DE69011918D1 - Kodiereinrichtung. - Google Patents
Kodiereinrichtung.Info
- Publication number
- DE69011918D1 DE69011918D1 DE69011918T DE69011918T DE69011918D1 DE 69011918 D1 DE69011918 D1 DE 69011918D1 DE 69011918 T DE69011918 T DE 69011918T DE 69011918 T DE69011918 T DE 69011918T DE 69011918 D1 DE69011918 D1 DE 69011918D1
- Authority
- DE
- Germany
- Prior art keywords
- coding device
- coding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP77058/89 | 1989-03-28 | ||
JP7705889A JPH02254316A (ja) | 1989-03-28 | 1989-03-28 | 変位測定装置 |
JP154168/89 | 1989-06-16 | ||
JP15416889A JP2603338B2 (ja) | 1989-06-16 | 1989-06-16 | 変位測定装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
DE69011918D1 true DE69011918D1 (de) | 1994-10-06 |
DE69011918T2 DE69011918T2 (de) | 1995-01-05 |
DE69011918T3 DE69011918T3 (de) | 2004-07-22 |
Family
ID=26418165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69011918T Expired - Fee Related DE69011918T3 (de) | 1989-03-28 | 1990-03-27 | Kodiereinrichtung. |
Country Status (3)
Country | Link |
---|---|
US (1) | US5021649A (de) |
EP (1) | EP0390092B2 (de) |
DE (1) | DE69011918T3 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2073409A1 (en) * | 1991-10-15 | 1993-04-16 | Paul F. Sullivan | Light beam position detection and control apparatus employing diffraction patterns |
JP3008641B2 (ja) * | 1992-01-31 | 2000-02-14 | キヤノン株式会社 | 変位検出装置 |
GB2270379B (en) * | 1992-09-02 | 1997-01-22 | Mitutoyo Corp | Lattice interference-type displacement detection equipment |
US5424829A (en) * | 1992-09-02 | 1995-06-13 | Mitutoyo Corporation | Apparatus wherein diffracted light does not return to the source |
US6154278A (en) * | 1993-06-10 | 2000-11-28 | Matsushita Electric Industrial Co., Ltd. | Optical encoder for optically measuring displacement of moving body |
DE9311472U1 (de) * | 1993-07-31 | 1993-12-02 | Ucs Industrieelektronik Gmbh | Drehimpulsgeber mit Laserabtastung |
EP0742455B1 (de) * | 1995-04-13 | 2001-12-12 | Dr. Johannes Heidenhain GmbH | Ma stab und Verfahren zur Herstellung eines Ma stabes sowie Positionsmesseinrichtung |
JP3937596B2 (ja) | 1998-06-16 | 2007-06-27 | キヤノン株式会社 | 変位情報測定装置 |
JP3325840B2 (ja) * | 1998-10-19 | 2002-09-17 | 株式会社ミツトヨ | 反射型ホログラムスケール及びこれを用いた光学式変位測定装置 |
DE10025461A1 (de) * | 2000-05-23 | 2001-12-06 | Mahr Gmbh | Messeinrichtung nach dem Interferenzprinzip |
JP2005003539A (ja) * | 2003-06-12 | 2005-01-06 | Sharp Corp | 回転検出装置、及びそれを用いた入力機器 |
WO2005071363A1 (de) * | 2004-01-26 | 2005-08-04 | Hahn-Schickard- Gesellschaft Für Angewandte Forschune E.V. | Drehgeber und verfahren zum betreiben eines drehgebers |
US10591651B2 (en) * | 2005-09-30 | 2020-03-17 | Hiperscan Gmbh | Micro-optical electromagnetic radiation diffraction grating and method for manufacture |
KR101525373B1 (ko) * | 2006-01-19 | 2015-06-09 | 가부시키가이샤 니콘 | 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 패턴 형성 장치, 노광 방법 및 노광 장치, 그리고 디바이스 제조 방법 |
KR101356270B1 (ko) | 2006-02-21 | 2014-01-28 | 가부시키가이샤 니콘 | 패턴 형성 장치, 마크 검출 장치, 노광 장치, 패턴 형성 방법, 노광 방법 및 디바이스 제조 방법 |
JP5177674B2 (ja) * | 2006-02-21 | 2013-04-03 | 株式会社ニコン | 測定装置及び方法、パターン形成装置及び方法、並びにデバイス製造方法 |
WO2007097380A1 (ja) | 2006-02-21 | 2007-08-30 | Nikon Corporation | パターン形成装置及びパターン形成方法、移動体駆動システム及び移動体駆動方法、露光装置及び露光方法、並びにデバイス製造方法 |
TWI653511B (zh) | 2006-08-31 | 2019-03-11 | 日商尼康股份有限公司 | Exposure apparatus, exposure method, and component manufacturing method |
TWI422981B (zh) | 2006-08-31 | 2014-01-11 | 尼康股份有限公司 | Mobile body driving method and moving body driving system, pattern forming method and apparatus, exposure method and apparatus, and component manufacturing method |
EP2988320B1 (de) | 2006-08-31 | 2019-04-10 | Nikon Corporation | Belichtungsvorrichtung, belichtungsverfahren und vorrichtungsherstellungsverfahren |
CN101405837B (zh) | 2006-09-01 | 2012-08-29 | 株式会社尼康 | 移动体驱动方法、图案形成方法、曝光方法以及组件制造方法 |
KR20180085820A (ko) | 2006-09-01 | 2018-07-27 | 가부시키가이샤 니콘 | 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 디바이스 제조 방법, 그리고 캘리브레이션 방법 |
KR101360507B1 (ko) * | 2006-09-29 | 2014-02-07 | 가부시키가이샤 니콘 | 이동체 시스템, 패턴 형성 장치, 노광 장치 및 노광 방법, 그리고 디바이스 제조 방법 |
JP4962773B2 (ja) * | 2007-02-05 | 2012-06-27 | 株式会社ニコン | エンコーダ |
EP2075263A1 (de) * | 2007-12-17 | 2009-07-01 | Lanxess Inc. | Hydrierung eines dien-basierten Polymer-Latexes |
EP2072535A1 (de) * | 2007-12-17 | 2009-06-24 | Lanxess Inc. | Hydrierung eines dien-basierten Polymer-Latexes |
US11499848B2 (en) * | 2016-03-31 | 2022-11-15 | Pixart Imaging Inc. | Marker product and related optical detection system |
CN110389235B (zh) * | 2018-04-18 | 2021-10-08 | 原相科技股份有限公司 | 标记产品及其相关光学侦测系统 |
CN111656283B (zh) * | 2019-01-03 | 2021-09-14 | 京东方科技集团股份有限公司 | 模板制备方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4286871A (en) * | 1980-08-11 | 1981-09-01 | Keuffel & Esser Company | Photogrammetric measuring system |
JPS57157118A (en) * | 1981-03-24 | 1982-09-28 | Mitsutoyo Mfg Co Ltd | Photoelectric type displacement detecting device |
FR2504256A1 (fr) * | 1981-04-16 | 1982-10-22 | Euromask | Procede et dispositif de mesure optique de deplacement et application aux photorepeteurs sur tranche |
CA1141946A (en) * | 1981-08-21 | 1983-03-01 | National Research Council Of Canada | Viewing and measuring apparatus |
JPS59128519U (ja) * | 1983-02-17 | 1984-08-29 | 株式会社東芝 | 位置検出装置 |
JPH0619280B2 (ja) * | 1983-09-24 | 1994-03-16 | 名古屋大学長 | 光学式自動位置決め装置 |
US4656347A (en) * | 1984-01-30 | 1987-04-07 | Nippon Telegraph & Telephone Public Corporation | Diffraction grating position adjuster using a grating and a reflector |
NL8502679A (nl) * | 1985-10-01 | 1987-05-04 | Philips Nv | Optisch omzetelement en verplaatsingsmeter voorzien van dit element. |
JPS62132104A (ja) * | 1985-12-04 | 1987-06-15 | Futaba Corp | 測長装置 |
EP0253403B1 (de) * | 1986-07-18 | 1993-07-14 | Nec Corporation | Doppelbrechendes Beugungsgitter und optischer Kopf, in welchem ein linearpolarisierter Strahl auf dieses Gitter gelenkt wird |
US4705996A (en) * | 1986-10-03 | 1987-11-10 | Greyhawk Systems | Apparatus for positioning a rotating element |
EP0330150B1 (de) * | 1988-02-22 | 1993-05-05 | Victor Company Of Japan, Limited | Detektorsystem mit einem optischen rotierenden Kodierer zur Feststellung der Verschiebung einer beweglichen Vorrichtung |
-
1990
- 1990-03-20 US US07/496,259 patent/US5021649A/en not_active Expired - Lifetime
- 1990-03-27 DE DE69011918T patent/DE69011918T3/de not_active Expired - Fee Related
- 1990-03-27 EP EP90105852A patent/EP0390092B2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69011918T3 (de) | 2004-07-22 |
US5021649A (en) | 1991-06-04 |
DE69011918T2 (de) | 1995-01-05 |
EP0390092A3 (de) | 1991-03-06 |
EP0390092B1 (de) | 1994-08-31 |
EP0390092A2 (de) | 1990-10-03 |
EP0390092B2 (de) | 2004-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8366 | Restricted maintained after opposition proceedings | ||
8339 | Ceased/non-payment of the annual fee |