DE69025965D1 - Verfahren zur Herstellung eingebetteter Wellenleiter - Google Patents
Verfahren zur Herstellung eingebetteter WellenleiterInfo
- Publication number
- DE69025965D1 DE69025965D1 DE69025965T DE69025965T DE69025965D1 DE 69025965 D1 DE69025965 D1 DE 69025965D1 DE 69025965 T DE69025965 T DE 69025965T DE 69025965 T DE69025965 T DE 69025965T DE 69025965 D1 DE69025965 D1 DE 69025965D1
- Authority
- DE
- Germany
- Prior art keywords
- waveguides
- ions
- field
- exchanging
- manufacturing embedded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
- C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
- C03C21/002—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
- C03C21/003—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions under application of an electrical potential difference
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
- C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
- C03C21/005—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to introduce in the glass such metals or metallic ions as Ag, Cu
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geochemistry & Mineralogy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Surface Treatment Of Glass (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Waveguides (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/300,571 US4913717A (en) | 1989-01-23 | 1989-01-23 | Method for fabricating buried waveguides |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69025965D1 true DE69025965D1 (de) | 1996-04-25 |
DE69025965T2 DE69025965T2 (de) | 1996-08-14 |
Family
ID=23159662
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69025965T Expired - Fee Related DE69025965T2 (de) | 1989-01-23 | 1990-01-19 | Verfahren zur Herstellung eingebetteter Wellenleiter |
DE199090890012T Pending DE380468T1 (de) | 1989-01-23 | 1990-01-19 | Verfahren zur herstellung eingebetteter wellenleiter. |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE199090890012T Pending DE380468T1 (de) | 1989-01-23 | 1990-01-19 | Verfahren zur herstellung eingebetteter wellenleiter. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4913717A (de) |
EP (1) | EP0380468B1 (de) |
JP (1) | JPH02221139A (de) |
AT (1) | ATE135826T1 (de) |
CA (1) | CA2007001A1 (de) |
DE (2) | DE69025965T2 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2672662B2 (ja) * | 1989-07-07 | 1997-11-05 | ホーヤ株式会社 | 光導波路の製造方法 |
JPH0791091B2 (ja) * | 1989-11-06 | 1995-10-04 | 日本板硝子株式会社 | 低損失埋込み導波路の製造方法 |
FI86226C (fi) * | 1990-07-10 | 1992-07-27 | Nokia Oy Ab | Foerfarande foer framstaellning av ljusvaogsledare medelst jonbytesteknik pao ett glassubstrat. |
EP0548385A1 (de) * | 1991-12-20 | 1993-06-30 | Corning Incorporated | Verfahren zur Vergrabung optischer Wellenleiter |
EP0548388B1 (de) * | 1991-12-20 | 1995-02-15 | Corning Incorporated | Verfahren und Vorrichtung zur Einbettung von Wellenleitern |
DE69321430T2 (de) * | 1992-07-08 | 1999-04-29 | Matsushita Electric Ind Co Ltd | Optischer Wellenleiter und dessen Herstellungsverfahren |
DE19755416C1 (de) * | 1997-12-12 | 1999-06-10 | Bosch Gmbh Robert | Verfahren zur Herstellung von Lichtwellenleitern |
US6947651B2 (en) * | 2001-05-10 | 2005-09-20 | Georgia Tech Research Corporation | Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof |
KR100415625B1 (ko) * | 2001-08-06 | 2004-01-24 | 한국전자통신연구원 | 이온 교환법을 이용한 평면형 광도파로 제조 방법 |
FR2831277B1 (fr) * | 2001-10-23 | 2004-02-20 | Teem Photonics | Procede de fabrication d'un dispositif optique par echange d'ions dans un substrat |
DE10249095A1 (de) * | 2002-10-21 | 2004-04-29 | Fuji Magnetics Gmbh | Speichermedium |
DE10309826B4 (de) * | 2003-03-05 | 2009-11-12 | Schott Ag | Verfahren zum Strukturieren von Phosphatgläsern durch zerstörungsfreien Ionenaustausch, strukturierte Phosphatgläser und deren Verwendung |
DE10339837B4 (de) * | 2003-08-29 | 2008-10-02 | Schott Ag | Feldunterstützter Ionenaustausch aus kontinuierlich aufgebrachten Metallfilmen auf Glassubstraten |
DE102004035239B4 (de) * | 2004-07-21 | 2011-08-18 | boraident GmbH, 06118 | Verfahren zur Herstellung einer Prüfmarkierung von Glas und Verwendung der Prüfmarkierung zum Nachweis der bei der Erzeugung der Prüfmarkierung herrschenden Temperatur- und Zeitbedingungen |
US8312743B2 (en) * | 2005-05-18 | 2012-11-20 | City University Of Hong Kong | Method for fabricating buried ion-exchanged waveguides using field-assisted annealing |
FR2920426B1 (fr) | 2007-09-03 | 2011-05-06 | Saint Gobain | Substrat en verre a gradient d'indice de refraction et procede de fabrication |
FR2929415B1 (fr) * | 2008-03-27 | 2010-03-12 | Saint Gobain | Procede de fabrication d'elements optiques plans et elements obtenus |
FR2929370B1 (fr) * | 2008-03-27 | 2015-07-17 | Saint Gobain | Vitrage a lames deviant la lumiere par echange ionique |
DE102008043456A1 (de) * | 2008-11-04 | 2010-05-06 | BSH Bosch und Siemens Hausgeräte GmbH | Abdeckplatte aus Glas oder Keramik für ein Hausgerät und Verfahren zum Herstellen einer Abdeckplatte |
FR2939787A1 (fr) | 2008-12-15 | 2010-06-18 | Saint Gobain | Composition de verre adaptee a la realisation d'elements optiques plans |
FR2962124B1 (fr) * | 2010-07-01 | 2014-12-26 | Eurokera | Plaque de cuisson comprenant un guide d'ondes |
KR101962499B1 (ko) * | 2011-10-28 | 2019-03-26 | 코닝 인코포레이티드 | 적외선 반사도를 갖는 유리 제품 및 이의 제조방법 |
JP6172667B2 (ja) * | 2013-08-08 | 2017-08-02 | 国立大学法人東京工業大学 | 両面化学強化ガラスの製造方法 |
US20170022098A1 (en) * | 2014-04-02 | 2017-01-26 | Corning Incorporated | Electrochemical methods for chemical strengthening of glass and glass ceramics |
US20170305787A1 (en) * | 2014-10-03 | 2017-10-26 | Corning Incorporated | Patterned ion-exchanged substrates and methods for making the same |
US9890075B2 (en) * | 2016-01-20 | 2018-02-13 | International Business Machines Corporation | Chemically strengthened glass and methods of making same |
WO2018013505A1 (en) * | 2016-07-15 | 2018-01-18 | Corning Incorporated | Optical waveguide article with laminate structure and method for forming the same |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5038342B2 (de) * | 1971-12-01 | 1975-12-09 | ||
US3857689A (en) * | 1971-12-28 | 1974-12-31 | Nippon Selfoc Co Ltd | Ion exchange process for manufacturing integrated optical circuits |
US3836348A (en) * | 1973-02-22 | 1974-09-17 | Nippon Selfoc Co Ltd | Method for manufacturing optical integrated circuits utilizing an external electric field |
US4155735A (en) * | 1977-11-30 | 1979-05-22 | Ppg Industries, Inc. | Electromigration method for making stained glass photomasks |
JPS60260445A (ja) * | 1984-06-04 | 1985-12-23 | Nippon Sheet Glass Co Ltd | ガラス物品の表面保護処理方法 |
-
1989
- 1989-01-23 US US07/300,571 patent/US4913717A/en not_active Expired - Fee Related
-
1990
- 1990-01-02 CA CA002007001A patent/CA2007001A1/en not_active Abandoned
- 1990-01-19 JP JP2010481A patent/JPH02221139A/ja active Pending
- 1990-01-19 EP EP90890012A patent/EP0380468B1/de not_active Expired - Lifetime
- 1990-01-19 DE DE69025965T patent/DE69025965T2/de not_active Expired - Fee Related
- 1990-01-19 AT AT90890012T patent/ATE135826T1/de not_active IP Right Cessation
- 1990-01-19 DE DE199090890012T patent/DE380468T1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
DE69025965T2 (de) | 1996-08-14 |
EP0380468B1 (de) | 1996-03-20 |
EP0380468A3 (de) | 1991-10-09 |
ATE135826T1 (de) | 1996-04-15 |
DE380468T1 (de) | 1990-11-29 |
US4913717A (en) | 1990-04-03 |
CA2007001A1 (en) | 1990-07-23 |
EP0380468A2 (de) | 1990-08-01 |
JPH02221139A (ja) | 1990-09-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |