DE69033640D1 - Hochrein-Titanwerkstoff, Verfahren zu seiner Herstellung sowie Verwendung als Zerstäubungstarget - Google Patents

Hochrein-Titanwerkstoff, Verfahren zu seiner Herstellung sowie Verwendung als Zerstäubungstarget

Info

Publication number
DE69033640D1
DE69033640D1 DE69033640T DE69033640T DE69033640D1 DE 69033640 D1 DE69033640 D1 DE 69033640D1 DE 69033640 T DE69033640 T DE 69033640T DE 69033640 T DE69033640 T DE 69033640T DE 69033640 D1 DE69033640 D1 DE 69033640D1
Authority
DE
Germany
Prior art keywords
production
titanium material
purity titanium
atomizing target
atomizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69033640T
Other languages
English (en)
Other versions
DE69033640T2 (de
Inventor
Takashi Ishigami
Mituo Kawai
Noriaki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Materials Co Ltd
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE69033640D1 publication Critical patent/DE69033640D1/de
Publication of DE69033640T2 publication Critical patent/DE69033640T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B34/00—Obtaining refractory metals
    • C22B34/10—Obtaining titanium, zirconium or hafnium
    • C22B34/12—Obtaining titanium or titanium compounds from ores or scrap by metallurgical processing; preparation of titanium compounds from other titanium compounds see C01G23/00 - C01G23/08
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B34/00—Obtaining refractory metals
    • C22B34/10—Obtaining titanium, zirconium or hafnium
    • C22B34/12—Obtaining titanium or titanium compounds from ores or scrap by metallurgical processing; preparation of titanium compounds from other titanium compounds see C01G23/00 - C01G23/08
    • C22B34/1295—Refining, melting, remelting, working up of titanium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16—Remelting metals
    • C22B9/22—Remelting metals with heating by wave energy or particle radiation
    • C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C14/00—Alloys based on titanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01019—Potassium [K]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01024—Chromium [Cr]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01028—Nickel [Ni]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01074—Tungsten [W]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
DE69033640T 1989-07-14 1990-07-13 Hochrein-Titanwerkstoff, Verfahren zu seiner Herstellung sowie Verwendung als Zerstäubungstarget Expired - Lifetime DE69033640T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18187789 1989-07-14

Publications (2)

Publication Number Publication Date
DE69033640D1 true DE69033640D1 (de) 2000-11-09
DE69033640T2 DE69033640T2 (de) 2001-05-03

Family

ID=16108426

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69033640T Expired - Lifetime DE69033640T2 (de) 1989-07-14 1990-07-13 Hochrein-Titanwerkstoff, Verfahren zu seiner Herstellung sowie Verwendung als Zerstäubungstarget

Country Status (4)

Country Link
EP (3) EP0952239A1 (de)
JP (1) JPH07103432B2 (de)
KR (1) KR940000821B1 (de)
DE (1) DE69033640T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940008936B1 (ko) * 1990-02-15 1994-09-28 가부시끼가이샤 도시바 고순도 금속재와 그 성질을 이용한 반도체 장치 및 그 제조방법
JP3413782B2 (ja) * 1995-03-31 2003-06-09 日立金属株式会社 スパッタリング用チタンタ−ゲットおよびその製造方法
US6309595B1 (en) 1997-04-30 2001-10-30 The Altalgroup, Inc Titanium crystal and titanium
US6063254A (en) * 1997-04-30 2000-05-16 The Alta Group, Inc. Method for producing titanium crystal and titanium
US6024847A (en) * 1997-04-30 2000-02-15 The Alta Group, Inc. Apparatus for producing titanium crystal and titanium
US6755948B1 (en) 1999-11-22 2004-06-29 Nikko Materials Company, Limited Titanium target for sputtering
NL1037424C2 (nl) 2009-10-29 2011-05-02 Atte Nicolaas Bakker Chronograaf.
SG11201802505WA (en) * 2016-03-25 2018-04-27 Jx Nippon Mining & Metals Corp Ti-Ta ALLOY SPUTTERING TARGET AND PRODUCTION METHOD THEREFOR
US20170345766A1 (en) * 2016-05-31 2017-11-30 Globalfoundries Inc. Devices and methods of forming low resistivity noble metal interconnect with improved adhesion
CN112111658B (zh) * 2020-08-27 2022-07-05 宁波创润新材料有限公司 一种颗粒物料的熔炼方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066425A (ja) * 1983-09-22 1985-04-16 Nippon Telegr & Teleph Corp <Ntt> Ｌｓｉ電極用の高純度モリブデンタ−ゲツトならびに高純度モリブデンシリサイドタ−ゲツトおよびその製造方法
JPS62280335A (ja) * 1986-05-30 1987-12-05 Toshiba Corp 薄膜形成用高純度チタン材、それを用いて形成されてなるターゲットおよび薄膜、および薄膜形成用高純度チタン材の製造方法
JPS62294177A (ja) * 1986-06-13 1987-12-21 Toshiba Corp 高純度金属体の製造方法
US4678506A (en) * 1986-08-11 1987-07-07 Titanium Metals Corporation Of America (Timet) Production of titanium articles that are free from low density inclusions
JP2670836B2 (ja) * 1989-02-15 1997-10-29 株式会社 ジャパンエナジー 高純度チタンターゲット材

Also Published As

Publication number Publication date
JPH03130339A (ja) 1991-06-04
EP0814506A2 (de) 1997-12-29
JPH07103432B2 (ja) 1995-11-08
EP0952239A1 (de) 1999-10-27
EP0814506A3 (de) 1998-04-15
DE69033640T2 (de) 2001-05-03
KR940000821B1 (ko) 1994-02-02
EP0408383B1 (de) 2000-10-04
EP0408383A1 (de) 1991-01-16
KR910003133A (ko) 1991-02-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KABUSHIKI KAISHA TOSHIBA, TOKYO, JP

Owner name: TOSHIBA MATERIALS CO., LTD., YOKOHAMA, KANAGAW, JP

8320 Willingness to grant licences declared (paragraph 23)