DE68918757D1 - Beugungsvorrichtung. - Google Patents

Beugungsvorrichtung.

Info

Publication number
DE68918757D1
DE68918757D1 DE68918757T DE68918757T DE68918757D1 DE 68918757 D1 DE68918757 D1 DE 68918757D1 DE 68918757 T DE68918757 T DE 68918757T DE 68918757 T DE68918757 T DE 68918757T DE 68918757 D1 DE68918757 D1 DE 68918757D1
Authority
DE
Germany
Prior art keywords
diffraction device
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68918757T
Other languages
English (en)
Other versions
DE68918757T2 (de
Inventor
Tetsuro Kuwayama
Naosato Taniguchi
Yoko Yoshinaga
Nobuo Kushibiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE68918757D1 publication Critical patent/DE68918757D1/de
Application granted granted Critical
Publication of DE68918757T2 publication Critical patent/DE68918757T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Holo Graphy (AREA)
  • Instrument Panels (AREA)
DE68918757T 1988-06-03 1989-06-02 Beugungsvorrichtung. Expired - Fee Related DE68918757T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63135635A JPH01306886A (ja) 1988-06-03 1988-06-03 体積位相型回折格子

Publications (2)

Publication Number Publication Date
DE68918757D1 true DE68918757D1 (de) 1994-11-17
DE68918757T2 DE68918757T2 (de) 1995-03-02

Family

ID=15156419

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68918757T Expired - Fee Related DE68918757T2 (de) 1988-06-03 1989-06-02 Beugungsvorrichtung.

Country Status (4)

Country Link
US (1) US5363220A (de)
EP (1) EP0344811B1 (de)
JP (1) JPH01306886A (de)
DE (1) DE68918757T2 (de)

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Also Published As

Publication number Publication date
EP0344811B1 (de) 1994-10-12
JPH01306886A (ja) 1989-12-11
EP0344811A2 (de) 1989-12-06
US5363220A (en) 1994-11-08
DE68918757T2 (de) 1995-03-02
EP0344811A3 (en) 1990-01-24

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