DE69104349D1 - Oberflächenmontierbarer piezokeramischer beschleunigungsmesser sowie verfahren zu seiner herstellung. - Google Patents
Oberflächenmontierbarer piezokeramischer beschleunigungsmesser sowie verfahren zu seiner herstellung.Info
- Publication number
- DE69104349D1 DE69104349D1 DE69104349T DE69104349T DE69104349D1 DE 69104349 D1 DE69104349 D1 DE 69104349D1 DE 69104349 T DE69104349 T DE 69104349T DE 69104349 T DE69104349 T DE 69104349T DE 69104349 D1 DE69104349 D1 DE 69104349D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- surface mountable
- piezoceramic accelerometer
- piezoceramic
- accelerometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47978790A | 1990-02-14 | 1990-02-14 | |
PCT/US1991/000654 WO1991013364A2 (en) | 1990-02-14 | 1991-01-31 | Surface-mount piezoceramic accelerometer and method for making same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69104349D1 true DE69104349D1 (de) | 1994-11-03 |
DE69104349T2 DE69104349T2 (de) | 1995-05-24 |
Family
ID=23905436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69104349T Expired - Fee Related DE69104349T2 (de) | 1990-02-14 | 1991-01-31 | Oberflächenmontierbarer piezokeramischer beschleunigungsmesser sowie verfahren zu seiner herstellung. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5235237A (de) |
EP (1) | EP0515521B1 (de) |
JP (1) | JP3091766B2 (de) |
DE (1) | DE69104349T2 (de) |
WO (1) | WO1991013364A2 (de) |
Families Citing this family (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5481184A (en) * | 1991-12-31 | 1996-01-02 | Sarcos Group | Movement actuator/sensor systems |
JP3141954B2 (ja) * | 1991-07-17 | 2001-03-07 | 株式会社ワコー | 圧電素子を用いた力・加速度・磁気のセンサ |
US5345823A (en) * | 1991-11-12 | 1994-09-13 | Texas Instruments Incorporated | Accelerometer |
US5334901A (en) * | 1993-04-30 | 1994-08-02 | Alliedsignal Inc. | Vibrating beam accelerometer |
DE9314084U1 (de) * | 1993-09-17 | 1994-01-05 | Mannesmann Kienzle Gmbh, 78052 Villingen-Schwenningen | Anordnung zum Befestigen eines mikromechanischen Sensors auf einem Träger durch Kleben |
US5539270A (en) * | 1993-11-19 | 1996-07-23 | Matsushita Electric Works, Ltd. | Acceleration detector |
US5514927A (en) * | 1994-02-28 | 1996-05-07 | Motorola, Inc. | Piezoelectric audio transducer |
DE4428124B4 (de) * | 1994-08-09 | 2005-08-18 | Robert Bosch Gmbh | Beschleunigungssensor |
DE4439297A1 (de) * | 1994-11-07 | 1996-05-09 | Pi Ceramic Gmbh | Piezoelektrischer Sensor |
DE4440078A1 (de) * | 1994-11-10 | 1996-05-15 | Telefunken Microelectron | Piezoelektrischer Beschleunigungsaufnehmer |
US5581034A (en) * | 1995-01-13 | 1996-12-03 | Remec, Inc. | Convective accelerometer and inclinometer |
US5808197A (en) * | 1995-01-13 | 1998-09-15 | Remec, Inc. | Vehicle information and control system |
US5835077A (en) * | 1995-01-13 | 1998-11-10 | Remec, Inc., | Computer control device |
US5911738A (en) * | 1997-07-31 | 1999-06-15 | Medtronic, Inc. | High output sensor and accelerometer implantable medical device |
US5674258A (en) * | 1995-03-08 | 1997-10-07 | Medtronic, Inc. | Packaged integrated accelerometer |
US6043588A (en) * | 1995-07-18 | 2000-03-28 | Murata Manufacturing Co., Ltd. | Piezoelectric sensor and acceleration sensor |
US6976295B2 (en) | 1997-07-29 | 2005-12-20 | Seiko Epson Corporation | Method of manufacturing a piezoelectric device |
US6960870B2 (en) * | 1997-07-29 | 2005-11-01 | Seiko Epson Corporation | Piezo-electric resonator and manufacturing method thereof |
DE19745311C1 (de) * | 1997-10-14 | 1999-07-01 | Telefunken Microelectron | Piezoelektrischer Biegesensor-Beschleunigungsaufnehmer |
US5983722A (en) * | 1997-11-12 | 1999-11-16 | K.K. Holding Ag | Piezobloc accelerometer |
AUPP130498A0 (en) * | 1998-01-12 | 1998-02-05 | Griffith University | Monitoring arrangement for a multi-element boom |
US6101877A (en) * | 1998-01-13 | 2000-08-15 | Maytag Corporation | Accelerometer mounting |
JP3887137B2 (ja) * | 1999-01-29 | 2007-02-28 | セイコーインスツル株式会社 | 圧電振動子の製造方法 |
US6216537B1 (en) | 1999-03-31 | 2001-04-17 | Medtronic, Inc. | Accelerometer for implantable medical device |
JP2001060843A (ja) * | 1999-08-23 | 2001-03-06 | Murata Mfg Co Ltd | チップ型圧電部品 |
EP1125137A1 (de) * | 1999-08-24 | 2001-08-22 | Koninklijke Philips Electronics N.V. | Beschleunigungsaufnehmer und verfahren zu seiner herstellung |
US6522914B1 (en) | 2000-07-14 | 2003-02-18 | Cardiac Pacemakers, Inc. | Method and apparatuses for monitoring hemodynamic activities using an intracardiac impedance-derived parameter |
ATE398837T1 (de) | 2001-07-27 | 2008-07-15 | Holmberg Gmbh & Co Kg | Schwingungswandler mit piezoelektrischem element |
DE10137424C2 (de) * | 2001-07-27 | 2003-07-31 | Holmberg Gmbh & Co Kg | Schwingungswandler |
JP2003318699A (ja) * | 2002-04-23 | 2003-11-07 | Piedekku Gijutsu Kenkyusho:Kk | 水晶ユニットとその製造方法 |
US7092757B2 (en) | 2002-07-12 | 2006-08-15 | Cardiac Pacemakers, Inc. | Minute ventilation sensor with dynamically adjusted excitation current |
CA2493013C (en) | 2002-07-25 | 2011-07-19 | Boston Scientific Limited | Medical device for navigation through anatomy and method of making same |
US7101339B2 (en) | 2002-12-13 | 2006-09-05 | Cardiac Pacemakers, Inc. | Respiration signal measurement apparatus, systems, and methods |
US7001369B2 (en) | 2003-03-27 | 2006-02-21 | Scimed Life Systems, Inc. | Medical device |
US7200440B2 (en) | 2003-07-02 | 2007-04-03 | Cardiac Pacemakers, Inc. | Cardiac cycle synchronized sampling of impedance signal |
US7516660B2 (en) * | 2004-05-21 | 2009-04-14 | Met Tech, Inc. | Convective accelerometer |
US7259499B2 (en) * | 2004-12-23 | 2007-08-21 | Askew Andy R | Piezoelectric bimorph actuator and method of manufacturing thereof |
US20080072671A1 (en) * | 2006-09-26 | 2008-03-27 | Eldon Eller | Leveraged shear mode accelerometers |
US8556914B2 (en) | 2006-12-15 | 2013-10-15 | Boston Scientific Scimed, Inc. | Medical device including structure for crossing an occlusion in a vessel |
KR100856293B1 (ko) * | 2007-05-04 | 2008-09-03 | 삼성전기주식회사 | 수정 진동자 제조방법 |
KR100878410B1 (ko) * | 2007-07-11 | 2009-01-13 | 삼성전기주식회사 | 수정 진동자 제조방법 |
US9808595B2 (en) | 2007-08-07 | 2017-11-07 | Boston Scientific Scimed, Inc | Microfabricated catheter with improved bonding structure |
JP5579190B2 (ja) | 2009-10-07 | 2014-08-27 | Necトーキン株式会社 | 圧電式加速度センサ |
JP2015034755A (ja) * | 2013-08-09 | 2015-02-19 | セイコーエプソン株式会社 | センサーユニット、電子機器、および移動体 |
US9470806B2 (en) * | 2013-08-29 | 2016-10-18 | Pgs Geophysical As | Piezoelectric accelerometer |
US9901706B2 (en) | 2014-04-11 | 2018-02-27 | Boston Scientific Scimed, Inc. | Catheters and catheter shafts |
US11351048B2 (en) | 2015-11-16 | 2022-06-07 | Boston Scientific Scimed, Inc. | Stent delivery systems with a reinforced deployment sheath |
RU2621467C1 (ru) * | 2016-06-30 | 2017-06-06 | Акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" | Малогабаритный датчик удара |
DE102022134075A1 (de) | 2022-12-20 | 2024-06-20 | Physik Instrumente (PI) GmbH & Co KG | Antriebssystem und Steuerverfahren für einen piezoelektrischen Motor |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3047749A (en) * | 1959-08-05 | 1962-07-31 | Midland Mfg Co Inc | Miniaturized piezoelectric crystal apparatus and method of making same |
US3113223A (en) * | 1960-07-27 | 1963-12-03 | Space Technology Lab Inc | Bender-type accelerometer |
JPS5613719U (de) * | 1979-07-13 | 1981-02-05 | ||
US4421621A (en) * | 1979-07-17 | 1983-12-20 | Kabushiki Kaisha Suwa Seikosha | Quartz crystal oscillator |
US4405875A (en) * | 1980-07-24 | 1983-09-20 | Kiyoshi Nagai | Hermetically sealed flat-type piezo-electric oscillator assembly |
US4346597A (en) * | 1980-11-03 | 1982-08-31 | United Technologies Corporation | Dual range, cantilevered mass accelerometer |
US4750031A (en) * | 1982-06-25 | 1988-06-07 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | Hermetically sealable package for hybrid solid-state electronic devices and the like |
AT380934B (de) * | 1983-01-13 | 1986-07-25 | Enfo Grundlagen Forschungs Ag | Elektrisch-pneumatischer signalwandler |
DE3484450D1 (de) * | 1983-05-30 | 1991-05-23 | Fujitsu Ltd | Piezoelektrischer resonator. |
CH655423GA3 (de) * | 1984-02-15 | 1986-04-30 | ||
EP0175508B1 (de) * | 1984-09-07 | 1988-10-12 | The Marconi Company Limited | Oszillierender Kreisel |
US4639631A (en) * | 1985-07-01 | 1987-01-27 | Motorola, Inc. | Electrostatically sealed piezoelectric device |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
DE3539504A1 (de) * | 1985-11-07 | 1987-05-21 | Schott Glaswerke | Flachgehaeuse zur hermetischen kapselung von piezoelektrischen bauelementen |
US4694687A (en) * | 1986-04-17 | 1987-09-22 | Vericom Corporation | Vehicle performance analyzer |
US4734068A (en) * | 1986-07-11 | 1988-03-29 | The Eska Company | Mounting structure for electric trolling motors |
DE3819050A1 (de) * | 1988-06-04 | 1989-12-14 | Bosch Gmbh Robert | Sicherheitsschaltung fuer elektrohandwerkzeug |
EP0351038A1 (de) * | 1988-06-10 | 1990-01-17 | Hewlett-Packard Company | Beschleunigungsmesser und Verfahren zu seiner Herstellung |
-
1991
- 1991-01-31 DE DE69104349T patent/DE69104349T2/de not_active Expired - Fee Related
- 1991-01-31 WO PCT/US1991/000654 patent/WO1991013364A2/en active IP Right Grant
- 1991-01-31 JP JP03504681A patent/JP3091766B2/ja not_active Expired - Lifetime
- 1991-01-31 EP EP91904876A patent/EP0515521B1/de not_active Expired - Lifetime
- 1991-12-04 US US07/803,701 patent/US5235237A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69104349T2 (de) | 1995-05-24 |
JP3091766B2 (ja) | 2000-09-25 |
WO1991013364A2 (en) | 1991-09-05 |
EP0515521B1 (de) | 1994-09-28 |
US5235237A (en) | 1993-08-10 |
WO1991013364A3 (en) | 1991-10-03 |
EP0515521A1 (de) | 1992-12-02 |
JPH05505236A (ja) | 1993-08-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |