DE69104349D1 - Oberflächenmontierbarer piezokeramischer beschleunigungsmesser sowie verfahren zu seiner herstellung. - Google Patents

Oberflächenmontierbarer piezokeramischer beschleunigungsmesser sowie verfahren zu seiner herstellung.

Info

Publication number
DE69104349D1
DE69104349D1 DE69104349T DE69104349T DE69104349D1 DE 69104349 D1 DE69104349 D1 DE 69104349D1 DE 69104349 T DE69104349 T DE 69104349T DE 69104349 T DE69104349 T DE 69104349T DE 69104349 D1 DE69104349 D1 DE 69104349D1
Authority
DE
Germany
Prior art keywords
production
surface mountable
piezoceramic accelerometer
piezoceramic
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69104349T
Other languages
English (en)
Other versions
DE69104349T2 (de
Inventor
Peter M Leonhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meggitt Orange County Inc
Original Assignee
Endevco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23905436&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69104349(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Endevco Corp filed Critical Endevco Corp
Application granted granted Critical
Publication of DE69104349D1 publication Critical patent/DE69104349D1/de
Publication of DE69104349T2 publication Critical patent/DE69104349T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00Details of instruments
    • G01P1/02Housings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00Details of instruments
    • G01P1/02Housings
    • G01P1/023Housings for acceleration measuring devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Measuring Fluid Pressure (AREA)
DE69104349T 1990-02-14 1991-01-31 Oberflächenmontierbarer piezokeramischer beschleunigungsmesser sowie verfahren zu seiner herstellung. Expired - Fee Related DE69104349T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47978790A 1990-02-14 1990-02-14
PCT/US1991/000654 WO1991013364A2 (en) 1990-02-14 1991-01-31 Surface-mount piezoceramic accelerometer and method for making same

Publications (2)

Publication Number Publication Date
DE69104349D1 true DE69104349D1 (de) 1994-11-03
DE69104349T2 DE69104349T2 (de) 1995-05-24

Family

ID=23905436

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69104349T Expired - Fee Related DE69104349T2 (de) 1990-02-14 1991-01-31 Oberflächenmontierbarer piezokeramischer beschleunigungsmesser sowie verfahren zu seiner herstellung.

Country Status (5)

Country Link
US (1) US5235237A (de)
EP (1) EP0515521B1 (de)
JP (1) JP3091766B2 (de)
DE (1) DE69104349T2 (de)
WO (1) WO1991013364A2 (de)

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US5334901A (en) * 1993-04-30 1994-08-02 Alliedsignal Inc. Vibrating beam accelerometer
DE9314084U1 (de) * 1993-09-17 1994-01-05 Mannesmann Kienzle Gmbh, 78052 Villingen-Schwenningen Anordnung zum Befestigen eines mikromechanischen Sensors auf einem Träger durch Kleben
US5539270A (en) * 1993-11-19 1996-07-23 Matsushita Electric Works, Ltd. Acceleration detector
US5514927A (en) * 1994-02-28 1996-05-07 Motorola, Inc. Piezoelectric audio transducer
DE4428124B4 (de) * 1994-08-09 2005-08-18 Robert Bosch Gmbh Beschleunigungssensor
DE4439297A1 (de) * 1994-11-07 1996-05-09 Pi Ceramic Gmbh Piezoelektrischer Sensor
DE4440078A1 (de) * 1994-11-10 1996-05-15 Telefunken Microelectron Piezoelektrischer Beschleunigungsaufnehmer
US5581034A (en) * 1995-01-13 1996-12-03 Remec, Inc. Convective accelerometer and inclinometer
US5808197A (en) * 1995-01-13 1998-09-15 Remec, Inc. Vehicle information and control system
US5835077A (en) * 1995-01-13 1998-11-10 Remec, Inc., Computer control device
US5911738A (en) * 1997-07-31 1999-06-15 Medtronic, Inc. High output sensor and accelerometer implantable medical device
US5674258A (en) * 1995-03-08 1997-10-07 Medtronic, Inc. Packaged integrated accelerometer
US6043588A (en) * 1995-07-18 2000-03-28 Murata Manufacturing Co., Ltd. Piezoelectric sensor and acceleration sensor
US6976295B2 (en) 1997-07-29 2005-12-20 Seiko Epson Corporation Method of manufacturing a piezoelectric device
US6960870B2 (en) * 1997-07-29 2005-11-01 Seiko Epson Corporation Piezo-electric resonator and manufacturing method thereof
DE19745311C1 (de) * 1997-10-14 1999-07-01 Telefunken Microelectron Piezoelektrischer Biegesensor-Beschleunigungsaufnehmer
US5983722A (en) * 1997-11-12 1999-11-16 K.K. Holding Ag Piezobloc accelerometer
AUPP130498A0 (en) * 1998-01-12 1998-02-05 Griffith University Monitoring arrangement for a multi-element boom
US6101877A (en) * 1998-01-13 2000-08-15 Maytag Corporation Accelerometer mounting
JP3887137B2 (ja) * 1999-01-29 2007-02-28 セイコーインスツル株式会社 圧電振動子の製造方法
US6216537B1 (en) 1999-03-31 2001-04-17 Medtronic, Inc. Accelerometer for implantable medical device
JP2001060843A (ja) * 1999-08-23 2001-03-06 Murata Mfg Co Ltd チップ型圧電部品
EP1125137A1 (de) * 1999-08-24 2001-08-22 Koninklijke Philips Electronics N.V. Beschleunigungsaufnehmer und verfahren zu seiner herstellung
US6522914B1 (en) 2000-07-14 2003-02-18 Cardiac Pacemakers, Inc. Method and apparatuses for monitoring hemodynamic activities using an intracardiac impedance-derived parameter
ATE398837T1 (de) 2001-07-27 2008-07-15 Holmberg Gmbh & Co Kg Schwingungswandler mit piezoelektrischem element
DE10137424C2 (de) * 2001-07-27 2003-07-31 Holmberg Gmbh & Co Kg Schwingungswandler
JP2003318699A (ja) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットとその製造方法
US7092757B2 (en) 2002-07-12 2006-08-15 Cardiac Pacemakers, Inc. Minute ventilation sensor with dynamically adjusted excitation current
CA2493013C (en) 2002-07-25 2011-07-19 Boston Scientific Limited Medical device for navigation through anatomy and method of making same
US7101339B2 (en) 2002-12-13 2006-09-05 Cardiac Pacemakers, Inc. Respiration signal measurement apparatus, systems, and methods
US7001369B2 (en) 2003-03-27 2006-02-21 Scimed Life Systems, Inc. Medical device
US7200440B2 (en) 2003-07-02 2007-04-03 Cardiac Pacemakers, Inc. Cardiac cycle synchronized sampling of impedance signal
US7516660B2 (en) * 2004-05-21 2009-04-14 Met Tech, Inc. Convective accelerometer
US7259499B2 (en) * 2004-12-23 2007-08-21 Askew Andy R Piezoelectric bimorph actuator and method of manufacturing thereof
US20080072671A1 (en) * 2006-09-26 2008-03-27 Eldon Eller Leveraged shear mode accelerometers
US8556914B2 (en) 2006-12-15 2013-10-15 Boston Scientific Scimed, Inc. Medical device including structure for crossing an occlusion in a vessel
KR100856293B1 (ko) * 2007-05-04 2008-09-03 삼성전기주식회사 수정 진동자 제조방법
KR100878410B1 (ko) * 2007-07-11 2009-01-13 삼성전기주식회사 수정 진동자 제조방법
US9808595B2 (en) 2007-08-07 2017-11-07 Boston Scientific Scimed, Inc Microfabricated catheter with improved bonding structure
JP5579190B2 (ja) 2009-10-07 2014-08-27 Necトーキン株式会社 圧電式加速度センサ
JP2015034755A (ja) * 2013-08-09 2015-02-19 セイコーエプソン株式会社 センサーユニット、電子機器、および移動体
US9470806B2 (en) * 2013-08-29 2016-10-18 Pgs Geophysical As Piezoelectric accelerometer
US9901706B2 (en) 2014-04-11 2018-02-27 Boston Scientific Scimed, Inc. Catheters and catheter shafts
US11351048B2 (en) 2015-11-16 2022-06-07 Boston Scientific Scimed, Inc. Stent delivery systems with a reinforced deployment sheath
RU2621467C1 (ru) * 2016-06-30 2017-06-06 Акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" Малогабаритный датчик удара
DE102022134075A1 (de) 2022-12-20 2024-06-20 Physik Instrumente (PI) GmbH & Co KG Antriebssystem und Steuerverfahren für einen piezoelektrischen Motor

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US3047749A (en) * 1959-08-05 1962-07-31 Midland Mfg Co Inc Miniaturized piezoelectric crystal apparatus and method of making same
US3113223A (en) * 1960-07-27 1963-12-03 Space Technology Lab Inc Bender-type accelerometer
JPS5613719U (de) * 1979-07-13 1981-02-05
US4421621A (en) * 1979-07-17 1983-12-20 Kabushiki Kaisha Suwa Seikosha Quartz crystal oscillator
US4405875A (en) * 1980-07-24 1983-09-20 Kiyoshi Nagai Hermetically sealed flat-type piezo-electric oscillator assembly
US4346597A (en) * 1980-11-03 1982-08-31 United Technologies Corporation Dual range, cantilevered mass accelerometer
US4750031A (en) * 1982-06-25 1988-06-07 The United States Of America As Represented By The United States National Aeronautics And Space Administration Hermetically sealable package for hybrid solid-state electronic devices and the like
AT380934B (de) * 1983-01-13 1986-07-25 Enfo Grundlagen Forschungs Ag Elektrisch-pneumatischer signalwandler
DE3484450D1 (de) * 1983-05-30 1991-05-23 Fujitsu Ltd Piezoelektrischer resonator.
CH655423GA3 (de) * 1984-02-15 1986-04-30
EP0175508B1 (de) * 1984-09-07 1988-10-12 The Marconi Company Limited Oszillierender Kreisel
US4639631A (en) * 1985-07-01 1987-01-27 Motorola, Inc. Electrostatically sealed piezoelectric device
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
DE3539504A1 (de) * 1985-11-07 1987-05-21 Schott Glaswerke Flachgehaeuse zur hermetischen kapselung von piezoelektrischen bauelementen
US4694687A (en) * 1986-04-17 1987-09-22 Vericom Corporation Vehicle performance analyzer
US4734068A (en) * 1986-07-11 1988-03-29 The Eska Company Mounting structure for electric trolling motors
DE3819050A1 (de) * 1988-06-04 1989-12-14 Bosch Gmbh Robert Sicherheitsschaltung fuer elektrohandwerkzeug
EP0351038A1 (de) * 1988-06-10 1990-01-17 Hewlett-Packard Company Beschleunigungsmesser und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
DE69104349T2 (de) 1995-05-24
JP3091766B2 (ja) 2000-09-25
WO1991013364A2 (en) 1991-09-05
EP0515521B1 (de) 1994-09-28
US5235237A (en) 1993-08-10
WO1991013364A3 (en) 1991-10-03
EP0515521A1 (de) 1992-12-02
JPH05505236A (ja) 1993-08-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee