DE68923722T2 - Verfahren zur Strahlungsthermometrie. - Google Patents

Verfahren zur Strahlungsthermometrie.

Info

Publication number
DE68923722T2
DE68923722T2 DE68923722T DE68923722T DE68923722T2 DE 68923722 T2 DE68923722 T2 DE 68923722T2 DE 68923722 T DE68923722 T DE 68923722T DE 68923722 T DE68923722 T DE 68923722T DE 68923722 T2 DE68923722 T2 DE 68923722T2
Authority
DE
Germany
Prior art keywords
radiation thermometry
thermometry
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68923722T
Other languages
English (en)
Other versions
DE68923722D1 (de
Inventor
Fumio Tanaka
David P Dewitt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Publication of DE68923722D1 publication Critical patent/DE68923722D1/de
Application granted granted Critical
Publication of DE68923722T2 publication Critical patent/DE68923722T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/06Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0037Radiation pyrometry, e.g. infrared or optical thermometry for sensing the heat emitted by liquids
    • G01J5/004Radiation pyrometry, e.g. infrared or optical thermometry for sensing the heat emitted by liquids by molten metals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0044Furnaces, ovens, kilns
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/026Control of working procedures of a pyrometer, other than calibration; Bandwidth calculation; Gain control
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/0275Control or determination of height or distance or angle information for sensors or receivers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/05Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/05Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path
    • G01J5/051Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path using a gas purge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/06Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0801Means for wavelength selection or discrimination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0803Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0804Shutters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0803Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0805Means for chopping radiation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0846Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/59Radiation pyrometry, e.g. infrared or optical thermometry using polarisation; Details thereof
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/602Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80Calibration
    • G01J5/802Calibration by correcting for emissivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0074Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity
DE68923722T 1988-03-29 1989-03-21 Verfahren zur Strahlungsthermometrie. Expired - Lifetime DE68923722T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/175,051 US4881823A (en) 1988-03-29 1988-03-29 Radiation thermometry

Publications (2)

Publication Number Publication Date
DE68923722D1 DE68923722D1 (de) 1995-09-14
DE68923722T2 true DE68923722T2 (de) 1996-04-18

Family

ID=22638647

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68923722T Expired - Lifetime DE68923722T2 (de) 1988-03-29 1989-03-21 Verfahren zur Strahlungsthermometrie.

Country Status (4)

Country Link
US (1) US4881823A (de)
EP (1) EP0335224B1 (de)
JP (1) JPH0623672B2 (de)
DE (1) DE68923722T2 (de)

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US5314249A (en) * 1991-11-19 1994-05-24 Kawasaki Steel Corporation Surface condition measurement apparatus
DE69209270T2 (de) * 1991-12-13 1996-08-08 Kawasaki Steel Co Verfahren und Vorrichtung zur Prozesssteuerung eines Strahlung aussendenden Materials
CH685405A5 (de) * 1992-10-06 1995-06-30 Alusuisse Lonza Services Ag Temperaturmessung mit Zweiwellenlängenpyrometern.
FR2703455B1 (fr) * 1993-04-01 1995-05-12 Europ Gas Turbines Sa Pyromètre bichromatique.
US5505543A (en) * 1994-01-21 1996-04-09 The Boeing Company Emissivity measurement apparatus and method
MY113681A (en) * 1994-03-22 2002-04-30 Casio Computer Co Ltd Thermometer
JPH07324982A (ja) * 1994-05-30 1995-12-12 Nkk Corp 消耗型光ファイバ温度計
US5868496A (en) * 1994-06-28 1999-02-09 Massachusetts Institute Of Technology Non-contact surface temperature, emissivity, and area estimation
US6179466B1 (en) * 1994-12-19 2001-01-30 Applied Materials, Inc. Method and apparatus for measuring substrate temperatures
US5660472A (en) * 1994-12-19 1997-08-26 Applied Materials, Inc. Method and apparatus for measuring substrate temperatures
US5755511A (en) * 1994-12-19 1998-05-26 Applied Materials, Inc. Method and apparatus for measuring substrate temperatures
IL117951A (en) * 1995-09-06 1999-09-22 3T True Temperature Technologi Method and apparatus for true temperature determination
FI100135B (fi) * 1996-01-05 1997-09-30 Vaisala Oy Menetelmä ja lämpötila-anturirakenne säteilyvirheen eliminoimiseksi
US5690430A (en) * 1996-03-15 1997-11-25 Bethlehem Steel Corporation Apparatus and method for measuring temperature and/or emissivity of steel strip during a coating process
US5864776A (en) * 1997-08-27 1999-01-26 Mitsubishi Electric America, Inc. Apparatus and method for detecting an error in the placement of a lead frame on a surface of a die mold
DE19853513A1 (de) * 1997-11-21 1999-05-27 Omega Engineering Kombination aus Pyrometer und Multimeter
US7155363B1 (en) * 1997-12-01 2006-12-26 Mks Instruments, Inc. Thermal imaging for semiconductor process monitoring
DE19757447A1 (de) * 1997-12-23 1999-07-01 Braun Gmbh Temperaturberechnungsverfahren für Strahlungsthermometer
US6007241A (en) * 1998-02-20 1999-12-28 Applied Materials, Inc. Apparatus and method for measuring substrate temperature
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JP2007218591A (ja) * 2006-02-14 2007-08-30 Toyo Univ ハイブリッド型表面温度計、温度分布測定装置及び測定方法
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FR2973507B1 (fr) * 2011-03-29 2013-04-26 Univ Paris Ouest Nanterre La Defense Mesure de l'emissitivite thermique d'un corps
JP6035831B2 (ja) 2012-04-13 2016-11-30 Jfeスチール株式会社 温度測定方法および温度測定装置
CN103900723B (zh) 2014-04-25 2016-08-24 天津送变电易通电力科技有限公司 利用辐射谱的全部信息测火焰实际温度的方法及测量系统
JP6734153B2 (ja) * 2015-09-16 2020-08-05 三菱マテリアル株式会社 被測定物の温度、粉塵の温度及び粉塵の濃度を計測する方法
CN105319239B (zh) * 2015-12-03 2017-11-28 河南师范大学 一种材料极化方向发射率测量装置的控制方法
FR3059824B1 (fr) * 2016-12-07 2019-06-21 Ulis Capteur d'image infrarouge
CN108168709B (zh) * 2017-12-21 2019-10-15 合肥工业大学 一种托卡马克偏滤器靶板温度精确测量方法
JP7120834B2 (ja) * 2018-07-11 2022-08-17 株式会社神戸製鋼所 酸化膜厚測定装置および該方法
CN117232661B (zh) * 2023-11-16 2024-02-23 中国人民解放军63921部队 一种多通道红外辐射测量系统及多波长实时温度测量方法

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Also Published As

Publication number Publication date
DE68923722D1 (de) 1995-09-14
JPH0623672B2 (ja) 1994-03-30
EP0335224A2 (de) 1989-10-04
EP0335224B1 (de) 1995-08-09
US4881823A (en) 1989-11-21
EP0335224A3 (en) 1990-10-31
JPH0285730A (ja) 1990-03-27

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