DE69106233T2 - Verfahren zur Herstellung von gesintertem Siliciumnitridmaterial. - Google Patents

Verfahren zur Herstellung von gesintertem Siliciumnitridmaterial.

Info

Publication number
DE69106233T2
DE69106233T2 DE69106233T DE69106233T DE69106233T2 DE 69106233 T2 DE69106233 T2 DE 69106233T2 DE 69106233 T DE69106233 T DE 69106233T DE 69106233 T DE69106233 T DE 69106233T DE 69106233 T2 DE69106233 T2 DE 69106233T2
Authority
DE
Germany
Prior art keywords
production
silicon nitride
nitride material
sintered silicon
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69106233T
Other languages
English (en)
Other versions
DE69106233D1 (de
Inventor
Akira Takahashi
Keiichiro Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69106233D1 publication Critical patent/DE69106233D1/de
Application granted granted Critical
Publication of DE69106233T2 publication Critical patent/DE69106233T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69106233T 1990-06-29 1991-06-28 Verfahren zur Herstellung von gesintertem Siliciumnitridmaterial. Expired - Fee Related DE69106233T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2172928A JPH07115933B2 (ja) 1990-06-29 1990-06-29 窒化珪素焼結体の製造法

Publications (2)

Publication Number Publication Date
DE69106233D1 DE69106233D1 (de) 1995-02-09
DE69106233T2 true DE69106233T2 (de) 1995-06-01

Family

ID=15950953

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69106233T Expired - Fee Related DE69106233T2 (de) 1990-06-29 1991-06-28 Verfahren zur Herstellung von gesintertem Siliciumnitridmaterial.

Country Status (4)

Country Link
US (1) US5178809A (de)
EP (1) EP0463882B1 (de)
JP (1) JPH07115933B2 (de)
DE (1) DE69106233T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5759933A (en) * 1991-04-09 1998-06-02 Alliedsignal Inc. Gas pressure sintered silicon nitride having high strength and stress rupture resistance
US5523268A (en) * 1993-12-22 1996-06-04 Kabushiki Kaisha Toyota Chuo Kenkyusho Silicon nitride sintered body
DE19519864B4 (de) * 1994-05-31 2006-11-23 Kyocera Corp. Siliciumnitridsinterprodukt und Verfahren zu seiner Herstellung
JP2001146492A (ja) 1999-10-04 2001-05-29 Caterpillar Inc 制御された酸化による改良された耐腐食性のためのケイ素に基づくセラミック部品上の希土類シリケート塗膜
JP4685257B2 (ja) 2001-03-09 2011-05-18 日本特殊陶業株式会社 窒化珪素質焼結体及びその製造方法
KR20210144721A (ko) * 2019-03-29 2021-11-30 덴카 주식회사 질화규소 기판, 질화규소-금속 복합체, 질화규소 회로 기판 및 반도체 패키지

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4264548A (en) * 1979-12-20 1981-04-28 Ford Motor Company Method of making silicon nitride based cutting tools-I
US4457958A (en) * 1980-05-02 1984-07-03 Rockwell International Corporation Method of strengthening silicon nitride ceramics
DE3423573A1 (de) * 1984-06-27 1986-01-09 Elektroschmelzwerk Kempten GmbH, 8000 München Polykristalline sinterkoerper auf basis von siliciumnitrid und sinteradditiven
US4891342A (en) * 1985-11-20 1990-01-02 Kyocera Corporation Process for preparing a silicon nitride sintered body
US4830800A (en) * 1987-07-27 1989-05-16 The Regents Of The University Of California Method of producing a dense refractory silicon nitride (SI3 N4) compact with one or more crystalline intergranular phases
JPH02160669A (ja) * 1988-09-14 1990-06-20 Mitsubishi Gas Chem Co Inc 窒化ケイ素―炭化ケイ素複合焼結体およびその製造法
JPH0283270A (ja) * 1988-09-21 1990-03-23 Ngk Insulators Ltd セラミックス成形体のガラスカプセルｈｉｐ方法
DE69004735T2 (de) * 1989-05-10 1994-05-11 Ngk Insulators Ltd Siliciumnitrid-Sinterkörper und Verfahren zu ihrer Herstellung.

Also Published As

Publication number Publication date
JPH07115933B2 (ja) 1995-12-13
JPH0459659A (ja) 1992-02-26
EP0463882B1 (de) 1994-12-28
EP0463882A3 (en) 1992-06-10
DE69106233D1 (de) 1995-02-09
US5178809A (en) 1993-01-12
EP0463882A2 (de) 1992-01-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee