DE69104069D1 - Vorrichtung zur übersuchung oder veränderung der oberfläche von proben in einer vakuumkammer oder in einer kontrollierten atmosphäre. - Google Patents

Vorrichtung zur übersuchung oder veränderung der oberfläche von proben in einer vakuumkammer oder in einer kontrollierten atmosphäre.

Info

Publication number
DE69104069D1
DE69104069D1 DE69104069T DE69104069T DE69104069D1 DE 69104069 D1 DE69104069 D1 DE 69104069D1 DE 69104069 T DE69104069 T DE 69104069T DE 69104069 T DE69104069 T DE 69104069T DE 69104069 D1 DE69104069 D1 DE 69104069D1
Authority
DE
Germany
Prior art keywords
samples
pct
support plate
enclosure
controlled atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69104069T
Other languages
English (en)
Other versions
DE69104069T2 (de
Inventor
Jean-Pierre Goudonnet
Yvon Lacroute
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SIM D INVESTISSEMENT D Ste
Original Assignee
SIM D INVESTISSEMENT D Ste
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9396463&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69104069(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SIM D INVESTISSEMENT D Ste filed Critical SIM D INVESTISSEMENT D Ste
Application granted granted Critical
Publication of DE69104069D1 publication Critical patent/DE69104069D1/de
Publication of DE69104069T2 publication Critical patent/DE69104069T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/16—Vacuum environment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/869—Optical microscope
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/871—Scanning probe structure with environmental regulation means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/88—Manufacture, treatment, or detection of nanostructure with arrangement, process, or apparatus for testing
    • Y10S977/881—Microscopy or spectroscopy, e.g. sem, tem
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/888—Shaping or removal of materials, e.g. etching
DE69104069T 1990-05-10 1991-05-07 Vorrichtung zur übersuchung oder veränderung der oberfläche von proben in einer vakuumkammer oder in einer kontrollierten atmosphäre. Expired - Fee Related DE69104069T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9005823A FR2662024B1 (fr) 1990-05-10 1990-05-10 Installation pour l'etude ou la transformation de la surface d'echantillons places dans le vide ou dans une atmosphere controlee.
PCT/FR1991/000378 WO1991017429A1 (fr) 1990-05-10 1991-05-07 Installation pour l'etude ou la transformation de la surface d'echantillons places dans le vide ou dans une atmosphere controlee

Publications (2)

Publication Number Publication Date
DE69104069D1 true DE69104069D1 (de) 1994-10-20
DE69104069T2 DE69104069T2 (de) 1995-05-04

Family

ID=9396463

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69104069T Expired - Fee Related DE69104069T2 (de) 1990-05-10 1991-05-07 Vorrichtung zur übersuchung oder veränderung der oberfläche von proben in einer vakuumkammer oder in einer kontrollierten atmosphäre.

Country Status (11)

Country Link
US (1) US5306918A (de)
EP (1) EP0573421B1 (de)
JP (1) JPH05509398A (de)
CN (1) CN1057363A (de)
AT (1) ATE111602T1 (de)
AU (1) AU7964191A (de)
DE (1) DE69104069T2 (de)
FR (1) FR2662024B1 (de)
IL (1) IL98086A0 (de)
WO (1) WO1991017429A1 (de)
ZA (1) ZA913480B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5504366A (en) * 1992-07-17 1996-04-02 Biotechnology Research And Development Corp. System for analyzing surfaces of samples
KR940007963A (ko) * 1992-09-03 1994-04-28 오오가 노리오 판그물 및 투과형 전자현미경용 시료의 연마방법
US5751003A (en) * 1996-02-16 1998-05-12 Eaton Corporation Loadlock assembly for an ion implantation system
US5793050A (en) * 1996-02-16 1998-08-11 Eaton Corporation Ion implantation system for implanting workpieces
DE19947287C2 (de) * 1999-09-30 2003-01-30 Surface Imaging Systems Gmbh Nahfeldmikroskop
FR2802139B1 (fr) * 1999-12-14 2002-02-15 Onera (Off Nat Aerospatiale) Dispositif de transfert d'un objet sous une atmosphere controlee entre une premiere chambre et une seconde chambre
AU2001274814B2 (en) * 2000-04-27 2004-04-01 Loma Linda University Nanodosimeter based on single ion detection
WO2002071412A1 (en) * 2001-03-02 2002-09-12 Northwestern University Enhanced scanning probe microscope
US6737646B2 (en) * 2001-06-04 2004-05-18 Northwestern University Enhanced scanning probe microscope and nanolithographic methods using the same
US6936826B2 (en) * 2001-11-07 2005-08-30 Soluris, Inc. Vibration-isolating coupling including an elastomer diaphragm for scanning electron microscope and the like
US6762415B1 (en) * 2003-04-18 2004-07-13 Imago Scientific Instruments Corporation Vacuum chamber with recessed viewing tube and imaging device situated therein
WO2011014315A1 (en) * 2009-07-31 2011-02-03 Regents Of The University Of California Scanning tunneling microscope assembly, reactor, and system
CN113340813A (zh) * 2021-05-12 2021-09-03 西安交通大学 兼具微区表征功能的便携超高真空低温观测腔及操作方法
CN116087102B (zh) * 2023-01-13 2023-11-03 中国科学院空间应用工程与技术中心 一种冰卫星和地外海洋极端环境模拟系统实验装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US908519A (en) * 1907-01-31 1909-01-05 Thompson Type Machine Company Type-casting machine.
US4908519A (en) * 1988-10-11 1990-03-13 The Board Of Thustees Of The Leland Stanford Jr. University Loading mechanism and support structure having improved vibration damping useful in scanning tunneling microscopy
US4992660A (en) * 1989-06-26 1991-02-12 Jeol Ltd. Scanning tunneling microscope
ES2021928A6 (es) * 1989-12-27 1991-11-16 Daumar Talleres Maquina llenadora de envases con productos, segun una distribucion predeterminada.
US5061850A (en) * 1990-07-30 1991-10-29 Wisconsin Alumni Research Foundation High-repetition rate position sensitive atom probe
JPH0756443B2 (ja) * 1990-12-20 1995-06-14 株式会社島津製作所 生体試料観察用走査型トンネル顕微鏡
US5157256A (en) * 1991-08-08 1992-10-20 Burleigh Instruments Inc. System for exchanging samples and electrode tip units in a surface probe microscope

Also Published As

Publication number Publication date
ATE111602T1 (de) 1994-09-15
EP0573421B1 (de) 1994-09-14
DE69104069T2 (de) 1995-05-04
US5306918A (en) 1994-04-26
AU7964191A (en) 1991-11-27
ZA913480B (en) 1992-02-26
CN1057363A (zh) 1991-12-25
JPH05509398A (ja) 1993-12-22
IL98086A0 (en) 1992-06-21
WO1991017429A1 (fr) 1991-11-14
EP0573421A1 (de) 1993-12-15
FR2662024A1 (fr) 1991-11-15
FR2662024B1 (fr) 1992-10-23

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee