DE69102995D1 - Yag-laserbearbeitungsmaschine zur bearbeitung von dünnschichten. - Google Patents

Yag-laserbearbeitungsmaschine zur bearbeitung von dünnschichten.

Info

Publication number
DE69102995D1
DE69102995D1 DE69102995T DE69102995T DE69102995D1 DE 69102995 D1 DE69102995 D1 DE 69102995D1 DE 69102995 T DE69102995 T DE 69102995T DE 69102995 T DE69102995 T DE 69102995T DE 69102995 D1 DE69102995 D1 DE 69102995D1
Authority
DE
Germany
Prior art keywords
thin film
yag laser
laser processing
processing machine
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69102995T
Other languages
English (en)
Other versions
DE69102995T2 (de
Inventor
Noritaka Ishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Innotech Corp
Original Assignee
MATERIALS AND INTELLIGENT DEVI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2201381A external-priority patent/JPH0489187A/ja
Priority claimed from JP2414117A external-priority patent/JPH04351280A/ja
Priority claimed from JP2414118A external-priority patent/JP2677711B2/ja
Application filed by MATERIALS AND INTELLIGENT DEVI filed Critical MATERIALS AND INTELLIGENT DEVI
Application granted granted Critical
Publication of DE69102995D1 publication Critical patent/DE69102995D1/de
Publication of DE69102995T2 publication Critical patent/DE69102995T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
DE69102995T 1990-07-31 1991-07-30 Yag-laserbearbeitungsmaschine zur bearbeitung von dünnschichten. Expired - Fee Related DE69102995T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2201381A JPH0489187A (ja) 1990-07-31 1990-07-31 レーザ加工機におけるレーザ光の制御方法
JP2414117A JPH04351280A (ja) 1990-12-26 1990-12-26 薄膜精密加工用のｙａｇレーザ加工機
JP2414118A JP2677711B2 (ja) 1990-12-26 1990-12-26 薄膜精密加工用のｙａｇレーザ加工機
PCT/JP1991/001018 WO1992002331A1 (en) 1990-07-31 1991-07-30 Yag laser working machine for precision working of thin film

Publications (2)

Publication Number Publication Date
DE69102995D1 true DE69102995D1 (de) 1994-08-25
DE69102995T2 DE69102995T2 (de) 1994-10-27

Family

ID=27327936

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69102995T Expired - Fee Related DE69102995T2 (de) 1990-07-31 1991-07-30 Yag-laserbearbeitungsmaschine zur bearbeitung von dünnschichten.

Country Status (5)

Country Link
US (1) US5227607A (de)
EP (1) EP0513359B1 (de)
KR (1) KR100235340B1 (de)
DE (1) DE69102995T2 (de)
WO (1) WO1992002331A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3293136B2 (ja) * 1993-06-04 2002-06-17 セイコーエプソン株式会社 レーザ加工装置及びレーザ加工方法
US5611946A (en) * 1994-02-18 1997-03-18 New Wave Research Multi-wavelength laser system, probe station and laser cutter system using the same
JP3179963B2 (ja) * 1994-04-26 2001-06-25 松下電器産業株式会社 レーザ加工装置とレーザ加工方法
JP2682475B2 (ja) * 1994-11-17 1997-11-26 日本電気株式会社 ビームスキャン式レーザマーキング方法および装置
US5932119A (en) * 1996-01-05 1999-08-03 Lazare Kaplan International, Inc. Laser marking system
JP3213882B2 (ja) * 1997-03-21 2001-10-02 住友重機械工業株式会社 レーザ加工装置及び加工方法
ES2142268B1 (es) * 1998-02-19 2000-11-16 Univ Vigo Procesamiento de pizarra mediante laser.
DE19840926B4 (de) * 1998-09-08 2013-07-11 Hell Gravure Systems Gmbh & Co. Kg Anordnung zur Materialbearbeitung mittels Laserstrahlen und deren Verwendung
US6324195B1 (en) * 1999-01-13 2001-11-27 Kaneka Corporation Laser processing of a thin film
US20090168111A9 (en) * 1999-09-01 2009-07-02 Hell Gravure Systems Gmbh Printing form processing with fine and coarse engraving tool processing tracks
JP3855684B2 (ja) * 2001-06-05 2006-12-13 松下電器産業株式会社 レーザ加工装置およびレーザ加工方法
US6844523B2 (en) * 2001-09-07 2005-01-18 Semiconductor Energy Laboratory Co., Ltd. Laser apparatus, laser irradiation method, manufacturing method for a semiconductor device, semiconductor device and electronic equipment
US7589032B2 (en) * 2001-09-10 2009-09-15 Semiconductor Energy Laboratory Co., Ltd. Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment
US20060279793A1 (en) * 2004-07-30 2006-12-14 Hell Gravure Systems Gmbh Printing form processing with a plurality of engraving tool tracks forming lines
CN1954954A (zh) * 2005-10-27 2007-05-02 鸿富锦精密工业（深圳）有限公司 模具加工装置
US8319145B2 (en) * 2006-07-10 2012-11-27 Lazare Kaplan International, Inc. System and method for gemstone micro-inscription
JP5620669B2 (ja) * 2009-10-26 2014-11-05 東芝機械株式会社 レーザダイシング方法およびレーザダイシング装置
JP5452247B2 (ja) * 2010-01-21 2014-03-26 東芝機械株式会社 レーザダイシング装置
JP5981094B2 (ja) 2010-06-24 2016-08-31 東芝機械株式会社 ダイシング方法
KR101235557B1 (ko) * 2010-10-12 2013-02-28 (주)룩스이엔지 복수의 레이저를 이용한 도광판 가공장치
JP5756626B2 (ja) * 2010-12-23 2015-07-29 日本車輌製造株式会社 レーザ加工機
JP5140198B1 (ja) 2011-07-27 2013-02-06 東芝機械株式会社 レーザダイシング方法
JP2014011358A (ja) 2012-06-29 2014-01-20 Toshiba Mach Co Ltd レーザダイシング方法
DE102015206341A1 (de) * 2015-04-09 2016-10-13 Sirona Dental Systems Gmbh Verfahren und ein Vermessungssystem zur optischen Vermessung eines Objekts
TWI686256B (zh) * 2018-04-13 2020-03-01 財團法人工業技術研究院 雷射清潔裝置及方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4752668A (en) * 1986-04-28 1988-06-21 Rosenfield Michael G System for laser removal of excess material from a semiconductor wafer
JPS62270291A (ja) * 1986-05-20 1987-11-24 Mitsubishi Electric Corp レ−ザ加工機におけるリアルタイム制御装置
JPS63154280A (ja) * 1986-12-17 1988-06-27 Fuji Electric Corp Res & Dev Ltd レ−ザ加工装置
US5095190A (en) * 1987-03-03 1992-03-10 Canon Kabushiki Kaisha Exposure apparatus
JPH0796159B2 (ja) * 1987-09-28 1995-10-18 松下電器産業株式会社 レーザトリミング装置
US4843209A (en) * 1987-11-05 1989-06-27 Dennis T. Grendahl Method and apparatus for laser staking
US5140128A (en) * 1990-05-03 1992-08-18 General Electric Company Method and system for providing elements of composite objects
FR2752380B1 (fr) * 1996-08-14 1998-10-30 Dow Corning Sa Procede de fabrication d'un dispositif a liberation controlee

Also Published As

Publication number Publication date
WO1992002331A1 (en) 1992-02-20
KR100235340B1 (ko) 1999-12-15
US5227607A (en) 1993-07-13
DE69102995T2 (de) 1994-10-27
KR920702269A (ko) 1992-09-03
EP0513359B1 (de) 1994-07-20
EP0513359A4 (en) 1993-02-24
EP0513359A1 (de) 1992-11-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FINE MACHINING CORP., TOKIO/TOKYO, JP JVF INC., GE

8327 Change in the person/name/address of the patent owner

Owner name: INNOTECH CORP., YOKOHAMA, KANAGAWA, JP

8339 Ceased/non-payment of the annual fee