DE3484450D1 - Piezoelektrischer resonator. - Google Patents

Piezoelektrischer resonator.

Info

Publication number
DE3484450D1
DE3484450D1 DE8484303505T DE3484450T DE3484450D1 DE 3484450 D1 DE3484450 D1 DE 3484450D1 DE 8484303505 T DE8484303505 T DE 8484303505T DE 3484450 T DE3484450 T DE 3484450T DE 3484450 D1 DE3484450 D1 DE 3484450D1
Authority
DE
Germany
Prior art keywords
piezoelectric resonator
resonator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8484303505T
Other languages
English (en)
Inventor
Sumio Yamada
Yoshiro Fujiwara
Noboru Nakanoshima-J Wakatsuki
Yuji Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9526583A external-priority patent/JPS59221023A/ja
Priority claimed from JP13374883A external-priority patent/JPS6025312A/ja
Priority claimed from JP13827883A external-priority patent/JPS6030207A/ja
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3484450D1 publication Critical patent/DE3484450D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
DE8484303505T 1983-05-30 1984-05-23 Piezoelektrischer resonator. Expired - Fee Related DE3484450D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9526583A JPS59221023A (ja) 1983-05-30 1983-05-30 圧電振動素子
JP13374883A JPS6025312A (ja) 1983-07-22 1983-07-22 圧電振動子
JP13827883A JPS6030207A (ja) 1983-07-28 1983-07-28 圧電振動子

Publications (1)

Publication Number Publication Date
DE3484450D1 true DE3484450D1 (de) 1991-05-23

Family

ID=27307775

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484303505T Expired - Fee Related DE3484450D1 (de) 1983-05-30 1984-05-23 Piezoelektrischer resonator.

Country Status (3)

Country Link
US (1) US4583019A (de)
EP (1) EP0127442B1 (de)
DE (1) DE3484450D1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991013364A2 (en) * 1990-02-14 1991-09-05 Allied-Signal Inc. Surface-mount piezoceramic accelerometer and method for making same
US5153476A (en) * 1991-03-11 1992-10-06 The United States Of America As Represented By The Secretary Of The Army Acoustic vibrator with variable sensitivity to external acceleration
JPH08242026A (ja) * 1995-03-03 1996-09-17 Fujitsu Ltd 圧電振動子及びこれを具備する圧電振動子デバイス並びに該デバイスを具備する回路装置
JPH08288790A (ja) * 1995-04-10 1996-11-01 Fujitsu Ltd 素子用基板、圧電振動装置及び弾性表面波装置
JP3924016B2 (ja) * 1995-11-08 2007-06-06 シチズンミヨタ株式会社 圧電振動子
US5675208A (en) * 1996-02-28 1997-10-07 Motorola, Inc. Lithium niobate piezoelectric transformer operating in thickness-shear mode
JP3336913B2 (ja) * 1997-06-30 2002-10-21 株式会社村田製作所 電子部品のパッケージ構造
JP4338091B2 (ja) * 2005-04-08 2009-09-30 Ｔｄｋ株式会社 レゾネータ
JP4281733B2 (ja) * 2005-11-21 2009-06-17 トヨタ自動車株式会社 電気モータの分割ステータ
DK2087769T3 (da) 2006-11-09 2019-05-13 Sonova Ag Opbevaring af elektroniske komponenter
CN103213204B (zh) * 2013-04-24 2015-04-08 中国电子科技集团公司第四十四研究所 铌酸锂起偏器芯片加工方法
JP6654435B2 (ja) * 2016-01-07 2020-02-26 株式会社ディスコ ウエーハ生成方法
JP2022038679A (ja) * 2020-08-27 2022-03-10 セイコーエプソン株式会社 レーザー干渉計およびレーザー干渉計の制御方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3461408A (en) * 1967-02-09 1969-08-12 Bell Telephone Labor Inc Oriented litao3 crystal and devices using same
US3591813A (en) * 1969-02-28 1971-07-06 Bell Telephone Labor Inc Lithium niobate transducers
US3858065A (en) * 1970-12-31 1974-12-31 Becton Dickinson Co Annular 3m class piezoelectric crystal transducer
GB1401042A (en) * 1972-05-30 1975-07-16 Suisse Horlogerie Quartz crystal resonator
JPS5466793A (en) * 1977-11-07 1979-05-29 Citizen Watch Co Ltd Piezoelectric oscillator
JPS54136970U (de) * 1978-03-16 1979-09-22
JPS553208A (en) * 1978-06-22 1980-01-11 Toshiba Corp Device to obtain plural resonance frequencies
FR2458150A1 (fr) * 1979-05-31 1980-12-26 Ebauches Sa Resonateur a cristal taille pour fonctionner en cisaillement d'epaisseur
US4384229A (en) * 1980-02-14 1983-05-17 Nippon Electric Co., Ltd. Temperature compensated piezoelectric ceramic resonator unit
US4454444A (en) * 1982-02-22 1984-06-12 Fujitsu Limited LiTaO3 Piezoelectric resonator

Also Published As

Publication number Publication date
US4583019A (en) 1986-04-15
EP0127442A3 (en) 1986-12-03
EP0127442B1 (de) 1991-04-17
EP0127442A2 (de) 1984-12-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee