DE69019913T2 - Atomkraftmikroskop. - Google Patents

Atomkraftmikroskop.

Info

Publication number
DE69019913T2
DE69019913T2 DE69019913T DE69019913T DE69019913T2 DE 69019913 T2 DE69019913 T2 DE 69019913T2 DE 69019913 T DE69019913 T DE 69019913T DE 69019913 T DE69019913 T DE 69019913T DE 69019913 T2 DE69019913 T2 DE 69019913T2
Authority
DE
Germany
Prior art keywords
atomic force
force microscope
microscope
atomic
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69019913T
Other languages
English (en)
Other versions
DE69019913D1 (de
Inventor
Masahiko Kato
Takao Okada
Hiroshi Kajimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP26206189A external-priority patent/JPH03123805A/ja
Priority claimed from JP26206289A external-priority patent/JPH03123810A/ja
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of DE69019913D1 publication Critical patent/DE69019913D1/de
Application granted granted Critical
Publication of DE69019913T2 publication Critical patent/DE69019913T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/87—Optical lever arm for reflecting light

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69019913T 1989-10-09 1990-10-08 Atomkraftmikroskop. Expired - Fee Related DE69019913T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26206189A JPH03123805A (ja) 1989-10-09 1989-10-09 原子間力顕微鏡
JP26206289A JPH03123810A (ja) 1989-10-09 1989-10-09 原子間力顕微鏡

Publications (2)

Publication Number Publication Date
DE69019913D1 DE69019913D1 (de) 1995-07-13
DE69019913T2 true DE69019913T2 (de) 1995-12-07

Family

ID=26545366

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69019913T Expired - Fee Related DE69019913T2 (de) 1989-10-09 1990-10-08 Atomkraftmikroskop.

Country Status (3)

Country Link
US (1) US5206702A (de)
EP (1) EP0422548B1 (de)
DE (1) DE69019913T2 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5394741A (en) * 1990-07-11 1995-03-07 Olympus Optical Co., Ltd. Atomic probe microscope
JPH0758193B2 (ja) * 1990-09-14 1995-06-21 三菱電機株式会社 原子間力顕微鏡の微動走査機構
US5157251A (en) * 1991-03-13 1992-10-20 Park Scientific Instruments Scanning force microscope having aligning and adjusting means
US5155361A (en) * 1991-07-26 1992-10-13 The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
JPH0540009A (ja) * 1991-08-08 1993-02-19 Nikon Corp 走査型トンネル顕微鏡
JPH0540034A (ja) * 1991-08-08 1993-02-19 Nikon Corp 複合型顕微鏡
JP2743761B2 (ja) * 1993-03-19 1998-04-22 松下電器産業株式会社 走査型プローブ顕微鏡および原子種同定方法
US5463897A (en) * 1993-08-17 1995-11-07 Digital Instruments, Inc. Scanning stylus atomic force microscope with cantilever tracking and optical access
DE4344499C2 (de) * 1993-12-24 1998-09-10 Forschungszentrum Juelich Gmbh Rastersondenmikroskop mit Detektorsonde
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
US6006594A (en) * 1994-05-11 1999-12-28 Dr. Khaled Und Dr. Miles Haines Gesellschaft Burgerlichen Rechts Scanning probe microscope head with signal processing circuit
GB2289759B (en) * 1994-05-11 1996-05-22 Khaled Karrau Coupled oscillator scanning imager
US5513518A (en) * 1994-05-19 1996-05-07 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
US5753814A (en) * 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5515719A (en) * 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
US5866805A (en) * 1994-05-19 1999-02-02 Molecular Imaging Corporation Arizona Board Of Regents Cantilevers for a magnetically driven atomic force microscope
JP3174465B2 (ja) * 1994-11-28 2001-06-11 松下電器産業株式会社 原子間力顕微鏡
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
JP3175913B2 (ja) * 1995-12-08 2001-06-11 セイコーインスツルメンツ株式会社 プローブ顕微鏡の制御方法
US5825020A (en) * 1996-09-06 1998-10-20 The Regents Of The University Of California Atomic force microscope for generating a small incident beam spot
US5861550A (en) 1997-10-14 1999-01-19 Raymax Technology, Incorporated Scanning force microscope
DE19754681A1 (de) * 1997-12-10 1999-06-17 Peter Heiland In einem Rastermodus abtastende Vorrichtung mit einer Kompensation des Störeinflusses vonmechanischen Schwingungen auf dem Abtastvorgang
US6455838B2 (en) 1998-10-06 2002-09-24 The Regents Of The University Of California High sensitivity deflection sensing device
US6178813B1 (en) * 1999-11-17 2001-01-30 The United States Of America As Represented By The Secretary Of The Army Vibration distortion removal for scanning probe microscopes
GB0007747D0 (en) * 2000-03-30 2000-05-17 Univ Bristol Methods and apparatus for atomic force microscopy
AU2002335671A1 (en) * 2001-08-23 2003-03-10 Asylum Research Corporation Diffractive optical position detector
US7230719B2 (en) * 2003-12-02 2007-06-12 National University Of Singapore High sensitivity scanning probe system
US20060033024A1 (en) * 2004-06-15 2006-02-16 Sparks Andrew W Scanning probe microscopy with inherent disturbance suppression
US7518731B2 (en) * 2005-02-01 2009-04-14 Chian Chiu Li Interferometric MOEMS sensor
GB0715102D0 (en) 2007-08-03 2007-09-12 Infinitesima Ltd Vibration correction for probe microscopy and a method thereof
US7854524B2 (en) * 2007-09-28 2010-12-21 Anorad Corporation High stiffness low mass supporting structure for a mirror assembly
WO2009147450A1 (en) * 2008-06-06 2009-12-10 Infinitesima Ltd Probe detection system
JP5164743B2 (ja) * 2008-08-27 2013-03-21 エスアイアイ・ナノテクノロジー株式会社 カンチレバー、カンチレバーシステム及びプローブ顕微鏡並びに吸着質量センサ
EP2336789A1 (de) * 2009-12-21 2011-06-22 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Parallelausleger-Deflektionsmessung
WO2011080362A1 (es) * 2009-12-31 2011-07-07 Fundacion Tekniker Dispositivo y procedimiento para la reducción del error de abbe en sistemas de microscopía
US20120047610A1 (en) * 2010-04-09 2012-02-23 Boise State University Cantilever-based optical interface force microscope
US8714023B2 (en) * 2011-03-10 2014-05-06 Qualcomm Mems Technologies, Inc. System and method for detecting surface perturbations
US8973161B2 (en) * 2012-06-22 2015-03-03 Rutgers, The State University Of New Jersey Method and apparatus for nanomechanical measurement using an atomic force microscope

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990007A (ja) * 1982-11-16 1984-05-24 Olympus Optical Co Ltd 光学式寸度測定装置
EP0194323B1 (de) * 1985-03-07 1989-08-02 International Business Machines Corporation Tunneleffektabtastungsmikroskop
US4724318A (en) * 1985-11-26 1988-02-09 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
EP0262253A1 (de) * 1986-10-03 1988-04-06 International Business Machines Corporation Mikromechanische Fühlervorrichtung für atomare Kräfte
DE3750406T2 (de) * 1987-05-12 1995-03-30 Ibm Atomarer Kräftesensor mit interferometrischer Messung der Eigenschaften eines Datenträgers.
GB8910566D0 (en) * 1989-05-08 1989-06-21 Amersham Int Plc Imaging apparatus and method
US5017010A (en) * 1989-05-16 1991-05-21 International Business Machines Corporation High sensitivity position sensor and method

Also Published As

Publication number Publication date
EP0422548A3 (en) 1991-07-31
DE69019913D1 (de) 1995-07-13
US5206702A (en) 1993-04-27
EP0422548B1 (de) 1995-06-07
EP0422548A2 (de) 1991-04-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee