DE69030299D1 - Magnetische struktur für eine mittels elektronenstrahl erwärmte verdampfungsquelle - Google Patents

Magnetische struktur für eine mittels elektronenstrahl erwärmte verdampfungsquelle

Info

Publication number
DE69030299D1
DE69030299D1 DE69030299T DE69030299T DE69030299D1 DE 69030299 D1 DE69030299 D1 DE 69030299D1 DE 69030299 T DE69030299 T DE 69030299T DE 69030299 T DE69030299 T DE 69030299T DE 69030299 D1 DE69030299 D1 DE 69030299D1
Authority
DE
Germany
Prior art keywords
electron beam
evaporation source
magnetic structure
warmed
source warmed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69030299T
Other languages
English (en)
Inventor
Charles W Hanks
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69030299D1 publication Critical patent/DE69030299D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
DE69030299T 1989-05-22 1990-05-17 Magnetische struktur für eine mittels elektronenstrahl erwärmte verdampfungsquelle Expired - Lifetime DE69030299D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/355,440 US4947404A (en) 1987-11-16 1989-05-22 Magnet structure for electron-beam heated evaporation source
PCT/US1990/002851 WO1990014682A1 (en) 1989-05-22 1990-05-17 Magnetic structure for electron-beam heated evaporation source

Publications (1)

Publication Number Publication Date
DE69030299D1 true DE69030299D1 (de) 1997-04-30

Family

ID=23397448

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69030299T Expired - Lifetime DE69030299D1 (de) 1989-05-22 1990-05-17 Magnetische struktur für eine mittels elektronenstrahl erwärmte verdampfungsquelle

Country Status (5)

Country Link
US (1) US4947404A (de)
EP (1) EP0428682B1 (de)
JP (1) JP3080401B2 (de)
DE (1) DE69030299D1 (de)
WO (1) WO1990014682A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI419989B (zh) * 2006-06-30 2013-12-21 Hon Hai Prec Ind Co Ltd 組合式坩鍋
DE102006031244B4 (de) * 2006-07-06 2010-12-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Verdampfen eines Materials mittels eines Elektronenstrahls und zum Abscheiden des Dampfes auf ein Substrat
JP6013279B2 (ja) * 2013-06-13 2016-10-25 住友重機械工業株式会社 成膜装置
JP6342291B2 (ja) * 2014-10-16 2018-06-13 住友重機械工業株式会社 成膜装置
RU188584U1 (ru) * 2018-09-24 2019-04-17 федеральное государственное бюджетное образовательное учреждение высшего образования "Омский государственный университет им. Ф.М. Достоевского" Устройство для изготовления нанометровых прозрачных пленок
KR20240008416A (ko) * 2018-11-30 2024-01-18 페로텍 (유에스에이) 코포레이션 전자빔 소스 코팅용 도가니 커버

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1156522B (de) * 1962-09-25 1963-10-31 Heraeus Gmbh W C Elektronenlinsenanordnung fuer Elektronenstrahlschmelz- oder -verdampfungsanlagen
DE1199097B (de) * 1962-09-25 1965-08-19 Heraeus Gmbh W C Vorrichtung zum Vakuumbedampfen breiter Baender, insbesondere mit Metallen, durch Erhitzen des Verdampfungsgutes mittels Elektronenstrahlen
US3389210A (en) * 1965-03-29 1968-06-18 Everette M. Whitson Multiple crucible for a permanent magnet transverse electron beam evaporation source
US4064352A (en) * 1976-02-17 1977-12-20 Varian Associates, Inc. Electron beam evaporator having beam spot control
DE3316554C1 (de) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Verdampfervorrichtung mit Strahlheizung zum Aufdampfen mehrerer Materialien

Also Published As

Publication number Publication date
EP0428682A4 (en) 1991-09-25
JPH04500243A (ja) 1992-01-16
EP0428682B1 (de) 1997-03-26
EP0428682A1 (de) 1991-05-29
WO1990014682A1 (en) 1990-11-29
JP3080401B2 (ja) 2000-08-28
US4947404A (en) 1990-08-07

Similar Documents

Publication Publication Date Title
FI903969A0 (fi) Rf-syntetisator foer nmr-instrument.
FI903862A0 (fi) Radiofrekvensmottagare foer ett nmr instrument.
DE3772605D1 (de) Bilderzeugungssystem mittels magnetischer resonanz.
DE69025513T2 (de) Anordnung zur Bilderzeugung mittels magnetischer Resonanz
DE3751909D1 (de) Schnelles Bilderzeugungssystem mittels magnetischer Kernresonanz
DE68921370D1 (de) Electronzyklotronresonanz-Ionenquelle.
DE69026552T2 (de) Magnetische Resonanz-Sonden
DE3689873T2 (de) Bilderzeugung mittels magnetischer Kernresonanz.
IT9067939A0 (it) orientamento del fascio
DE69123232D1 (de) Inspektionsgerät für eine aktive Matrix
DE69232151T2 (de) Resonator für elektron-spins
DE69030299D1 (de) Magnetische struktur für eine mittels elektronenstrahl erwärmte verdampfungsquelle
DE3856546T2 (de) Bilderzeugungssystem mittels magnetischer Resonanz
DE3855843D1 (de) Elektronenstrahl-Analysegerät
DE69018303T2 (de) Supraleitende Struktur zur magnetischen Abschirmung.
DE69318068T2 (de) Hohlraumresonator für eine Elektronenspinresonanz-Vorrichtung
GB9003454D0 (en) Electron beam excitation ion source
DE3863250D1 (de) Probenkopf fuer nmr-spektrometer.
DE69018425T2 (de) Vorratskathode für eine Elektronenstrahlkanone.
DE68927049T2 (de) Bildformungsanordnung mittels magnetischer resonanz
ATA214589A (de) Blendenanordnung zur streuungsarmen, einseitigen, linearen begrenzung eines roentgenstrahlbuendels
DE69033077T2 (de) Elektronenspinresonanzsystem
DE69011908D1 (de) Fokussierung eines Elektronenstrahls.
DE3683701D1 (de) Pruefung von integrierten schaltungen mittels elektronenstrahl.
DE69007504T2 (de) Eine Belichtungsvorrichtung für Kathodenstrahlröhren.

Legal Events

Date Code Title Description
8332 No legal effect for de