DE68925061D1 - Integrierte Hochspannungsschaltung mit Isolierungsübergang - Google Patents

Integrierte Hochspannungsschaltung mit Isolierungsübergang

Info

Publication number
DE68925061D1
DE68925061D1 DE68925061T DE68925061T DE68925061D1 DE 68925061 D1 DE68925061 D1 DE 68925061D1 DE 68925061 T DE68925061 T DE 68925061T DE 68925061 T DE68925061 T DE 68925061T DE 68925061 D1 DE68925061 D1 DE 68925061D1
Authority
DE
Germany
Prior art keywords
voltage circuit
integrated high
insulation transition
insulation
transition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68925061T
Other languages
English (en)
Other versions
DE68925061T2 (de
Inventor
Giovanni Siepe
Lucia Zullino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SRL
Original Assignee
SGS Thomson Microelectronics SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGS Thomson Microelectronics SRL filed Critical SGS Thomson Microelectronics SRL
Publication of DE68925061D1 publication Critical patent/DE68925061D1/de
Application granted granted Critical
Publication of DE68925061T2 publication Critical patent/DE68925061T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7813Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/402Field plates

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
DE68925061T 1988-04-27 1989-04-06 Integrierte Hochspannungsschaltung mit Isolierungsübergang Expired - Fee Related DE68925061T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT20349/88A IT1217214B (it) 1988-04-27 1988-04-27 Circuito integrato per alta tensione con isolamento a giunzione

Publications (2)

Publication Number Publication Date
DE68925061D1 true DE68925061D1 (de) 1996-01-25
DE68925061T2 DE68925061T2 (de) 1996-05-09

Family

ID=11165942

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68925061T Expired - Fee Related DE68925061T2 (de) 1988-04-27 1989-04-06 Integrierte Hochspannungsschaltung mit Isolierungsübergang

Country Status (4)

Country Link
EP (1) EP0339322B1 (de)
JP (1) JPH01316971A (de)
DE (1) DE68925061T2 (de)
IT (1) IT1217214B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5426325A (en) * 1993-08-04 1995-06-20 Siliconix Incorporated Metal crossover in high voltage IC with graduated doping control
US5959342A (en) * 1993-12-08 1999-09-28 Lucent Technologies Inc. Semiconductor device having a high voltage termination improvement
JP2005236229A (ja) * 2004-02-23 2005-09-02 Sansha Electric Mfg Co Ltd 高逆耐圧igbtの構造とその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2241600A1 (de) * 1971-08-26 1973-03-01 Dionics Inc Hochspannungs-p-n-uebergang und seine anwendung in halbleiterschaltelementen, sowie verfahren zu seiner herstellung
IT1085486B (it) * 1977-05-30 1985-05-28 Ates Componenti Elettron Struttura a semiconduttore integrata monolitica con giunzioni planari schermate da campi elettrostatici esterni
JPS57160159A (en) * 1981-03-28 1982-10-02 Toshiba Corp High breakdown voltage planar type semiconductor device
NL8401983A (nl) * 1984-06-22 1986-01-16 Philips Nv Halfgeleiderinrichting met verhoogde doorslagspanning.

Also Published As

Publication number Publication date
EP0339322A3 (en) 1990-06-13
JPH01316971A (ja) 1989-12-21
EP0339322A2 (de) 1989-11-02
DE68925061T2 (de) 1996-05-09
EP0339322B1 (de) 1995-12-13
IT1217214B (it) 1990-03-14
IT8820349A0 (it) 1988-04-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: STMICROELECTRONICS S.R.L., AGRATE BRIANZA, MAILAND

8339 Ceased/non-payment of the annual fee