DE69009917D1 - Dünner magnetischer Film aus Fe-Si-Al-Legierung und Herstellungsverfahren. - Google Patents
Dünner magnetischer Film aus Fe-Si-Al-Legierung und Herstellungsverfahren.Info
- Publication number
- DE69009917D1 DE69009917D1 DE69009917T DE69009917T DE69009917D1 DE 69009917 D1 DE69009917 D1 DE 69009917D1 DE 69009917 T DE69009917 T DE 69009917T DE 69009917 T DE69009917 T DE 69009917T DE 69009917 D1 DE69009917 D1 DE 69009917D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- magnetic film
- alloy thin
- thin magnetic
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/14—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel
- H01F10/142—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel containing Si
- H01F10/145—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel containing Si containing Al, e.g. SENDUST
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
- H01F41/183—Sputtering targets therefor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23662489 | 1989-09-12 | ||
JP4952790 | 1990-03-02 | ||
JP2140261A JPH088169B2 (ja) | 1989-09-12 | 1990-05-30 | Fe―Si―Al合金磁性薄膜の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69009917D1 true DE69009917D1 (de) | 1994-07-21 |
DE69009917T2 DE69009917T2 (de) | 1994-10-20 |
Family
ID=27293668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1990609917 Expired - Fee Related DE69009917T2 (de) | 1989-09-12 | 1990-09-03 | Dünner magnetischer Film aus Fe-Si-Al-Legierung und Herstellungsverfahren. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0417951B1 (de) |
JP (1) | JPH088169B2 (de) |
DE (1) | DE69009917T2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE60043848D1 (de) * | 1999-12-28 | 2010-04-01 | Jgc Catalysts & Chemicals Ltd | Methode zur herstellung eines dielektrischen films mit einer niedrigen dielektrizitätskonstante und halbleiteranordnung mit so einem film |
CN105671498A (zh) * | 2011-09-30 | 2016-06-15 | 吉坤日矿日石金属株式会社 | Fe-Al型合金溅射靶 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60218821A (ja) * | 1984-04-14 | 1985-11-01 | Sony Corp | Fe−Al−Si系合金薄膜の製造方法 |
JPS60220914A (ja) * | 1984-04-18 | 1985-11-05 | Sony Corp | 磁性薄膜 |
JPS6324060A (ja) * | 1986-04-25 | 1988-02-01 | Nippon Kokan Kk <Nkk> | スパツタリング装置のタ−ゲツト |
JPS63188921A (ja) * | 1987-02-02 | 1988-08-04 | Nkk Corp | 軟磁性スパツタリングタ−ゲツトの製造方法 |
JPS6424403A (en) * | 1987-07-21 | 1989-01-26 | Sony Corp | Soft magnetic thin film |
-
1990
- 1990-05-30 JP JP2140261A patent/JPH088169B2/ja not_active Expired - Lifetime
- 1990-09-03 DE DE1990609917 patent/DE69009917T2/de not_active Expired - Fee Related
- 1990-09-03 EP EP19900309606 patent/EP0417951B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH088169B2 (ja) | 1996-01-29 |
JPH03278408A (ja) | 1991-12-10 |
EP0417951A2 (de) | 1991-03-20 |
EP0417951B1 (de) | 1994-06-15 |
EP0417951A3 (en) | 1992-01-22 |
DE69009917T2 (de) | 1994-10-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |