DE69002014D1 - Hydrostatische tragevorrichtung fuer eine gleitfuehrung. - Google Patents
Hydrostatische tragevorrichtung fuer eine gleitfuehrung.Info
- Publication number
- DE69002014D1 DE69002014D1 DE9090102016T DE69002014T DE69002014D1 DE 69002014 D1 DE69002014 D1 DE 69002014D1 DE 9090102016 T DE9090102016 T DE 9090102016T DE 69002014 T DE69002014 T DE 69002014T DE 69002014 D1 DE69002014 D1 DE 69002014D1
- Authority
- DE
- Germany
- Prior art keywords
- hydrostatic
- carrying device
- slide guide
- slide
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000002706 hydrostatic effect Effects 0.000 title 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
- F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
- F16C32/0651—Details of the bearing area per se
- F16C32/0659—Details of the bearing area per se of pockets or grooves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1024776A JPH0786369B2 (ja) | 1989-02-04 | 1989-02-04 | 角スライド静圧支承装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69002014D1 true DE69002014D1 (de) | 1993-07-29 |
DE69002014T2 DE69002014T2 (de) | 1994-02-03 |
Family
ID=12147579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE90102016T Expired - Fee Related DE69002014T2 (de) | 1989-02-04 | 1990-02-01 | Hydrostatische Tragevorrichtung für eine Gleitführung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4974970A (de) |
EP (1) | EP0382096B1 (de) |
JP (1) | JPH0786369B2 (de) |
DE (1) | DE69002014T2 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3128709B2 (ja) * | 1992-08-04 | 2001-01-29 | 株式会社新川 | 非接触型移動テーブル |
US5415470A (en) * | 1994-01-04 | 1995-05-16 | Centre De Recherches Camoplast Inc. | Clip for snowmobile track and snowmobile track provided with the same |
US5568981A (en) * | 1994-08-19 | 1996-10-29 | Read-Rite Corporation | Negative pressure air bearing slider |
CA2132807C (en) * | 1994-09-23 | 2001-05-01 | Denis Courtemanche | Track-belt for track driven vehicles |
CA2194082A1 (en) * | 1996-10-02 | 1998-04-03 | Maurice Beaudoin | Stamped-metal clip for use with an endless track belt cooperating with slide rails |
US6428210B1 (en) | 2000-07-11 | 2002-08-06 | Lintech Motion Control, Inc. | Precision air bearing slide and stage assembly for controlled linear motion |
JP2002054634A (ja) * | 2000-08-07 | 2002-02-20 | Nippon Steel Corp | 静圧気体軸受 |
JP2004144188A (ja) * | 2002-10-24 | 2004-05-20 | Nippon Steel Corp | 静圧気体軸受 |
JP4335697B2 (ja) * | 2004-01-06 | 2009-09-30 | 株式会社岡本工作機械製作所 | 油静圧直動案内装置 |
US20080111977A1 (en) * | 2006-11-14 | 2008-05-15 | Asml Holding N.V. | Compensation techniques for fluid and magnetic bearings |
JP5082929B2 (ja) * | 2008-02-29 | 2012-11-28 | 株式会社ニコン | 流体軸受、ステージ装置、露光装置、及びデバイス製造方法 |
JP5035123B2 (ja) * | 2008-06-05 | 2012-09-26 | 株式会社デンソー | 油静圧スライド装置 |
CN101769336B (zh) * | 2009-01-05 | 2013-02-13 | 鸿富锦精密工业(深圳)有限公司 | 空气导轨 |
JP2013130260A (ja) * | 2011-12-22 | 2013-07-04 | Canon Inc | 液体静圧直動案内装置 |
JP6559937B2 (ja) * | 2014-10-28 | 2019-08-14 | 東芝機械株式会社 | 油静圧案内機構および工作機械 |
CN106984979A (zh) * | 2017-04-09 | 2017-07-28 | 北京工业大学 | 一种井字形腔静压回转台油垫 |
CN108916225B (zh) * | 2018-06-21 | 2019-11-15 | 南京理工大学 | 一种方形导轨用直线轴承 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1366075A (fr) * | 1963-05-21 | 1964-07-10 | Commissariat Energie Atomique | Dispositif pour réduire les frottements entre deux corps en mouvement relatif |
US3508430A (en) * | 1968-02-13 | 1970-04-28 | Nat Machinery Co The | Forging machine with hydrostatic bearings |
GB1267515A (en) * | 1968-08-09 | 1972-03-22 | Marconi Co Ltd | Improvements in or relating to bearings |
FR2512509A1 (fr) * | 1981-09-10 | 1983-03-11 | Commissariat Energie Atomique | Palier fluide de guidage pour arbre polygonal |
DE3203126A1 (de) * | 1982-01-30 | 1983-08-04 | Závody t'ažkého strojárstva, N.P., 01841 Dubnica nad Váhom | Hydrostatisches axiallager |
JPS5913120A (ja) * | 1982-07-09 | 1984-01-23 | Matsushita Electric Ind Co Ltd | 静圧流体軸受 |
JPS5913119A (ja) * | 1982-07-09 | 1984-01-23 | Matsushita Electric Ind Co Ltd | 静圧流体軸受 |
JPS60150950A (ja) * | 1984-01-20 | 1985-08-08 | Hitachi Ltd | 案内装置 |
JPH0230186Y2 (de) * | 1985-11-19 | 1990-08-14 | ||
US4865465A (en) * | 1987-08-20 | 1989-09-12 | Toyoda Koki Kabushiki Kaisha | Hydrostatically supporting device for slide |
-
1989
- 1989-02-04 JP JP1024776A patent/JPH0786369B2/ja not_active Expired - Lifetime
-
1990
- 1990-01-24 US US07/469,318 patent/US4974970A/en not_active Expired - Lifetime
- 1990-02-01 DE DE90102016T patent/DE69002014T2/de not_active Expired - Fee Related
- 1990-02-01 EP EP90102016A patent/EP0382096B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02209620A (ja) | 1990-08-21 |
EP0382096B1 (de) | 1993-06-23 |
US4974970A (en) | 1990-12-04 |
EP0382096A1 (de) | 1990-08-16 |
DE69002014T2 (de) | 1994-02-03 |
JPH0786369B2 (ja) | 1995-09-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |