ATE104051T1 - System zur aufspuerung von undichtigkeit unter verwendung von traegergas. - Google Patents
System zur aufspuerung von undichtigkeit unter verwendung von traegergas.Info
- Publication number
- ATE104051T1 ATE104051T1 AT90120133T AT90120133T ATE104051T1 AT E104051 T1 ATE104051 T1 AT E104051T1 AT 90120133 T AT90120133 T AT 90120133T AT 90120133 T AT90120133 T AT 90120133T AT E104051 T1 ATE104051 T1 AT E104051T1
- Authority
- AT
- Austria
- Prior art keywords
- fore
- input
- pump
- carrier gas
- leak detection
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR898913827A FR2653558B1 (fr) | 1989-10-23 | 1989-10-23 | Systeme de detection de fuites a gaz traceur. |
EP90120133A EP0424830B1 (de) | 1989-10-23 | 1990-10-19 | System zur Aufspürung von Undichtigkeit unter Verwendung von Trägergas |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE104051T1 true ATE104051T1 (de) | 1994-04-15 |
Family
ID=9386652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT90120133T ATE104051T1 (de) | 1989-10-23 | 1990-10-19 | System zur aufspuerung von undichtigkeit unter verwendung von traegergas. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5107697A (de) |
EP (1) | EP0424830B1 (de) |
JP (1) | JPH03154837A (de) |
AT (1) | ATE104051T1 (de) |
DE (1) | DE69007930T2 (de) |
ES (1) | ES2053051T3 (de) |
FR (1) | FR2653558B1 (de) |
RU (1) | RU1809919C (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2666410B1 (fr) * | 1990-09-05 | 1993-10-08 | Alcatel Cit | Detecteur de fuite haut flux a trois filtres moleculaires. |
FR2667937B1 (fr) * | 1990-10-15 | 1995-03-10 | Cit Alcatel | Detecteur de fuite a gaz traceur. |
FR2681688B1 (fr) * | 1991-09-24 | 1993-11-19 | Alcatel Cit | Installation de detection de fuites de gaz utilisant la technique de reniflage. |
FR2681689B1 (fr) * | 1991-09-25 | 1993-11-12 | Alcatel Cit | Detecteur de fuite a gaz traceur. |
DE4442174A1 (de) * | 1994-11-26 | 1996-05-30 | Leybold Ag | Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu |
FR2784184B1 (fr) | 1998-10-01 | 2000-12-15 | Cit Alcatel | Detecteur de fuite compact |
US6626027B1 (en) * | 2001-06-12 | 2003-09-30 | Intertech Development Company | Method and apparatus for detecting a gas leak using nuclear magnetic resonance |
JP3947059B2 (ja) * | 2002-08-09 | 2007-07-18 | 株式会社アルバック | 逆拡散式ヘリウムリークディテクタの省電力化のための運転方法 |
FR2910964A1 (fr) * | 2007-01-03 | 2008-07-04 | Alcatel Lucent Sa | Dispositif et procede de detection rapide de fuites. |
US8555704B2 (en) * | 2008-10-20 | 2013-10-15 | Agilent Technologies, Inc. | Calibration systems and methods for tracer gas leak detection |
DE102013218506A1 (de) * | 2013-09-16 | 2015-03-19 | Inficon Gmbh | Schnüffellecksucher mit mehrstufiger Membranpumpe |
DE102013219464A1 (de) * | 2013-09-26 | 2015-03-26 | Inficon Gmbh | Evakuierung einer Folienkammer |
FR3070489B1 (fr) * | 2017-08-29 | 2020-10-23 | Pfeiffer Vacuum | Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester |
FR3072774B1 (fr) * | 2017-10-19 | 2019-11-15 | Pfeiffer Vacuum | Detecteur de fuites pour le controle de l'etancheite d'un objet a tester |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3690151A (en) * | 1968-07-25 | 1972-09-12 | Norton Co | Leak detector |
JPS56126733A (en) * | 1980-03-10 | 1981-10-05 | Nippon Sanso Kk | Detecting method for leakage of helium |
JPS57169647A (en) * | 1981-04-13 | 1982-10-19 | Ulvac Corp | He reverse diffusion type leakage detector using turbo molecular pump |
GB2190204B (en) * | 1986-05-09 | 1990-10-17 | Boc Group Plc | Improvement in leak detectors |
FR2606509B1 (fr) * | 1986-11-07 | 1989-06-30 | Cit Alcatel | Detecteur de fuite a helium |
DE3775213D1 (de) * | 1987-03-27 | 1992-01-23 | Leybold Ag | Lecksuchgeraet und betriebsverfahren dazu. |
EP0344345B1 (de) * | 1988-06-01 | 1991-09-18 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
DE3828588C1 (de) * | 1988-08-23 | 1989-12-07 | Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De |
-
1989
- 1989-10-23 FR FR898913827A patent/FR2653558B1/fr not_active Expired - Fee Related
-
1990
- 1990-10-19 EP EP90120133A patent/EP0424830B1/de not_active Expired - Lifetime
- 1990-10-19 ES ES90120133T patent/ES2053051T3/es not_active Expired - Lifetime
- 1990-10-19 DE DE69007930T patent/DE69007930T2/de not_active Expired - Fee Related
- 1990-10-19 AT AT90120133T patent/ATE104051T1/de not_active IP Right Cessation
- 1990-10-22 JP JP2284099A patent/JPH03154837A/ja active Pending
- 1990-10-22 RU SU904831332A patent/RU1809919C/ru active
- 1990-10-22 US US07/600,936 patent/US5107697A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69007930T2 (de) | 1994-07-21 |
FR2653558A1 (fr) | 1991-04-26 |
ES2053051T3 (es) | 1994-07-16 |
DE69007930D1 (de) | 1994-05-11 |
EP0424830B1 (de) | 1994-04-06 |
RU1809919C (ru) | 1993-04-15 |
US5107697A (en) | 1992-04-28 |
JPH03154837A (ja) | 1991-07-02 |
EP0424830A1 (de) | 1991-05-02 |
FR2653558B1 (fr) | 1994-06-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |