch zum Referenzstrahlengang ausgefühltem Objektstrahlengang
US6545759B1 (en) 1999-11-30 2003-04-08 Nile F. Hartman Transverse integrated optic interferometer
DE10118392A1 (de) 2001-04-13 2002-11-07 Zeiss Carl System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren
US7154659B1 (en) * 2002-04-18 2006-12-26 General Photonics Corporation Optical depolarizers and DGD generators based on optical delay
JP5141189B2 (ja) * 2007-10-31 2013-02-13 横河電機株式会社 干渉計及び波長測定装置
JPWO2012029809A1 (ja) * 2010-08-31 2013-10-31 達俊 塩田 形状測定装置
US8899115B2 (en) 2011-04-20 2014-12-02 United Technologies Corporation Method and system for locating a laser vibrometer during non-contact scanning
CN106052577B (zh) * 2016-07-12 2018-12-21 北京航天控制仪器研究所 一种光学干涉法球径球度检测仪及检测方法
US10113860B1 (en) * 2017-04-12 2018-10-30 Applejack 199, L.P. Inspecting a multilayer sample

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3936193A (en) * 1974-02-13 1976-02-03 Eocom Corporation Multiplex interferometer
GB2106736B (en) * 1981-09-03 1985-06-12 Standard Telephones Cables Ltd Optical transmission system
SU1405423A1 (ru) * 1985-11-18 1990-10-15 Институт физики АН БССР Лазерный интерферометр

Also Published As

Publication number Publication date
EP0481918A1 (de) 1992-04-22
JPH04264206A (ja) 1992-09-21
US5270789A (en) 1993-12-14
ATE121534T1 (de) 1995-05-15
CH684212A5 (fr) 1994-07-29
EP0481918B1 (de) 1995-04-19
DE69109048T2 (de) 1995-12-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee