DE69025807D1 - Beleuchtungssystem - Google Patents

Beleuchtungssystem

Info

Publication number
DE69025807D1
DE69025807D1 DE69025807T DE69025807T DE69025807D1 DE 69025807 D1 DE69025807 D1 DE 69025807D1 DE 69025807 T DE69025807 T DE 69025807T DE 69025807 T DE69025807 T DE 69025807T DE 69025807 D1 DE69025807 D1 DE 69025807D1
Authority
DE
Germany
Prior art keywords
lighting system
lighting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69025807T
Other languages
English (en)
Other versions
DE69025807T2 (de
Inventor
Haruo Uemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1167429A external-priority patent/JP2604471B2/ja
Priority claimed from JP1190157A external-priority patent/JP2575501B2/ja
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of DE69025807D1 publication Critical patent/DE69025807D1/de
Application granted granted Critical
Publication of DE69025807T2 publication Critical patent/DE69025807T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/0008—Reflectors for light sources providing for indirect lighting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
    • G02B19/0023—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors) at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)
DE69025807T 1989-06-29 1990-06-28 Beleuchtungssystem Expired - Fee Related DE69025807T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1167429A JP2604471B2 (ja) 1989-06-29 1989-06-29 照明用光学系
JP1190157A JP2575501B2 (ja) 1989-07-21 1989-07-21 照明用光学系

Publications (2)

Publication Number Publication Date
DE69025807D1 true DE69025807D1 (de) 1996-04-18
DE69025807T2 DE69025807T2 (de) 1996-10-24

Family

ID=26491477

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69025807T Expired - Fee Related DE69025807T2 (de) 1989-06-29 1990-06-28 Beleuchtungssystem

Country Status (3)

Country Link
US (1) US5555135A (de)
EP (1) EP0405563B1 (de)
DE (1) DE69025807T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5542742A (en) * 1994-03-23 1996-08-06 Ford Motor Company Integrated infant seat for vehicles
US7178947B2 (en) * 2004-06-04 2007-02-20 Dale Marks Lighting device with elliptical fresnel mirror
CN107508126B (zh) * 2016-06-14 2020-05-05 中国科学院上海光学精密机械研究所 一种含离轴抛面镜的激光光路调节方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697154A (en) * 1971-05-12 1972-10-10 Us Navy Optical viewing system
JPS5515007B2 (de) * 1974-03-19 1980-04-21
US4034217A (en) * 1974-06-21 1977-07-05 Roger Louis Dumont Optical device for lighting apparatus, with a plurality of combined reflectors
US4205902A (en) * 1978-10-12 1980-06-03 The Perkin-Elmer Corporation Laser beam expander
JPS57133631A (en) * 1981-02-13 1982-08-18 Hitachi Ltd Exposing device
JPS59151101A (ja) * 1983-02-08 1984-08-29 Toshiba Corp 凹面鏡
GB2141554A (en) * 1983-06-15 1984-12-19 Philips Electronic Associated A slit imaging system using two concave mirrors
JPH0670682B2 (ja) * 1983-08-19 1994-09-07 日照技研株式会社 照明装置
JPS60168147A (ja) * 1984-02-10 1985-08-31 Oak Seisakusho:Kk 露光装置
JPS60170818A (ja) * 1984-02-15 1985-09-04 Mitsubishi Electric Corp 太陽光疑似照射装置
US4643545A (en) * 1984-07-02 1987-02-17 The United States Of America As Represented By The Secretary Of The Army Reflecting aspheres of revolution for forming certain beams
US4762411A (en) * 1985-03-15 1988-08-09 The Boeing Company Boresight alignment verification device
US4639127A (en) * 1985-12-10 1987-01-27 Itt Corporation Exposure apparatus for printing system
DE3614639A1 (de) * 1986-04-30 1987-11-05 Messerschmitt Boelkow Blohm Abbildendes spektrometer
DE3772467D1 (de) * 1986-06-13 1991-10-02 Dainippon Screen Mfg Belichtungssystem.
US4747030A (en) * 1986-08-13 1988-05-24 The Perkin-Elmer Corporation Illumination system
SU1420583A1 (ru) * 1986-12-15 1988-08-30 Киевский Государственный Университет Им.Т.Г.Шевченко Отражательна система
US4989125A (en) * 1988-05-10 1991-01-29 Minnesota Mining And Manufacturing Company Reflector using fresnel-type structures having a plurality of active faces

Also Published As

Publication number Publication date
EP0405563B1 (de) 1996-03-13
EP0405563A2 (de) 1991-01-02
EP0405563A3 (en) 1992-03-04
US5555135A (en) 1996-09-10
DE69025807T2 (de) 1996-10-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee