DE3750406T2 - Atomarer Kräftesensor mit interferometrischer Messung der Eigenschaften eines Datenträgers. - Google Patents
Atomarer Kräftesensor mit interferometrischer Messung der Eigenschaften eines Datenträgers.Info
- Publication number
- DE3750406T2 DE3750406T2 DE3750406T DE3750406T DE3750406T2 DE 3750406 T2 DE3750406 T2 DE 3750406T2 DE 3750406 T DE3750406 T DE 3750406T DE 3750406 T DE3750406 T DE 3750406T DE 3750406 T2 DE3750406 T2 DE 3750406T2
- Authority
- DE
- Germany
- Prior art keywords
- properties
- force sensor
- data carrier
- atomic force
- interferometric measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
- G01R33/0385—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices in relation with magnetic force measurements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/002—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure
- G11B11/007—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure with reproducing by means directly associated with the tip of a microscopic electrical probe as defined in G11B9/14
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
- G11B17/32—Maintaining desired spacing between record carrier and head, e.g. by fluid-dynamic spacing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP87106900A EP0290648B1 (de) | 1987-05-12 | 1987-05-12 | Tastkopf für atomare Kräfte zum Untersuchen der Topographie einer Oberfläche |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3750406D1 DE3750406D1 (de) | 1994-09-22 |
DE3750406T2 true DE3750406T2 (de) | 1995-03-30 |
Family
ID=8196983
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3750406T Expired - Fee Related DE3750406T2 (de) | 1987-05-12 | 1987-05-12 | Atomarer Kräftesensor mit interferometrischer Messung der Eigenschaften eines Datenträgers. |
DE3750408T Expired - Fee Related DE3750408T2 (de) | 1987-05-12 | 1987-05-12 | Atomarer Kräftesensor zur Messung der Eigenschaften eines Datenträgers. |
DE8787106900T Expired - Fee Related DE3777402D1 (de) | 1987-05-12 | 1987-05-12 | Tastkopf fuer atomare kraefte zum untersuchen der topographie einer oberflaeche. |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3750408T Expired - Fee Related DE3750408T2 (de) | 1987-05-12 | 1987-05-12 | Atomarer Kräftesensor zur Messung der Eigenschaften eines Datenträgers. |
DE8787106900T Expired - Fee Related DE3777402D1 (de) | 1987-05-12 | 1987-05-12 | Tastkopf fuer atomare kraefte zum untersuchen der topographie einer oberflaeche. |
Country Status (4)
Country | Link |
---|---|
EP (3) | EP0442536B1 (de) |
JP (1) | JP2580244B2 (de) |
CA (1) | CA1308574C (de) |
DE (3) | DE3750406T2 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2656536B2 (ja) * | 1988-04-13 | 1997-09-24 | 株式会社日立製作所 | プローブおよびその製造方法 |
US5079958A (en) * | 1989-03-17 | 1992-01-14 | Olympus Optical Co., Ltd. | Sensor having a cantilever |
US5304924A (en) * | 1989-03-29 | 1994-04-19 | Canon Kabushiki Kaisha | Edge detector |
DE69002503T2 (de) * | 1989-03-29 | 1994-03-03 | Canon Kk | Kantendetektor. |
US5260824A (en) * | 1989-04-24 | 1993-11-09 | Olympus Optical Co., Ltd. | Atomic force microscope |
EP0560757B1 (de) * | 1989-06-23 | 1996-12-18 | The Board Of Trustees Of The Leland Stanford Junior University | Verfahren und vorrichtung zum speichern numerischer informationen in form gespeicherter ladungen |
DE3922589C2 (de) * | 1989-07-10 | 1994-12-01 | Forschungszentrum Juelich Gmbh | Rasterkraftmikroskop |
US5206702A (en) * | 1989-10-09 | 1993-04-27 | Olympus Optical Co., Ltd. | Technique for canceling the effect of external vibration on an atomic force microscope |
DE3942896A1 (de) * | 1989-12-23 | 1991-06-27 | Zeiss Carl Fa | Interferometrischer sensor zur messung von abstandsaenderungen einer kleinen flaeche |
JP3000491B2 (ja) * | 1991-04-10 | 2000-01-17 | キヤノン株式会社 | カンチレバーユニット及びこれを用いた情報処理装置、原子間力顕微鏡、磁力顕微鏡 |
US5298975A (en) * | 1991-09-27 | 1994-03-29 | International Business Machines Corporation | Combined scanning force microscope and optical metrology tool |
WO1993011413A1 (en) * | 1991-11-26 | 1993-06-10 | The Australian National University | Piezoelectric bimorph cantilevers for surface analysis instruments |
US5280173A (en) * | 1992-01-31 | 1994-01-18 | Brown University Research Foundation | Electric and electromagnetic field sensing system including an optical transducer |
USRE36488E (en) * | 1992-08-07 | 2000-01-11 | Veeco Instruments Inc. | Tapping atomic force microscope with phase or frequency detection |
US5347854A (en) * | 1992-09-22 | 1994-09-20 | International Business Machines Corporation | Two dimensional profiling with a contact force atomic force microscope |
DE4310349C2 (de) * | 1993-03-30 | 2000-11-16 | Inst Mikrotechnik Mainz Gmbh | Sensorkopf und Verfahren zu seiner Herstellung |
US5537863A (en) * | 1993-07-15 | 1996-07-23 | Nikon Corporation | Scanning probe microscope having a cantilever used therein |
JP3523688B2 (ja) * | 1994-07-06 | 2004-04-26 | オリンパス株式会社 | 試料測定用プローブ装置 |
US5565987A (en) * | 1995-03-23 | 1996-10-15 | Anvik Corporation | Fabry-Perot probe profilometer having feedback loop to maintain resonance |
US6246652B1 (en) | 1997-12-05 | 2001-06-12 | Hitachi, Ltd. | Device using sensor for small rotation angle |
JP4362559B2 (ja) | 1999-03-04 | 2009-11-11 | 独立行政法人理化学研究所 | 電気容量式力測定装置 |
US6388452B1 (en) * | 2000-04-20 | 2002-05-14 | Hewlett-Packard Company | Device for sensing media thickness using capacitance measurements |
KR100542557B1 (ko) | 2003-09-09 | 2006-01-11 | 삼성전자주식회사 | 박막 공진기와, 박막 공진기의 제조 방법 및 박막공진기를 구비하는 필터 |
US7230719B2 (en) | 2003-12-02 | 2007-06-12 | National University Of Singapore | High sensitivity scanning probe system |
JP5122775B2 (ja) * | 2006-08-23 | 2013-01-16 | 株式会社ミツトヨ | 測定装置 |
US9866066B2 (en) * | 2010-11-24 | 2018-01-09 | University Of Florida Research Foundation, Incorporated | Wireless power transfer via electrodynamic coupling |
CN105424300B (zh) * | 2015-11-06 | 2018-07-06 | 扬州大学 | 一种隧穿纤毛装置 |
CN111473895B (zh) * | 2020-03-16 | 2021-06-29 | 吉林大学 | 一种触觉传感器 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4481616A (en) * | 1981-09-30 | 1984-11-06 | Rca Corporation | Scanning capacitance microscope |
US4575822A (en) * | 1983-02-15 | 1986-03-11 | The Board Of Trustees Of The Leland Stanford Junior University | Method and means for data storage using tunnel current data readout |
-
1987
- 1987-05-12 EP EP91105520A patent/EP0442536B1/de not_active Expired - Lifetime
- 1987-05-12 EP EP91105521A patent/EP0440268B1/de not_active Expired - Lifetime
- 1987-05-12 DE DE3750406T patent/DE3750406T2/de not_active Expired - Fee Related
- 1987-05-12 DE DE3750408T patent/DE3750408T2/de not_active Expired - Fee Related
- 1987-05-12 DE DE8787106900T patent/DE3777402D1/de not_active Expired - Fee Related
- 1987-05-12 EP EP87106900A patent/EP0290648B1/de not_active Expired - Lifetime
-
1988
- 1988-04-12 JP JP63088363A patent/JP2580244B2/ja not_active Expired - Lifetime
- 1988-04-29 CA CA000565614A patent/CA1308574C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0442536B1 (de) | 1994-08-17 |
EP0442536A3 (en) | 1992-01-02 |
EP0290648B1 (de) | 1992-03-11 |
EP0442536A2 (de) | 1991-08-21 |
JP2580244B2 (ja) | 1997-02-12 |
EP0440268B1 (de) | 1994-08-17 |
EP0290648A1 (de) | 1988-11-17 |
DE3750408T2 (de) | 1995-03-30 |
DE3777402D1 (de) | 1992-04-16 |
DE3750408D1 (de) | 1994-09-22 |
DE3750406D1 (de) | 1994-09-22 |
EP0440268A3 (en) | 1992-01-02 |
CA1308574C (en) | 1992-10-13 |
EP0440268A2 (de) | 1991-08-07 |
JPS63309802A (ja) | 1988-12-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |