DE68923722T2 - Verfahren zur Strahlungsthermometrie. - Google Patents
Verfahren zur Strahlungsthermometrie.Info
- Publication number
- DE68923722T2 DE68923722T2 DE68923722T DE68923722T DE68923722T2 DE 68923722 T2 DE68923722 T2 DE 68923722T2 DE 68923722 T DE68923722 T DE 68923722T DE 68923722 T DE68923722 T DE 68923722T DE 68923722 T2 DE68923722 T2 DE 68923722T2
- Authority
- DE
- Germany
- Prior art keywords
- radiation thermometry
- thermometry
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005855 radiation Effects 0.000 title 1
- 238000004861 thermometry Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0037—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the heat emitted by liquids
- G01J5/004—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the heat emitted by liquids by molten metals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0044—Furnaces, ovens, kilns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/026—Control of working procedures of a pyrometer, other than calibration; Bandwidth calculation; Gain control
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0275—Control or determination of height or distance or angle information for sensors or receivers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/05—Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/05—Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path
- G01J5/051—Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path using a gas purge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0801—Means for wavelength selection or discrimination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
- G01J5/0804—Shutters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
- G01J5/0805—Means for chopping radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/59—Radiation pyrometry, e.g. infrared or optical thermometry using polarisation; Details thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
- G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
- G01J5/802—Calibration by correcting for emissivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0074—Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/175,051 US4881823A (en) | 1988-03-29 | 1988-03-29 | Radiation thermometry |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68923722D1 DE68923722D1 (de) | 1995-09-14 |
DE68923722T2 true DE68923722T2 (de) | 1996-04-18 |
Family
ID=22638647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68923722T Expired - Lifetime DE68923722T2 (de) | 1988-03-29 | 1989-03-21 | Verfahren zur Strahlungsthermometrie. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4881823A (de) |
EP (1) | EP0335224B1 (de) |
JP (1) | JPH0623672B2 (de) |
DE (1) | DE68923722T2 (de) |
Families Citing this family (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5132922A (en) * | 1989-01-12 | 1992-07-21 | Massachusetts Institute Of Technology | Emissivity independent multiwavelength pyrometer |
US5249142A (en) * | 1989-03-31 | 1993-09-28 | Tokyo Electron Kyushu Limited | Indirect temperature-measurement of films formed on semiconductor wafers |
US5150969A (en) * | 1990-03-12 | 1992-09-29 | Ivac Corporation | System and method for temperature determination and calibration in a biomedical probe |
US5165791A (en) * | 1990-09-18 | 1992-11-24 | Sumitomo Electric Industries, Ltd. | Method and apparatus for measuring temperature based on infrared light |
US5114242A (en) * | 1990-12-07 | 1992-05-19 | Ag Processing Technologies, Inc. | Bichannel radiation detection method |
US5165796A (en) * | 1990-12-07 | 1992-11-24 | Ag Processing Technologies, Inc. | Bichannel radiation detection apparatus |
US5086220A (en) * | 1991-02-05 | 1992-02-04 | The Babcock & Wilcox Company | Radiation imaging fiber optic temperature distribution monitor |
JPH04333529A (ja) * | 1991-05-07 | 1992-11-20 | Nippon Steel Corp | ストリップ連続熱処理設備用冷却装置 |
US5186541A (en) * | 1991-10-21 | 1993-02-16 | Gentri Controls, Inc. | Non-contact infrared temperature sensing system |
US5314249A (en) * | 1991-11-19 | 1994-05-24 | Kawasaki Steel Corporation | Surface condition measurement apparatus |
DE69209270T2 (de) * | 1991-12-13 | 1996-08-08 | Kawasaki Steel Co | Verfahren und Vorrichtung zur Prozesssteuerung eines Strahlung aussendenden Materials |
CH685405A5 (de) * | 1992-10-06 | 1995-06-30 | Alusuisse Lonza Services Ag | Temperaturmessung mit Zweiwellenlängenpyrometern. |
FR2703455B1 (fr) * | 1993-04-01 | 1995-05-12 | Europ Gas Turbines Sa | Pyromètre bichromatique. |
US5505543A (en) * | 1994-01-21 | 1996-04-09 | The Boeing Company | Emissivity measurement apparatus and method |
MY113681A (en) * | 1994-03-22 | 2002-04-30 | Casio Computer Co Ltd | Thermometer |
JPH07324982A (ja) * | 1994-05-30 | 1995-12-12 | Nkk Corp | 消耗型光ファイバ温度計 |
US5868496A (en) * | 1994-06-28 | 1999-02-09 | Massachusetts Institute Of Technology | Non-contact surface temperature, emissivity, and area estimation |
US6179466B1 (en) * | 1994-12-19 | 2001-01-30 | Applied Materials, Inc. | Method and apparatus for measuring substrate temperatures |
US5660472A (en) * | 1994-12-19 | 1997-08-26 | Applied Materials, Inc. | Method and apparatus for measuring substrate temperatures |
US5755511A (en) * | 1994-12-19 | 1998-05-26 | Applied Materials, Inc. | Method and apparatus for measuring substrate temperatures |
IL117951A (en) * | 1995-09-06 | 1999-09-22 | 3T True Temperature Technologi | Method and apparatus for true temperature determination |
FI100135B (fi) * | 1996-01-05 | 1997-09-30 | Vaisala Oy | Menetelmä ja lämpötila-anturirakenne säteilyvirheen eliminoimiseksi |
US5690430A (en) * | 1996-03-15 | 1997-11-25 | Bethlehem Steel Corporation | Apparatus and method for measuring temperature and/or emissivity of steel strip during a coating process |
US5864776A (en) * | 1997-08-27 | 1999-01-26 | Mitsubishi Electric America, Inc. | Apparatus and method for detecting an error in the placement of a lead frame on a surface of a die mold |
DE19853513A1 (de) * | 1997-11-21 | 1999-05-27 | Omega Engineering | Kombination aus Pyrometer und Multimeter |
US7155363B1 (en) * | 1997-12-01 | 2006-12-26 | Mks Instruments, Inc. | Thermal imaging for semiconductor process monitoring |
DE19757447A1 (de) * | 1997-12-23 | 1999-07-01 | Braun Gmbh | Temperaturberechnungsverfahren für Strahlungsthermometer |
US6007241A (en) * | 1998-02-20 | 1999-12-28 | Applied Materials, Inc. | Apparatus and method for measuring substrate temperature |
US6183130B1 (en) | 1998-02-20 | 2001-02-06 | Applied Materials, Inc. | Apparatus for substrate temperature measurement using a reflecting cavity and detector |
US6379038B1 (en) * | 1998-06-22 | 2002-04-30 | Ralph A. Felice | Temperature determining device and process |
US6174080B1 (en) | 1998-08-06 | 2001-01-16 | Applied Materials, Inc. | Apparatus and methods for measuring substrate temperature |
US6164816A (en) * | 1998-08-14 | 2000-12-26 | Applied Materials, Inc. | Tuning a substrate temperature measurement system |
AU3726100A (en) * | 1999-03-08 | 2000-09-28 | C.I. Systems Ltd. | Method and apparatus for active pyrometric measurement of the temperature of a body whose emissivity varies with wavelength |
US6947802B2 (en) * | 2000-04-10 | 2005-09-20 | Hypertherm, Inc. | Centralized control architecture for a laser materials processing system |
US7186947B2 (en) * | 2003-03-31 | 2007-03-06 | Hypertherm, Inc. | Process monitor for laser and plasma materials processing of materials |
AU2004271181A1 (en) * | 2003-09-04 | 2005-03-17 | Quartex | Temperature measuring apparatus |
JP2007218591A (ja) * | 2006-02-14 | 2007-08-30 | Toyo Univ | ハイブリッド型表面温度計、温度分布測定装置及び測定方法 |
EP2250720B1 (de) | 2008-03-07 | 2019-08-14 | Milwaukee Electric Tool Corporation | Batteriepackung für ein elektrowerkzeug und ein nicht motorisiertes abtastwerkzeug |
US20090257469A1 (en) * | 2008-04-09 | 2009-10-15 | Jones Mike N | Infrared thermometer |
EP2365307B1 (de) * | 2009-05-12 | 2012-07-18 | LayTec Aktiengesellschaft | Verfahren zur Kalibrierung eines Pyrometers, Verfahren zur Bestimmung der Temperatur eines Halbleiterwafers und System zur Bestimmung der Temperatur eines Halbleiterwafers |
FR2973507B1 (fr) * | 2011-03-29 | 2013-04-26 | Univ Paris Ouest Nanterre La Defense | Mesure de l'emissitivite thermique d'un corps |
JP6035831B2 (ja) | 2012-04-13 | 2016-11-30 | Jfeスチール株式会社 | 温度測定方法および温度測定装置 |
CN103900723B (zh) | 2014-04-25 | 2016-08-24 | 天津送变电易通电力科技有限公司 | 利用辐射谱的全部信息测火焰实际温度的方法及测量系统 |
JP6734153B2 (ja) * | 2015-09-16 | 2020-08-05 | 三菱マテリアル株式会社 | 被測定物の温度、粉塵の温度及び粉塵の濃度を計測する方法 |
CN105319239B (zh) * | 2015-12-03 | 2017-11-28 | 河南师范大学 | 一种材料极化方向发射率测量装置的控制方法 |
FR3059824B1 (fr) * | 2016-12-07 | 2019-06-21 | Ulis | Capteur d'image infrarouge |
CN108168709B (zh) * | 2017-12-21 | 2019-10-15 | 合肥工业大学 | 一种托卡马克偏滤器靶板温度精确测量方法 |
JP7120834B2 (ja) * | 2018-07-11 | 2022-08-17 | 株式会社神戸製鋼所 | 酸化膜厚測定装置および該方法 |
CN117232661B (zh) * | 2023-11-16 | 2024-02-23 | 中国人民解放军63921部队 | 一种多通道红外辐射测量系统及多波长实时温度测量方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1179733B (de) * | 1960-09-16 | 1964-10-15 | Siemens Ag | Korrekturschaltung fuer Farbpyrometer |
US3537314A (en) * | 1966-04-09 | 1970-11-03 | Dary Yakovlevich Svet | Method and apparatus for measuring true or actual temperature of bodies by radiant energy |
US3608817A (en) * | 1968-12-09 | 1971-09-28 | Dary Yakovlevich Svet | Method of controlling color of an object by its radiation and device for accomplishing the same |
US3611805A (en) * | 1969-07-28 | 1971-10-12 | Chino Works Ltd | Radiation thermometer |
US3616592A (en) * | 1970-02-09 | 1971-11-02 | Irving Rothman | Method of constructing building units |
SU386269A1 (ru) * | 1971-04-22 | 1973-06-14 | Спектральный способ определения излучательнои способности нагретых тел | |
US4020695A (en) * | 1975-09-18 | 1977-05-03 | Jones & Laughlin Steel Corporation | Method and apparatus for measurement of surface temperature |
JPS6046371B2 (ja) * | 1977-04-04 | 1985-10-15 | 新日本製鐵株式会社 | 金属の表面温度と放射率の同時測定方法および装置 |
GB1599949A (en) * | 1977-04-04 | 1981-10-07 | Nippon Steel Corp | Method and an apparatus for simultaneous measurement of both temperature and emissivity of a heated material |
JPS55144513A (en) * | 1979-04-28 | 1980-11-11 | Jeol Ltd | Measuring method of emissivity |
JPS6038646B2 (ja) * | 1979-06-05 | 1985-09-02 | 昭和電工株式会社 | 放射率測定法 |
JPS5635026A (en) * | 1979-08-30 | 1981-04-07 | Toshiba Corp | Temperature estimating system for heated object |
JPS6049849B2 (ja) * | 1980-08-01 | 1985-11-05 | 新日本製鐵株式会社 | 物体の表面温度と放射率の測定装置 |
JPS57153228A (en) * | 1981-03-18 | 1982-09-21 | Shimadzu Corp | Measuring apparatus for temperature of atomizing furnace of sample for atom absorptiometry |
DE3115887C2 (de) * | 1981-04-21 | 1986-07-03 | Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln | Verfahren und Vorrichtung zur berührungslosen Infrarot-Strahlungsmessung der Temperatur eines Strahlers |
FR2508637A1 (fr) * | 1981-06-25 | 1982-12-31 | Paris X Nanterre Universite | Perfectionnements apportes aux procedes de mesures a distance de l'emissivite et/ou de la temperature vraie d'un corps a surface relativment lisse |
JPS58169038A (ja) * | 1982-03-31 | 1983-10-05 | Nippon Light Metal Co Ltd | 二色形放射温度計 |
US4579461A (en) * | 1983-02-14 | 1986-04-01 | United States Steel Corporation | Dual sensor radiation pyrometer |
JPS60152924A (ja) * | 1984-01-23 | 1985-08-12 | Ulvac Corp | 放射温度測定方法 |
JPS60165524A (ja) * | 1984-02-08 | 1985-08-28 | Ulvac Corp | 放射率測定方法 |
US4561786A (en) * | 1984-03-15 | 1985-12-31 | Williamson Corporation | Temperature measuring apparatus |
US4708493A (en) * | 1986-05-19 | 1987-11-24 | Quantum Logic Corporation | Apparatus for remote measurement of temperatures |
-
1988
- 1988-03-29 US US07/175,051 patent/US4881823A/en not_active Expired - Lifetime
- 1988-10-28 JP JP63271047A patent/JPH0623672B2/ja not_active Expired - Lifetime
-
1989
- 1989-03-21 DE DE68923722T patent/DE68923722T2/de not_active Expired - Lifetime
- 1989-03-21 EP EP89104999A patent/EP0335224B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE68923722D1 (de) | 1995-09-14 |
JPH0623672B2 (ja) | 1994-03-30 |
EP0335224A2 (de) | 1989-10-04 |
EP0335224B1 (de) | 1995-08-09 |
US4881823A (en) | 1989-11-21 |
EP0335224A3 (en) | 1990-10-31 |
JPH0285730A (ja) | 1990-03-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |