DE69002014D1 - Hydrostatische tragevorrichtung fuer eine gleitfuehrung. - Google Patents

Hydrostatische tragevorrichtung fuer eine gleitfuehrung.

Info

Publication number
DE69002014D1
DE69002014D1 DE9090102016T DE69002014T DE69002014D1 DE 69002014 D1 DE69002014 D1 DE 69002014D1 DE 9090102016 T DE9090102016 T DE 9090102016T DE 69002014 T DE69002014 T DE 69002014T DE 69002014 D1 DE69002014 D1 DE 69002014D1
Authority
DE
Germany
Prior art keywords
hydrostatic
carrying device
slide guide
slide
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE9090102016T
Other languages
English (en)
Other versions
DE69002014T2 (de
Inventor
Kazuhiko Sugita
Kazuhisa Sugiyama
Yasumasa Nakane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Koki KK
Original Assignee
Toyoda Koki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Koki KK filed Critical Toyoda Koki KK
Publication of DE69002014D1 publication Critical patent/DE69002014D1/de
Application granted granted Critical
Publication of DE69002014T2 publication Critical patent/DE69002014T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0651—Details of the bearing area per se
    • F16C32/0659—Details of the bearing area per se of pockets or grooves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE90102016T 1989-02-04 1990-02-01 Hydrostatische Tragevorrichtung für eine Gleitführung. Expired - Fee Related DE69002014T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1024776A JPH0786369B2 (ja) 1989-02-04 1989-02-04 角スライド静圧支承装置

Publications (2)

Publication Number Publication Date
DE69002014D1 true DE69002014D1 (de) 1993-07-29
DE69002014T2 DE69002014T2 (de) 1994-02-03

Family

ID=12147579

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90102016T Expired - Fee Related DE69002014T2 (de) 1989-02-04 1990-02-01 Hydrostatische Tragevorrichtung für eine Gleitführung.

Country Status (4)

Country Link
US (1) US4974970A (de)
EP (1) EP0382096B1 (de)
JP (1) JPH0786369B2 (de)
DE (1) DE69002014T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3128709B2 (ja) * 1992-08-04 2001-01-29 株式会社新川 非接触型移動テーブル
US5415470A (en) * 1994-01-04 1995-05-16 Centre De Recherches Camoplast Inc. Clip for snowmobile track and snowmobile track provided with the same
US5568981A (en) * 1994-08-19 1996-10-29 Read-Rite Corporation Negative pressure air bearing slider
CA2132807C (en) * 1994-09-23 2001-05-01 Denis Courtemanche Track-belt for track driven vehicles
CA2194082A1 (en) * 1996-10-02 1998-04-03 Maurice Beaudoin Stamped-metal clip for use with an endless track belt cooperating with slide rails
US6428210B1 (en) 2000-07-11 2002-08-06 Lintech Motion Control, Inc. Precision air bearing slide and stage assembly for controlled linear motion
JP2002054634A (ja) * 2000-08-07 2002-02-20 Nippon Steel Corp 静圧気体軸受
JP2004144188A (ja) * 2002-10-24 2004-05-20 Nippon Steel Corp 静圧気体軸受
JP4335697B2 (ja) * 2004-01-06 2009-09-30 株式会社岡本工作機械製作所 油静圧直動案内装置
US20080111977A1 (en) * 2006-11-14 2008-05-15 Asml Holding N.V. Compensation techniques for fluid and magnetic bearings
JP5082929B2 (ja) * 2008-02-29 2012-11-28 株式会社ニコン 流体軸受、ステージ装置、露光装置、及びデバイス製造方法
JP5035123B2 (ja) * 2008-06-05 2012-09-26 株式会社デンソー 油静圧スライド装置
CN101769336B (zh) * 2009-01-05 2013-02-13 鸿富锦精密工业（深圳）有限公司 空气导轨
JP2013130260A (ja) * 2011-12-22 2013-07-04 Canon Inc 液体静圧直動案内装置
JP6559937B2 (ja) * 2014-10-28 2019-08-14 東芝機械株式会社 油静圧案内機構および工作機械
CN106984979A (zh) * 2017-04-09 2017-07-28 北京工业大学 一种井字形腔静压回转台油垫
CN108916225B (zh) * 2018-06-21 2019-11-15 南京理工大学 一种方形导轨用直线轴承

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1366075A (fr) * 1963-05-21 1964-07-10 Commissariat Energie Atomique Dispositif pour réduire les frottements entre deux corps en mouvement relatif
US3508430A (en) * 1968-02-13 1970-04-28 Nat Machinery Co The Forging machine with hydrostatic bearings
GB1267515A (en) * 1968-08-09 1972-03-22 Marconi Co Ltd Improvements in or relating to bearings
FR2512509A1 (fr) * 1981-09-10 1983-03-11 Commissariat Energie Atomique Palier fluide de guidage pour arbre polygonal
DE3203126A1 (de) * 1982-01-30 1983-08-04 Závody t'ažkého strojárstva, N.P., 01841 Dubnica nad Váhom Hydrostatisches axiallager
JPS5913120A (ja) * 1982-07-09 1984-01-23 Matsushita Electric Ind Co Ltd 静圧流体軸受
JPS5913119A (ja) * 1982-07-09 1984-01-23 Matsushita Electric Ind Co Ltd 静圧流体軸受
JPS60150950A (ja) * 1984-01-20 1985-08-08 Hitachi Ltd 案内装置
JPH0230186Y2 (de) * 1985-11-19 1990-08-14
US4865465A (en) * 1987-08-20 1989-09-12 Toyoda Koki Kabushiki Kaisha Hydrostatically supporting device for slide

Also Published As

Publication number Publication date
JPH02209620A (ja) 1990-08-21
EP0382096B1 (de) 1993-06-23
US4974970A (en) 1990-12-04
EP0382096A1 (de) 1990-08-16
DE69002014T2 (de) 1994-02-03
JPH0786369B2 (ja) 1995-09-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee