DE69007930D1 - System zur Aufspürung von Undichtigkeit unter Verwendung von Trägergas. - Google Patents
System zur Aufspürung von Undichtigkeit unter Verwendung von Trägergas.Info
- Publication number
- DE69007930D1 DE69007930D1 DE90120133T DE69007930T DE69007930D1 DE 69007930 D1 DE69007930 D1 DE 69007930D1 DE 90120133 T DE90120133 T DE 90120133T DE 69007930 T DE69007930 T DE 69007930T DE 69007930 D1 DE69007930 D1 DE 69007930D1
- Authority
- DE
- Germany
- Prior art keywords
- fore
- input
- detection system
- carrier gas
- leak detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR898913827A FR2653558B1 (fr) | 1989-10-23 | 1989-10-23 | Systeme de detection de fuites a gaz traceur. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69007930D1 true DE69007930D1 (de) | 1994-05-11 |
DE69007930T2 DE69007930T2 (de) | 1994-07-21 |
Family
ID=9386652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69007930T Expired - Fee Related DE69007930T2 (de) | 1989-10-23 | 1990-10-19 | System zur Aufspürung von Undichtigkeit unter Verwendung von Trägergas. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5107697A (de) |
EP (1) | EP0424830B1 (de) |
JP (1) | JPH03154837A (de) |
AT (1) | ATE104051T1 (de) |
DE (1) | DE69007930T2 (de) |
ES (1) | ES2053051T3 (de) |
FR (1) | FR2653558B1 (de) |
RU (1) | RU1809919C (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2666410B1 (fr) * | 1990-09-05 | 1993-10-08 | Alcatel Cit | Detecteur de fuite haut flux a trois filtres moleculaires. |
FR2667937B1 (fr) * | 1990-10-15 | 1995-03-10 | Cit Alcatel | Detecteur de fuite a gaz traceur. |
FR2681688B1 (fr) * | 1991-09-24 | 1993-11-19 | Alcatel Cit | Installation de detection de fuites de gaz utilisant la technique de reniflage. |
FR2681689B1 (fr) * | 1991-09-25 | 1993-11-12 | Alcatel Cit | Detecteur de fuite a gaz traceur. |
DE4442174A1 (de) * | 1994-11-26 | 1996-05-30 | Leybold Ag | Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu |
FR2784184B1 (fr) | 1998-10-01 | 2000-12-15 | Cit Alcatel | Detecteur de fuite compact |
US6626027B1 (en) * | 2001-06-12 | 2003-09-30 | Intertech Development Company | Method and apparatus for detecting a gas leak using nuclear magnetic resonance |
JP3947059B2 (ja) * | 2002-08-09 | 2007-07-18 | 株式会社アルバック | 逆拡散式ヘリウムリークディテクタの省電力化のための運転方法 |
FR2910964A1 (fr) * | 2007-01-03 | 2008-07-04 | Alcatel Lucent Sa | Dispositif et procede de detection rapide de fuites. |
US8555704B2 (en) * | 2008-10-20 | 2013-10-15 | Agilent Technologies, Inc. | Calibration systems and methods for tracer gas leak detection |
DE102013218506A1 (de) * | 2013-09-16 | 2015-03-19 | Inficon Gmbh | Schnüffellecksucher mit mehrstufiger Membranpumpe |
DE102013219464A1 (de) * | 2013-09-26 | 2015-03-26 | Inficon Gmbh | Evakuierung einer Folienkammer |
FR3070489B1 (fr) * | 2017-08-29 | 2020-10-23 | Pfeiffer Vacuum | Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester |
FR3072774B1 (fr) * | 2017-10-19 | 2019-11-15 | Pfeiffer Vacuum | Detecteur de fuites pour le controle de l'etancheite d'un objet a tester |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3690151A (en) * | 1968-07-25 | 1972-09-12 | Norton Co | Leak detector |
JPS56126733A (en) * | 1980-03-10 | 1981-10-05 | Nippon Sanso Kk | Detecting method for leakage of helium |
JPS57169647A (en) * | 1981-04-13 | 1982-10-19 | Ulvac Corp | He reverse diffusion type leakage detector using turbo molecular pump |
GB2190204B (en) * | 1986-05-09 | 1990-10-17 | Boc Group Plc | Improvement in leak detectors |
FR2606509B1 (fr) * | 1986-11-07 | 1989-06-30 | Cit Alcatel | Detecteur de fuite a helium |
DE3775213D1 (de) * | 1987-03-27 | 1992-01-23 | Leybold Ag | Lecksuchgeraet und betriebsverfahren dazu. |
EP0344345B1 (de) * | 1988-06-01 | 1991-09-18 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
DE3828588C1 (de) * | 1988-08-23 | 1989-12-07 | Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De |
-
1989
- 1989-10-23 FR FR898913827A patent/FR2653558B1/fr not_active Expired - Fee Related
-
1990
- 1990-10-19 EP EP90120133A patent/EP0424830B1/de not_active Expired - Lifetime
- 1990-10-19 ES ES90120133T patent/ES2053051T3/es not_active Expired - Lifetime
- 1990-10-19 DE DE69007930T patent/DE69007930T2/de not_active Expired - Fee Related
- 1990-10-19 AT AT90120133T patent/ATE104051T1/de not_active IP Right Cessation
- 1990-10-22 JP JP2284099A patent/JPH03154837A/ja active Pending
- 1990-10-22 RU SU904831332A patent/RU1809919C/ru active
- 1990-10-22 US US07/600,936 patent/US5107697A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69007930T2 (de) | 1994-07-21 |
FR2653558A1 (fr) | 1991-04-26 |
ES2053051T3 (es) | 1994-07-16 |
EP0424830B1 (de) | 1994-04-06 |
RU1809919C (ru) | 1993-04-15 |
US5107697A (en) | 1992-04-28 |
ATE104051T1 (de) | 1994-04-15 |
JPH03154837A (ja) | 1991-07-02 |
EP0424830A1 (de) | 1991-05-02 |
FR2653558B1 (fr) | 1994-06-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |