ATE135826T1 - Verfahren zur herstellung eingebetteter wellenleiter - Google Patents
Verfahren zur herstellung eingebetteter wellenleiterInfo
- Publication number
- ATE135826T1 ATE135826T1 AT90890012T AT90890012T ATE135826T1 AT E135826 T1 ATE135826 T1 AT E135826T1 AT 90890012 T AT90890012 T AT 90890012T AT 90890012 T AT90890012 T AT 90890012T AT E135826 T1 ATE135826 T1 AT E135826T1
- Authority
- AT
- Austria
- Prior art keywords
- waveguides
- ions
- field
- exchanging
- embedded waveguides
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
- C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
- C03C21/002—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
- C03C21/003—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions under application of an electrical potential difference
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
- C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
- C03C21/005—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to introduce in the glass such metals or metallic ions as Ag, Cu
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Surface Treatment Of Glass (AREA)
- Waveguides (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Constitution Of High-Frequency Heating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/300,571 US4913717A (en) | 1989-01-23 | 1989-01-23 | Method for fabricating buried waveguides |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE135826T1 true ATE135826T1 (de) | 1996-04-15 |
Family
ID=23159662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT90890012T ATE135826T1 (de) | 1989-01-23 | 1990-01-19 | Verfahren zur herstellung eingebetteter wellenleiter |
Country Status (6)
Country | Link |
---|---|
US (1) | US4913717A (de) |
EP (1) | EP0380468B1 (de) |
JP (1) | JPH02221139A (de) |
AT (1) | ATE135826T1 (de) |
CA (1) | CA2007001A1 (de) |
DE (2) | DE380468T1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2672662B2 (ja) * | 1989-07-07 | 1997-11-05 | ホーヤ株式会社 | 光導波路の製造方法 |
JPH0791091B2 (ja) * | 1989-11-06 | 1995-10-04 | 日本板硝子株式会社 | 低損失埋込み導波路の製造方法 |
FI86226C (fi) * | 1990-07-10 | 1992-07-27 | Nokia Oy Ab | Foerfarande foer framstaellning av ljusvaogsledare medelst jonbytesteknik pao ett glassubstrat. |
EP0548385A1 (de) * | 1991-12-20 | 1993-06-30 | Corning Incorporated | Verfahren zur Vergrabung optischer Wellenleiter |
EP0548388B1 (de) * | 1991-12-20 | 1995-02-15 | Corning Incorporated | Verfahren und Vorrichtung zur Einbettung von Wellenleitern |
EP0818693A1 (de) * | 1992-07-08 | 1998-01-14 | Matsushita Electric Industrial Co., Ltd. | Optischer Wellenleiter und dessen Herstellungsverfahren |
DE19755416C1 (de) * | 1997-12-12 | 1999-06-10 | Bosch Gmbh Robert | Verfahren zur Herstellung von Lichtwellenleitern |
US6947651B2 (en) * | 2001-05-10 | 2005-09-20 | Georgia Tech Research Corporation | Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof |
KR100415625B1 (ko) * | 2001-08-06 | 2004-01-24 | 한국전자통신연구원 | 이온 교환법을 이용한 평면형 광도파로 제조 방법 |
FR2831277B1 (fr) * | 2001-10-23 | 2004-02-20 | Teem Photonics | Procede de fabrication d'un dispositif optique par echange d'ions dans un substrat |
DE10249095A1 (de) * | 2002-10-21 | 2004-04-29 | Fuji Magnetics Gmbh | Speichermedium |
DE10309826B4 (de) * | 2003-03-05 | 2009-11-12 | Schott Ag | Verfahren zum Strukturieren von Phosphatgläsern durch zerstörungsfreien Ionenaustausch, strukturierte Phosphatgläser und deren Verwendung |
DE10339837B4 (de) * | 2003-08-29 | 2008-10-02 | Schott Ag | Feldunterstützter Ionenaustausch aus kontinuierlich aufgebrachten Metallfilmen auf Glassubstraten |
DE102004035239B4 (de) * | 2004-07-21 | 2011-08-18 | boraident GmbH, 06118 | Verfahren zur Herstellung einer Prüfmarkierung von Glas und Verwendung der Prüfmarkierung zum Nachweis der bei der Erzeugung der Prüfmarkierung herrschenden Temperatur- und Zeitbedingungen |
US8312743B2 (en) * | 2005-05-18 | 2012-11-20 | City University Of Hong Kong | Method for fabricating buried ion-exchanged waveguides using field-assisted annealing |
FR2920426B1 (fr) | 2007-09-03 | 2011-05-06 | Saint Gobain | Substrat en verre a gradient d'indice de refraction et procede de fabrication |
FR2929415B1 (fr) * | 2008-03-27 | 2010-03-12 | Saint Gobain | Procede de fabrication d'elements optiques plans et elements obtenus |
FR2929370B1 (fr) * | 2008-03-27 | 2015-07-17 | Saint Gobain | Vitrage a lames deviant la lumiere par echange ionique |
DE102008043456A1 (de) * | 2008-11-04 | 2010-05-06 | BSH Bosch und Siemens Hausgeräte GmbH | Abdeckplatte aus Glas oder Keramik für ein Hausgerät und Verfahren zum Herstellen einer Abdeckplatte |
FR2939787A1 (fr) | 2008-12-15 | 2010-06-18 | Saint Gobain | Composition de verre adaptee a la realisation d'elements optiques plans |
FR2962124B1 (fr) * | 2010-07-01 | 2014-12-26 | Eurokera | Plaque de cuisson comprenant un guide d'ondes |
WO2013063207A1 (en) * | 2011-10-28 | 2013-05-02 | Corning Incorporated | Glass articles with infrared reflectivity and methods for making the same |
JP6172667B2 (ja) * | 2013-08-08 | 2017-08-02 | 国立大学法人東京工業大学 | 両面化学強化ガラスの製造方法 |
US20170022098A1 (en) * | 2014-04-02 | 2017-01-26 | Corning Incorporated | Electrochemical methods for chemical strengthening of glass and glass ceramics |
WO2016054349A1 (en) * | 2014-10-03 | 2016-04-07 | Corning Incorporated | Patterned ion-exchanged substrates and methods for making the same |
US9890075B2 (en) * | 2016-01-20 | 2018-02-13 | International Business Machines Corporation | Chemically strengthened glass and methods of making same |
CN109690373B (zh) * | 2016-07-15 | 2022-06-10 | 康宁股份有限公司 | 具有层叠结构的光波导制品及其形成方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5038342B2 (de) * | 1971-12-01 | 1975-12-09 | ||
US3857689A (en) * | 1971-12-28 | 1974-12-31 | Nippon Selfoc Co Ltd | Ion exchange process for manufacturing integrated optical circuits |
US3836348A (en) * | 1973-02-22 | 1974-09-17 | Nippon Selfoc Co Ltd | Method for manufacturing optical integrated circuits utilizing an external electric field |
US4155735A (en) * | 1977-11-30 | 1979-05-22 | Ppg Industries, Inc. | Electromigration method for making stained glass photomasks |
JPS60260445A (ja) * | 1984-06-04 | 1985-12-23 | Nippon Sheet Glass Co Ltd | ガラス物品の表面保護処理方法 |
-
1989
- 1989-01-23 US US07/300,571 patent/US4913717A/en not_active Expired - Fee Related
-
1990
- 1990-01-02 CA CA002007001A patent/CA2007001A1/en not_active Abandoned
- 1990-01-19 DE DE199090890012T patent/DE380468T1/de active Pending
- 1990-01-19 AT AT90890012T patent/ATE135826T1/de not_active IP Right Cessation
- 1990-01-19 JP JP2010481A patent/JPH02221139A/ja active Pending
- 1990-01-19 DE DE69025965T patent/DE69025965T2/de not_active Expired - Fee Related
- 1990-01-19 EP EP90890012A patent/EP0380468B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0380468B1 (de) | 1996-03-20 |
EP0380468A2 (de) | 1990-08-01 |
JPH02221139A (ja) | 1990-09-04 |
DE69025965D1 (de) | 1996-04-25 |
DE69025965T2 (de) | 1996-08-14 |
EP0380468A3 (de) | 1991-10-09 |
US4913717A (en) | 1990-04-03 |
DE380468T1 (de) | 1990-11-29 |
CA2007001A1 (en) | 1990-07-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification | ||
REN | Ceased due to non-payment of the annual fee |